8/15/2011	9:21:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/15/2011	9:21:11 AM	Recipe started at 9:21 AM
8/15/2011	9:21:11 AM	Helium valve closed
8/15/2011	9:21:11 AM	H2 valve closed
8/15/2011	9:21:11 AM	BCl3 valve closed
8/15/2011	9:21:11 AM	PH3 valve closed
8/15/2011	9:21:11 AM	SiCl4 pre valve closed
8/15/2011	9:21:11 AM	SiCl4 post valve closed
8/15/2011	9:21:11 AM	Main Vac valve closed
8/15/2011	9:21:11 AM	Bypass valve closed
8/15/2011	9:21:11 AM	Bubbler valve closed
8/15/2011	9:21:11 AM	Helium MFC set to  0.000000
8/15/2011	9:21:11 AM	H2 MFC set to  0.000000
8/15/2011	9:21:11 AM	BCl3 MFC set to  0.000000
8/15/2011	9:21:11 AM	PHl3 MFC set to  0.000000
8/15/2011	9:21:11 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:21:11 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:21:11 AM	Tube furnace set to 0
8/15/2011	9:21:14 AM	H2 valve closed
8/15/2011	9:21:14 AM	BCl3 valve closed
8/15/2011	9:21:14 AM	PH3 valve closed
8/15/2011	9:21:14 AM	SiCl4 pre valve closed
8/15/2011	9:21:14 AM	SiCl4 post valve closed
8/15/2011	9:21:14 AM	Main Vac valve closed
8/15/2011	9:21:14 AM	Bypass valve closed
8/15/2011	9:21:14 AM	Bubbler valve closed
8/15/2011	9:21:14 AM	Helium valve opened
8/15/2011	9:21:14 AM	Helium MFC set to  500.000000
8/15/2011	9:21:14 AM	H2 MFC set to  0.000000
8/15/2011	9:21:14 AM	BCl3 MFC set to  0.000000
8/15/2011	9:21:14 AM	PHl3 MFC set to  0.000000
8/15/2011	9:21:14 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:21:14 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:21:14 AM	Tube furnace set to 0
8/15/2011	9:22:20 AM	Helium valve closed
8/15/2011	9:22:20 AM	H2 valve closed
8/15/2011	9:22:20 AM	BCl3 valve closed
8/15/2011	9:22:20 AM	PH3 valve closed
8/15/2011	9:22:20 AM	SiCl4 pre valve closed
8/15/2011	9:22:20 AM	SiCl4 post valve closed
8/15/2011	9:22:20 AM	Main Vac valve closed
8/15/2011	9:22:20 AM	Bypass valve closed
8/15/2011	9:22:20 AM	Bubbler valve closed
8/15/2011	9:22:20 AM	Helium MFC set to  0.000000
8/15/2011	9:22:20 AM	H2 MFC set to  0.000000
8/15/2011	9:22:20 AM	BCl3 MFC set to  0.000000
8/15/2011	9:22:20 AM	PHl3 MFC set to  0.000000
8/15/2011	9:22:20 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:22:20 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:22:20 AM	Tube furnace set to 0
8/15/2011	9:22:21 AM	Run finished at 9:22 AM
8/15/2011	9:22:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/15/2011	9:31:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/15/2011	9:31:29 AM	Recipe started at 9:31 AM
8/15/2011	9:31:29 AM	Helium valve closed
8/15/2011	9:31:29 AM	H2 valve closed
8/15/2011	9:31:29 AM	BCl3 valve closed
8/15/2011	9:31:29 AM	PH3 valve closed
8/15/2011	9:31:29 AM	SiCl4 pre valve closed
8/15/2011	9:31:29 AM	SiCl4 post valve closed
8/15/2011	9:31:29 AM	Main Vac valve closed
8/15/2011	9:31:29 AM	Bubbler valve closed
8/15/2011	9:31:29 AM	Bypass valve opened
8/15/2011	9:31:29 AM	Helium MFC set to  0.000000
8/15/2011	9:31:29 AM	H2 MFC set to  0.000000
8/15/2011	9:31:29 AM	BCl3 MFC set to  0.000000
8/15/2011	9:31:29 AM	PHl3 MFC set to  0.000000
8/15/2011	9:31:29 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:31:29 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:31:29 AM	Tube furnace set to 0
8/15/2011	9:32:54 AM	Helium valve closed
8/15/2011	9:32:54 AM	H2 valve closed
8/15/2011	9:32:54 AM	BCl3 valve closed
8/15/2011	9:32:54 AM	PH3 valve closed
8/15/2011	9:32:54 AM	SiCl4 pre valve closed
8/15/2011	9:32:54 AM	SiCl4 post valve closed
8/15/2011	9:32:54 AM	Main Vac valve closed
8/15/2011	9:32:54 AM	Bubbler valve closed
8/15/2011	9:32:54 AM	Bypass valve opened
8/15/2011	9:32:54 AM	Helium MFC set to  0.000000
8/15/2011	9:32:54 AM	H2 MFC set to  0.000000
8/15/2011	9:32:54 AM	BCl3 MFC set to  0.000000
8/15/2011	9:32:54 AM	PHl3 MFC set to  0.000000
8/15/2011	9:32:54 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:32:54 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:32:54 AM	Tube furnace set to 0
8/15/2011	9:33:54 AM	Helium valve closed
8/15/2011	9:33:54 AM	H2 valve closed
8/15/2011	9:33:54 AM	BCl3 valve closed
8/15/2011	9:33:54 AM	PH3 valve closed
8/15/2011	9:33:54 AM	SiCl4 pre valve closed
8/15/2011	9:33:54 AM	SiCl4 post valve closed
8/15/2011	9:33:54 AM	Bypass valve closed
8/15/2011	9:33:54 AM	Bubbler valve closed
8/15/2011	9:33:54 AM	Main Vac valve opened
8/15/2011	9:33:54 AM	Helium MFC set to  0.000000
8/15/2011	9:33:54 AM	H2 MFC set to  0.000000
8/15/2011	9:33:54 AM	BCl3 MFC set to  0.000000
8/15/2011	9:33:54 AM	PHl3 MFC set to  0.000000
8/15/2011	9:33:54 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:33:54 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:33:55 AM	Tube furnace set to 0
8/15/2011	9:33:56 AM	Run finished at 9:33 AM
8/15/2011	9:33:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/15/2011	9:35:13 AM	Recipe started at 9:35 AM
8/15/2011	9:35:13 AM	Helium valve closed
8/15/2011	9:35:13 AM	H2 valve closed
8/15/2011	9:35:13 AM	BCl3 valve closed
8/15/2011	9:35:13 AM	PH3 valve closed
8/15/2011	9:35:13 AM	SiCl4 pre valve closed
8/15/2011	9:35:13 AM	SiCl4 post valve closed
8/15/2011	9:35:13 AM	Bypass valve closed
8/15/2011	9:35:13 AM	Bubbler valve closed
8/15/2011	9:35:13 AM	Main Vac valve opened
8/15/2011	9:35:13 AM	Helium MFC set to  0.000000
8/15/2011	9:35:13 AM	H2 MFC set to  0.000000
8/15/2011	9:35:13 AM	BCl3 MFC set to  0.000000
8/15/2011	9:35:13 AM	PHl3 MFC set to  0.000000
8/15/2011	9:35:13 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:35:13 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:35:13 AM	Tube furnace set to 100
8/15/2011	9:35:43 AM	H2 valve closed
8/15/2011	9:35:43 AM	BCl3 valve closed
8/15/2011	9:35:43 AM	PH3 valve closed
8/15/2011	9:35:43 AM	SiCl4 pre valve closed
8/15/2011	9:35:43 AM	SiCl4 post valve closed
8/15/2011	9:35:43 AM	Bypass valve closed
8/15/2011	9:35:43 AM	Bubbler valve closed
8/15/2011	9:35:43 AM	Helium valve opened
8/15/2011	9:35:43 AM	Main Vac valve opened
8/15/2011	9:35:44 AM	Helium MFC set to  20.000000
8/15/2011	9:35:44 AM	H2 MFC set to  0.000000
8/15/2011	9:35:44 AM	BCl3 MFC set to  0.000000
8/15/2011	9:35:44 AM	PHl3 MFC set to  0.000000
8/15/2011	9:35:44 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:35:44 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:35:44 AM	Tube furnace set to 100
8/15/2011	9:36:14 AM	Helium valve closed
8/15/2011	9:36:14 AM	H2 valve closed
8/15/2011	9:36:14 AM	BCl3 valve closed
8/15/2011	9:36:14 AM	PH3 valve closed
8/15/2011	9:36:14 AM	SiCl4 pre valve closed
8/15/2011	9:36:14 AM	SiCl4 post valve closed
8/15/2011	9:36:14 AM	Bypass valve closed
8/15/2011	9:36:14 AM	Bubbler valve closed
8/15/2011	9:36:14 AM	Main Vac valve opened
8/15/2011	9:36:14 AM	Helium MFC set to  0.000000
8/15/2011	9:36:14 AM	H2 MFC set to  0.000000
8/15/2011	9:36:14 AM	BCl3 MFC set to  0.000000
8/15/2011	9:36:14 AM	PHl3 MFC set to  0.000000
8/15/2011	9:36:14 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:36:14 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:36:14 AM	Tube furnace set to 100
8/15/2011	9:36:44 AM	H2 valve closed
8/15/2011	9:36:44 AM	BCl3 valve closed
8/15/2011	9:36:44 AM	PH3 valve closed
8/15/2011	9:36:44 AM	SiCl4 pre valve closed
8/15/2011	9:36:44 AM	SiCl4 post valve closed
8/15/2011	9:36:44 AM	Bypass valve closed
8/15/2011	9:36:44 AM	Bubbler valve closed
8/15/2011	9:36:44 AM	Helium valve opened
8/15/2011	9:36:44 AM	Main Vac valve opened
8/15/2011	9:36:44 AM	Helium MFC set to  20.000000
8/15/2011	9:36:44 AM	H2 MFC set to  0.000000
8/15/2011	9:36:44 AM	BCl3 MFC set to  0.000000
8/15/2011	9:36:44 AM	PHl3 MFC set to  0.000000
8/15/2011	9:36:44 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:36:44 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:36:44 AM	Tube furnace set to 100
8/15/2011	9:37:14 AM	Helium valve closed
8/15/2011	9:37:14 AM	H2 valve closed
8/15/2011	9:37:14 AM	BCl3 valve closed
8/15/2011	9:37:14 AM	PH3 valve closed
8/15/2011	9:37:14 AM	SiCl4 pre valve closed
8/15/2011	9:37:14 AM	SiCl4 post valve closed
8/15/2011	9:37:14 AM	Bypass valve closed
8/15/2011	9:37:14 AM	Bubbler valve closed
8/15/2011	9:37:14 AM	Main Vac valve opened
8/15/2011	9:37:14 AM	Helium MFC set to  0.000000
8/15/2011	9:37:14 AM	H2 MFC set to  0.000000
8/15/2011	9:37:14 AM	BCl3 MFC set to  0.000000
8/15/2011	9:37:14 AM	PHl3 MFC set to  0.000000
8/15/2011	9:37:14 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:37:14 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:37:14 AM	Tube furnace set to 100
8/15/2011	9:37:44 AM	H2 valve closed
8/15/2011	9:37:44 AM	BCl3 valve closed
8/15/2011	9:37:44 AM	PH3 valve closed
8/15/2011	9:37:44 AM	SiCl4 pre valve closed
8/15/2011	9:37:44 AM	SiCl4 post valve closed
8/15/2011	9:37:44 AM	Bypass valve closed
8/15/2011	9:37:44 AM	Bubbler valve closed
8/15/2011	9:37:44 AM	Helium valve opened
8/15/2011	9:37:44 AM	Main Vac valve opened
8/15/2011	9:37:44 AM	Helium MFC set to  20.000000
8/15/2011	9:37:44 AM	H2 MFC set to  0.000000
8/15/2011	9:37:44 AM	BCl3 MFC set to  0.000000
8/15/2011	9:37:44 AM	PHl3 MFC set to  0.000000
8/15/2011	9:37:44 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:37:44 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:37:44 AM	Tube furnace set to 100
8/15/2011	9:38:14 AM	Helium valve closed
8/15/2011	9:38:14 AM	H2 valve closed
8/15/2011	9:38:14 AM	BCl3 valve closed
8/15/2011	9:38:14 AM	PH3 valve closed
8/15/2011	9:38:14 AM	SiCl4 pre valve closed
8/15/2011	9:38:14 AM	SiCl4 post valve closed
8/15/2011	9:38:14 AM	Bypass valve closed
8/15/2011	9:38:14 AM	Bubbler valve closed
8/15/2011	9:38:14 AM	Main Vac valve opened
8/15/2011	9:38:14 AM	Helium MFC set to  0.000000
8/15/2011	9:38:14 AM	H2 MFC set to  0.000000
8/15/2011	9:38:14 AM	BCl3 MFC set to  0.000000
8/15/2011	9:38:14 AM	PHl3 MFC set to  0.000000
8/15/2011	9:38:14 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:38:14 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:38:15 AM	Tube furnace set to 100
8/15/2011	9:38:45 AM	H2 valve closed
8/15/2011	9:38:45 AM	BCl3 valve closed
8/15/2011	9:38:45 AM	PH3 valve closed
8/15/2011	9:38:45 AM	SiCl4 pre valve closed
8/15/2011	9:38:45 AM	SiCl4 post valve closed
8/15/2011	9:38:45 AM	Bypass valve closed
8/15/2011	9:38:45 AM	Bubbler valve closed
8/15/2011	9:38:45 AM	Helium valve opened
8/15/2011	9:38:45 AM	Main Vac valve opened
8/15/2011	9:38:45 AM	Helium MFC set to  20.000000
8/15/2011	9:38:45 AM	H2 MFC set to  0.000000
8/15/2011	9:38:45 AM	BCl3 MFC set to  0.000000
8/15/2011	9:38:45 AM	PHl3 MFC set to  0.000000
8/15/2011	9:38:45 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:38:45 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:38:45 AM	Tube furnace set to 100
8/15/2011	9:39:15 AM	Helium valve closed
8/15/2011	9:39:15 AM	H2 valve closed
8/15/2011	9:39:15 AM	BCl3 valve closed
8/15/2011	9:39:15 AM	PH3 valve closed
8/15/2011	9:39:15 AM	SiCl4 pre valve closed
8/15/2011	9:39:15 AM	SiCl4 post valve closed
8/15/2011	9:39:15 AM	Bypass valve closed
8/15/2011	9:39:15 AM	Bubbler valve closed
8/15/2011	9:39:15 AM	Main Vac valve opened
8/15/2011	9:39:15 AM	Helium MFC set to  0.000000
8/15/2011	9:39:15 AM	H2 MFC set to  0.000000
8/15/2011	9:39:15 AM	BCl3 MFC set to  0.000000
8/15/2011	9:39:15 AM	PHl3 MFC set to  0.000000
8/15/2011	9:39:15 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:39:15 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:39:15 AM	Tube furnace set to 100
8/15/2011	9:39:45 AM	H2 valve closed
8/15/2011	9:39:45 AM	BCl3 valve closed
8/15/2011	9:39:45 AM	PH3 valve closed
8/15/2011	9:39:45 AM	SiCl4 pre valve closed
8/15/2011	9:39:45 AM	SiCl4 post valve closed
8/15/2011	9:39:45 AM	Bypass valve closed
8/15/2011	9:39:45 AM	Bubbler valve closed
8/15/2011	9:39:45 AM	Helium valve opened
8/15/2011	9:39:45 AM	Main Vac valve opened
8/15/2011	9:39:45 AM	Helium MFC set to  20.000000
8/15/2011	9:39:45 AM	H2 MFC set to  0.000000
8/15/2011	9:39:45 AM	BCl3 MFC set to  0.000000
8/15/2011	9:39:45 AM	PHl3 MFC set to  0.000000
8/15/2011	9:39:45 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:39:45 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:39:45 AM	Tube furnace set to 100
8/15/2011	9:40:15 AM	Helium valve closed
8/15/2011	9:40:15 AM	H2 valve closed
8/15/2011	9:40:15 AM	BCl3 valve closed
8/15/2011	9:40:15 AM	PH3 valve closed
8/15/2011	9:40:15 AM	SiCl4 pre valve closed
8/15/2011	9:40:15 AM	SiCl4 post valve closed
8/15/2011	9:40:15 AM	Bypass valve closed
8/15/2011	9:40:15 AM	Bubbler valve closed
8/15/2011	9:40:15 AM	Main Vac valve opened
8/15/2011	9:40:15 AM	Helium MFC set to  0.000000
8/15/2011	9:40:15 AM	H2 MFC set to  0.000000
8/15/2011	9:40:15 AM	BCl3 MFC set to  0.000000
8/15/2011	9:40:15 AM	PHl3 MFC set to  0.000000
8/15/2011	9:40:15 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:40:15 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:40:15 AM	Tube furnace set to 100
8/15/2011	9:40:45 AM	H2 valve closed
8/15/2011	9:40:45 AM	BCl3 valve closed
8/15/2011	9:40:45 AM	PH3 valve closed
8/15/2011	9:40:45 AM	SiCl4 pre valve closed
8/15/2011	9:40:45 AM	SiCl4 post valve closed
8/15/2011	9:40:45 AM	Bypass valve closed
8/15/2011	9:40:45 AM	Bubbler valve closed
8/15/2011	9:40:45 AM	Helium valve opened
8/15/2011	9:40:45 AM	Main Vac valve opened
8/15/2011	9:40:45 AM	Helium MFC set to  20.000000
8/15/2011	9:40:45 AM	H2 MFC set to  0.000000
8/15/2011	9:40:45 AM	BCl3 MFC set to  0.000000
8/15/2011	9:40:45 AM	PHl3 MFC set to  0.000000
8/15/2011	9:40:45 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:40:45 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:40:46 AM	Tube furnace set to 100
8/15/2011	9:41:16 AM	Helium valve closed
8/15/2011	9:41:16 AM	H2 valve closed
8/15/2011	9:41:16 AM	BCl3 valve closed
8/15/2011	9:41:16 AM	PH3 valve closed
8/15/2011	9:41:16 AM	SiCl4 pre valve closed
8/15/2011	9:41:16 AM	SiCl4 post valve closed
8/15/2011	9:41:16 AM	Bypass valve closed
8/15/2011	9:41:16 AM	Bubbler valve closed
8/15/2011	9:41:16 AM	Main Vac valve opened
8/15/2011	9:41:16 AM	Helium MFC set to  0.000000
8/15/2011	9:41:16 AM	H2 MFC set to  0.000000
8/15/2011	9:41:16 AM	BCl3 MFC set to  0.000000
8/15/2011	9:41:16 AM	PHl3 MFC set to  0.000000
8/15/2011	9:41:16 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:41:16 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:41:16 AM	Tube furnace set to 100
8/15/2011	9:41:46 AM	H2 valve closed
8/15/2011	9:41:46 AM	BCl3 valve closed
8/15/2011	9:41:46 AM	PH3 valve closed
8/15/2011	9:41:46 AM	SiCl4 pre valve closed
8/15/2011	9:41:46 AM	SiCl4 post valve closed
8/15/2011	9:41:46 AM	Bypass valve closed
8/15/2011	9:41:46 AM	Bubbler valve closed
8/15/2011	9:41:46 AM	Helium valve opened
8/15/2011	9:41:46 AM	Main Vac valve opened
8/15/2011	9:41:46 AM	Helium MFC set to  20.000000
8/15/2011	9:41:46 AM	H2 MFC set to  0.000000
8/15/2011	9:41:46 AM	BCl3 MFC set to  0.000000
8/15/2011	9:41:46 AM	PHl3 MFC set to  0.000000
8/15/2011	9:41:46 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:41:46 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:41:46 AM	Tube furnace set to 100
8/15/2011	9:42:16 AM	Helium valve closed
8/15/2011	9:42:16 AM	H2 valve closed
8/15/2011	9:42:16 AM	BCl3 valve closed
8/15/2011	9:42:16 AM	PH3 valve closed
8/15/2011	9:42:16 AM	SiCl4 pre valve closed
8/15/2011	9:42:16 AM	SiCl4 post valve closed
8/15/2011	9:42:16 AM	Bypass valve closed
8/15/2011	9:42:16 AM	Bubbler valve closed
8/15/2011	9:42:16 AM	Main Vac valve opened
8/15/2011	9:42:16 AM	Helium MFC set to  0.000000
8/15/2011	9:42:16 AM	H2 MFC set to  0.000000
8/15/2011	9:42:16 AM	BCl3 MFC set to  0.000000
8/15/2011	9:42:16 AM	PHl3 MFC set to  0.000000
8/15/2011	9:42:16 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:42:16 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:42:16 AM	Tube furnace set to 100
8/15/2011	9:42:46 AM	H2 valve closed
8/15/2011	9:42:46 AM	BCl3 valve closed
8/15/2011	9:42:46 AM	PH3 valve closed
8/15/2011	9:42:46 AM	SiCl4 pre valve closed
8/15/2011	9:42:46 AM	SiCl4 post valve closed
8/15/2011	9:42:46 AM	Bypass valve closed
8/15/2011	9:42:46 AM	Bubbler valve closed
8/15/2011	9:42:46 AM	Helium valve opened
8/15/2011	9:42:46 AM	Main Vac valve opened
8/15/2011	9:42:46 AM	Helium MFC set to  20.000000
8/15/2011	9:42:46 AM	H2 MFC set to  0.000000
8/15/2011	9:42:46 AM	BCl3 MFC set to  0.000000
8/15/2011	9:42:46 AM	PHl3 MFC set to  0.000000
8/15/2011	9:42:46 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:42:46 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:42:46 AM	Tube furnace set to 100
8/15/2011	9:43:16 AM	Helium valve closed
8/15/2011	9:43:16 AM	H2 valve closed
8/15/2011	9:43:16 AM	BCl3 valve closed
8/15/2011	9:43:16 AM	PH3 valve closed
8/15/2011	9:43:16 AM	SiCl4 pre valve closed
8/15/2011	9:43:16 AM	SiCl4 post valve closed
8/15/2011	9:43:16 AM	Bypass valve closed
8/15/2011	9:43:16 AM	Bubbler valve closed
8/15/2011	9:43:16 AM	Main Vac valve opened
8/15/2011	9:43:16 AM	Helium MFC set to  0.000000
8/15/2011	9:43:16 AM	H2 MFC set to  0.000000
8/15/2011	9:43:16 AM	BCl3 MFC set to  0.000000
8/15/2011	9:43:16 AM	PHl3 MFC set to  0.000000
8/15/2011	9:43:16 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:43:16 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:43:17 AM	Tube furnace set to 100
8/15/2011	9:43:47 AM	H2 valve closed
8/15/2011	9:43:47 AM	BCl3 valve closed
8/15/2011	9:43:47 AM	PH3 valve closed
8/15/2011	9:43:47 AM	SiCl4 pre valve closed
8/15/2011	9:43:47 AM	SiCl4 post valve closed
8/15/2011	9:43:47 AM	Bypass valve closed
8/15/2011	9:43:47 AM	Bubbler valve closed
8/15/2011	9:43:47 AM	Helium valve opened
8/15/2011	9:43:47 AM	Main Vac valve opened
8/15/2011	9:43:47 AM	Helium MFC set to  20.000000
8/15/2011	9:43:47 AM	H2 MFC set to  0.000000
8/15/2011	9:43:47 AM	BCl3 MFC set to  0.000000
8/15/2011	9:43:47 AM	PHl3 MFC set to  0.000000
8/15/2011	9:43:47 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:43:47 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:43:47 AM	Tube furnace set to 100
8/15/2011	9:44:17 AM	Helium valve closed
8/15/2011	9:44:17 AM	H2 valve closed
8/15/2011	9:44:17 AM	BCl3 valve closed
8/15/2011	9:44:17 AM	PH3 valve closed
8/15/2011	9:44:17 AM	SiCl4 pre valve closed
8/15/2011	9:44:17 AM	SiCl4 post valve closed
8/15/2011	9:44:17 AM	Bypass valve closed
8/15/2011	9:44:17 AM	Bubbler valve closed
8/15/2011	9:44:17 AM	Main Vac valve opened
8/15/2011	9:44:17 AM	Helium MFC set to  0.000000
8/15/2011	9:44:17 AM	H2 MFC set to  0.000000
8/15/2011	9:44:17 AM	BCl3 MFC set to  0.000000
8/15/2011	9:44:17 AM	PHl3 MFC set to  0.000000
8/15/2011	9:44:17 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:44:17 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:44:17 AM	Tube furnace set to 100
8/15/2011	9:44:47 AM	H2 valve closed
8/15/2011	9:44:47 AM	BCl3 valve closed
8/15/2011	9:44:47 AM	PH3 valve closed
8/15/2011	9:44:47 AM	SiCl4 pre valve closed
8/15/2011	9:44:47 AM	SiCl4 post valve closed
8/15/2011	9:44:47 AM	Bypass valve closed
8/15/2011	9:44:47 AM	Bubbler valve closed
8/15/2011	9:44:47 AM	Helium valve opened
8/15/2011	9:44:47 AM	Main Vac valve opened
8/15/2011	9:44:47 AM	Helium MFC set to  20.000000
8/15/2011	9:44:47 AM	H2 MFC set to  0.000000
8/15/2011	9:44:47 AM	BCl3 MFC set to  0.000000
8/15/2011	9:44:47 AM	PHl3 MFC set to  0.000000
8/15/2011	9:44:47 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:44:47 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:44:47 AM	Tube furnace set to 100
8/15/2011	9:45:17 AM	Helium valve closed
8/15/2011	9:45:17 AM	H2 valve closed
8/15/2011	9:45:17 AM	BCl3 valve closed
8/15/2011	9:45:17 AM	PH3 valve closed
8/15/2011	9:45:17 AM	SiCl4 pre valve closed
8/15/2011	9:45:17 AM	SiCl4 post valve closed
8/15/2011	9:45:17 AM	Bypass valve closed
8/15/2011	9:45:17 AM	Bubbler valve closed
8/15/2011	9:45:17 AM	Main Vac valve opened
8/15/2011	9:45:17 AM	Helium MFC set to  0.000000
8/15/2011	9:45:17 AM	H2 MFC set to  0.000000
8/15/2011	9:45:17 AM	BCl3 MFC set to  0.000000
8/15/2011	9:45:17 AM	PHl3 MFC set to  0.000000
8/15/2011	9:45:17 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:45:17 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:45:17 AM	Tube furnace set to 100
8/15/2011	9:45:18 AM	Run finished at 9:45 AM
8/15/2011	9:46:07 AM	Recipe started at 9:46 AM
8/15/2011	9:46:07 AM	Helium valve closed
8/15/2011	9:46:07 AM	H2 valve closed
8/15/2011	9:46:07 AM	BCl3 valve closed
8/15/2011	9:46:07 AM	PH3 valve closed
8/15/2011	9:46:07 AM	SiCl4 pre valve closed
8/15/2011	9:46:07 AM	SiCl4 post valve closed
8/15/2011	9:46:07 AM	Bypass valve closed
8/15/2011	9:46:07 AM	Bubbler valve closed
8/15/2011	9:46:07 AM	Main Vac valve opened
8/15/2011	9:46:07 AM	Helium MFC set to  0.000000
8/15/2011	9:46:07 AM	H2 MFC set to  0.000000
8/15/2011	9:46:07 AM	BCl3 MFC set to  0.000000
8/15/2011	9:46:07 AM	PHl3 MFC set to  0.000000
8/15/2011	9:46:07 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:46:07 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:46:07 AM	Tube furnace set to 100
8/15/2011	9:46:37 AM	H2 valve closed
8/15/2011	9:46:37 AM	BCl3 valve closed
8/15/2011	9:46:37 AM	PH3 valve closed
8/15/2011	9:46:37 AM	SiCl4 pre valve closed
8/15/2011	9:46:37 AM	SiCl4 post valve closed
8/15/2011	9:46:37 AM	Bypass valve closed
8/15/2011	9:46:37 AM	Bubbler valve closed
8/15/2011	9:46:37 AM	Helium valve opened
8/15/2011	9:46:37 AM	Main Vac valve opened
8/15/2011	9:46:37 AM	Helium MFC set to  20.000000
8/15/2011	9:46:37 AM	H2 MFC set to  0.000000
8/15/2011	9:46:37 AM	BCl3 MFC set to  0.000000
8/15/2011	9:46:37 AM	PHl3 MFC set to  0.000000
8/15/2011	9:46:37 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:46:37 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:46:37 AM	Tube furnace set to 100
8/15/2011	9:47:07 AM	Helium valve closed
8/15/2011	9:47:07 AM	H2 valve closed
8/15/2011	9:47:07 AM	BCl3 valve closed
8/15/2011	9:47:07 AM	PH3 valve closed
8/15/2011	9:47:07 AM	SiCl4 pre valve closed
8/15/2011	9:47:07 AM	SiCl4 post valve closed
8/15/2011	9:47:07 AM	Bypass valve closed
8/15/2011	9:47:07 AM	Bubbler valve closed
8/15/2011	9:47:07 AM	Main Vac valve opened
8/15/2011	9:47:07 AM	Helium MFC set to  0.000000
8/15/2011	9:47:07 AM	H2 MFC set to  0.000000
8/15/2011	9:47:07 AM	BCl3 MFC set to  0.000000
8/15/2011	9:47:07 AM	PHl3 MFC set to  0.000000
8/15/2011	9:47:07 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:47:07 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:47:07 AM	Tube furnace set to 100
8/15/2011	9:47:37 AM	H2 valve closed
8/15/2011	9:47:37 AM	BCl3 valve closed
8/15/2011	9:47:37 AM	PH3 valve closed
8/15/2011	9:47:37 AM	SiCl4 pre valve closed
8/15/2011	9:47:37 AM	SiCl4 post valve closed
8/15/2011	9:47:37 AM	Bypass valve closed
8/15/2011	9:47:37 AM	Bubbler valve closed
8/15/2011	9:47:37 AM	Helium valve opened
8/15/2011	9:47:37 AM	Main Vac valve opened
8/15/2011	9:47:37 AM	Helium MFC set to  20.000000
8/15/2011	9:47:37 AM	H2 MFC set to  0.000000
8/15/2011	9:47:37 AM	BCl3 MFC set to  0.000000
8/15/2011	9:47:37 AM	PHl3 MFC set to  0.000000
8/15/2011	9:47:37 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:47:37 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:47:37 AM	Tube furnace set to 100
8/15/2011	9:48:07 AM	Helium valve closed
8/15/2011	9:48:07 AM	H2 valve closed
8/15/2011	9:48:07 AM	BCl3 valve closed
8/15/2011	9:48:07 AM	PH3 valve closed
8/15/2011	9:48:07 AM	SiCl4 pre valve closed
8/15/2011	9:48:07 AM	SiCl4 post valve closed
8/15/2011	9:48:07 AM	Bypass valve closed
8/15/2011	9:48:07 AM	Bubbler valve closed
8/15/2011	9:48:07 AM	Main Vac valve opened
8/15/2011	9:48:07 AM	Helium MFC set to  0.000000
8/15/2011	9:48:07 AM	H2 MFC set to  0.000000
8/15/2011	9:48:07 AM	BCl3 MFC set to  0.000000
8/15/2011	9:48:07 AM	PHl3 MFC set to  0.000000
8/15/2011	9:48:07 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:48:07 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:48:07 AM	Tube furnace set to 100
8/15/2011	9:48:38 AM	H2 valve closed
8/15/2011	9:48:38 AM	BCl3 valve closed
8/15/2011	9:48:38 AM	PH3 valve closed
8/15/2011	9:48:38 AM	SiCl4 pre valve closed
8/15/2011	9:48:38 AM	SiCl4 post valve closed
8/15/2011	9:48:38 AM	Bypass valve closed
8/15/2011	9:48:38 AM	Bubbler valve closed
8/15/2011	9:48:38 AM	Helium valve opened
8/15/2011	9:48:38 AM	Main Vac valve opened
8/15/2011	9:48:38 AM	Helium MFC set to  20.000000
8/15/2011	9:48:38 AM	H2 MFC set to  0.000000
8/15/2011	9:48:38 AM	BCl3 MFC set to  0.000000
8/15/2011	9:48:38 AM	PHl3 MFC set to  0.000000
8/15/2011	9:48:38 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:48:38 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:48:38 AM	Tube furnace set to 100
8/15/2011	9:49:08 AM	Helium valve closed
8/15/2011	9:49:08 AM	H2 valve closed
8/15/2011	9:49:08 AM	BCl3 valve closed
8/15/2011	9:49:08 AM	PH3 valve closed
8/15/2011	9:49:08 AM	SiCl4 pre valve closed
8/15/2011	9:49:08 AM	SiCl4 post valve closed
8/15/2011	9:49:08 AM	Bypass valve closed
8/15/2011	9:49:08 AM	Bubbler valve closed
8/15/2011	9:49:08 AM	Main Vac valve opened
8/15/2011	9:49:08 AM	Helium MFC set to  0.000000
8/15/2011	9:49:08 AM	H2 MFC set to  0.000000
8/15/2011	9:49:08 AM	BCl3 MFC set to  0.000000
8/15/2011	9:49:08 AM	PHl3 MFC set to  0.000000
8/15/2011	9:49:08 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:49:08 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:49:08 AM	Tube furnace set to 100
8/15/2011	9:49:38 AM	H2 valve closed
8/15/2011	9:49:38 AM	BCl3 valve closed
8/15/2011	9:49:38 AM	PH3 valve closed
8/15/2011	9:49:38 AM	SiCl4 pre valve closed
8/15/2011	9:49:38 AM	SiCl4 post valve closed
8/15/2011	9:49:38 AM	Bypass valve closed
8/15/2011	9:49:38 AM	Bubbler valve closed
8/15/2011	9:49:38 AM	Helium valve opened
8/15/2011	9:49:38 AM	Main Vac valve opened
8/15/2011	9:49:38 AM	Helium MFC set to  20.000000
8/15/2011	9:49:38 AM	H2 MFC set to  0.000000
8/15/2011	9:49:38 AM	BCl3 MFC set to  0.000000
8/15/2011	9:49:38 AM	PHl3 MFC set to  0.000000
8/15/2011	9:49:38 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:49:38 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:49:38 AM	Tube furnace set to 100
8/15/2011	9:50:08 AM	Helium valve closed
8/15/2011	9:50:08 AM	H2 valve closed
8/15/2011	9:50:08 AM	BCl3 valve closed
8/15/2011	9:50:08 AM	PH3 valve closed
8/15/2011	9:50:08 AM	SiCl4 pre valve closed
8/15/2011	9:50:08 AM	SiCl4 post valve closed
8/15/2011	9:50:08 AM	Bypass valve closed
8/15/2011	9:50:08 AM	Bubbler valve closed
8/15/2011	9:50:08 AM	Main Vac valve opened
8/15/2011	9:50:08 AM	Helium MFC set to  0.000000
8/15/2011	9:50:08 AM	H2 MFC set to  0.000000
8/15/2011	9:50:08 AM	BCl3 MFC set to  0.000000
8/15/2011	9:50:08 AM	PHl3 MFC set to  0.000000
8/15/2011	9:50:08 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:50:08 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:50:08 AM	Tube furnace set to 100
8/15/2011	9:50:38 AM	H2 valve closed
8/15/2011	9:50:38 AM	BCl3 valve closed
8/15/2011	9:50:38 AM	PH3 valve closed
8/15/2011	9:50:38 AM	SiCl4 pre valve closed
8/15/2011	9:50:38 AM	SiCl4 post valve closed
8/15/2011	9:50:38 AM	Bypass valve closed
8/15/2011	9:50:38 AM	Bubbler valve closed
8/15/2011	9:50:38 AM	Helium valve opened
8/15/2011	9:50:38 AM	Main Vac valve opened
8/15/2011	9:50:38 AM	Helium MFC set to  20.000000
8/15/2011	9:50:38 AM	H2 MFC set to  0.000000
8/15/2011	9:50:38 AM	BCl3 MFC set to  0.000000
8/15/2011	9:50:38 AM	PHl3 MFC set to  0.000000
8/15/2011	9:50:38 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:50:38 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:50:38 AM	Tube furnace set to 100
8/15/2011	9:51:08 AM	Helium valve closed
8/15/2011	9:51:08 AM	H2 valve closed
8/15/2011	9:51:09 AM	BCl3 valve closed
8/15/2011	9:51:09 AM	PH3 valve closed
8/15/2011	9:51:09 AM	SiCl4 pre valve closed
8/15/2011	9:51:09 AM	SiCl4 post valve closed
8/15/2011	9:51:09 AM	Bypass valve closed
8/15/2011	9:51:09 AM	Bubbler valve closed
8/15/2011	9:51:09 AM	Main Vac valve opened
8/15/2011	9:51:09 AM	Helium MFC set to  0.000000
8/15/2011	9:51:09 AM	H2 MFC set to  0.000000
8/15/2011	9:51:09 AM	BCl3 MFC set to  0.000000
8/15/2011	9:51:09 AM	PHl3 MFC set to  0.000000
8/15/2011	9:51:09 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:51:09 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:51:09 AM	Tube furnace set to 100
8/15/2011	9:51:39 AM	H2 valve closed
8/15/2011	9:51:39 AM	BCl3 valve closed
8/15/2011	9:51:39 AM	PH3 valve closed
8/15/2011	9:51:39 AM	SiCl4 pre valve closed
8/15/2011	9:51:39 AM	SiCl4 post valve closed
8/15/2011	9:51:39 AM	Bypass valve closed
8/15/2011	9:51:39 AM	Bubbler valve closed
8/15/2011	9:51:39 AM	Helium valve opened
8/15/2011	9:51:39 AM	Main Vac valve opened
8/15/2011	9:51:39 AM	Helium MFC set to  20.000000
8/15/2011	9:51:39 AM	H2 MFC set to  0.000000
8/15/2011	9:51:39 AM	BCl3 MFC set to  0.000000
8/15/2011	9:51:39 AM	PHl3 MFC set to  0.000000
8/15/2011	9:51:39 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:51:39 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:51:39 AM	Tube furnace set to 100
8/15/2011	9:52:09 AM	Helium valve closed
8/15/2011	9:52:09 AM	H2 valve closed
8/15/2011	9:52:09 AM	BCl3 valve closed
8/15/2011	9:52:09 AM	PH3 valve closed
8/15/2011	9:52:09 AM	SiCl4 pre valve closed
8/15/2011	9:52:09 AM	SiCl4 post valve closed
8/15/2011	9:52:09 AM	Bypass valve closed
8/15/2011	9:52:09 AM	Bubbler valve closed
8/15/2011	9:52:09 AM	Main Vac valve opened
8/15/2011	9:52:09 AM	Helium MFC set to  0.000000
8/15/2011	9:52:09 AM	H2 MFC set to  0.000000
8/15/2011	9:52:09 AM	BCl3 MFC set to  0.000000
8/15/2011	9:52:09 AM	PHl3 MFC set to  0.000000
8/15/2011	9:52:09 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:52:09 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:52:09 AM	Tube furnace set to 100
8/15/2011	9:52:39 AM	H2 valve closed
8/15/2011	9:52:39 AM	BCl3 valve closed
8/15/2011	9:52:39 AM	PH3 valve closed
8/15/2011	9:52:39 AM	SiCl4 pre valve closed
8/15/2011	9:52:39 AM	SiCl4 post valve closed
8/15/2011	9:52:39 AM	Bypass valve closed
8/15/2011	9:52:39 AM	Bubbler valve closed
8/15/2011	9:52:39 AM	Helium valve opened
8/15/2011	9:52:39 AM	Main Vac valve opened
8/15/2011	9:52:39 AM	Helium MFC set to  20.000000
8/15/2011	9:52:39 AM	H2 MFC set to  0.000000
8/15/2011	9:52:39 AM	BCl3 MFC set to  0.000000
8/15/2011	9:52:39 AM	PHl3 MFC set to  0.000000
8/15/2011	9:52:39 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:52:39 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:52:39 AM	Tube furnace set to 100
8/15/2011	9:53:09 AM	Helium valve closed
8/15/2011	9:53:09 AM	H2 valve closed
8/15/2011	9:53:09 AM	BCl3 valve closed
8/15/2011	9:53:09 AM	PH3 valve closed
8/15/2011	9:53:09 AM	SiCl4 pre valve closed
8/15/2011	9:53:09 AM	SiCl4 post valve closed
8/15/2011	9:53:09 AM	Bypass valve closed
8/15/2011	9:53:09 AM	Bubbler valve closed
8/15/2011	9:53:09 AM	Main Vac valve opened
8/15/2011	9:53:09 AM	Helium MFC set to  0.000000
8/15/2011	9:53:09 AM	H2 MFC set to  0.000000
8/15/2011	9:53:09 AM	BCl3 MFC set to  0.000000
8/15/2011	9:53:09 AM	PHl3 MFC set to  0.000000
8/15/2011	9:53:09 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:53:09 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:53:10 AM	Tube furnace set to 100
8/15/2011	9:53:40 AM	H2 valve closed
8/15/2011	9:53:40 AM	BCl3 valve closed
8/15/2011	9:53:40 AM	PH3 valve closed
8/15/2011	9:53:40 AM	SiCl4 pre valve closed
8/15/2011	9:53:40 AM	SiCl4 post valve closed
8/15/2011	9:53:40 AM	Bypass valve closed
8/15/2011	9:53:40 AM	Bubbler valve closed
8/15/2011	9:53:40 AM	Helium valve opened
8/15/2011	9:53:40 AM	Main Vac valve opened
8/15/2011	9:53:40 AM	Helium MFC set to  20.000000
8/15/2011	9:53:40 AM	H2 MFC set to  0.000000
8/15/2011	9:53:40 AM	BCl3 MFC set to  0.000000
8/15/2011	9:53:40 AM	PHl3 MFC set to  0.000000
8/15/2011	9:53:40 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:53:40 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:53:40 AM	Tube furnace set to 100
8/15/2011	9:54:10 AM	Helium valve closed
8/15/2011	9:54:10 AM	H2 valve closed
8/15/2011	9:54:10 AM	BCl3 valve closed
8/15/2011	9:54:10 AM	PH3 valve closed
8/15/2011	9:54:10 AM	SiCl4 pre valve closed
8/15/2011	9:54:10 AM	SiCl4 post valve closed
8/15/2011	9:54:10 AM	Bypass valve closed
8/15/2011	9:54:10 AM	Bubbler valve closed
8/15/2011	9:54:10 AM	Main Vac valve opened
8/15/2011	9:54:10 AM	Helium MFC set to  0.000000
8/15/2011	9:54:10 AM	H2 MFC set to  0.000000
8/15/2011	9:54:10 AM	BCl3 MFC set to  0.000000
8/15/2011	9:54:10 AM	PHl3 MFC set to  0.000000
8/15/2011	9:54:10 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:54:10 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:54:10 AM	Tube furnace set to 100
8/15/2011	9:54:40 AM	H2 valve closed
8/15/2011	9:54:40 AM	BCl3 valve closed
8/15/2011	9:54:40 AM	PH3 valve closed
8/15/2011	9:54:40 AM	SiCl4 pre valve closed
8/15/2011	9:54:40 AM	SiCl4 post valve closed
8/15/2011	9:54:40 AM	Bypass valve closed
8/15/2011	9:54:40 AM	Bubbler valve closed
8/15/2011	9:54:40 AM	Helium valve opened
8/15/2011	9:54:40 AM	Main Vac valve opened
8/15/2011	9:54:40 AM	Helium MFC set to  20.000000
8/15/2011	9:54:40 AM	H2 MFC set to  0.000000
8/15/2011	9:54:40 AM	BCl3 MFC set to  0.000000
8/15/2011	9:54:40 AM	PHl3 MFC set to  0.000000
8/15/2011	9:54:40 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:54:40 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:54:40 AM	Tube furnace set to 100
8/15/2011	9:55:10 AM	Helium valve closed
8/15/2011	9:55:10 AM	H2 valve closed
8/15/2011	9:55:10 AM	BCl3 valve closed
8/15/2011	9:55:10 AM	PH3 valve closed
8/15/2011	9:55:10 AM	SiCl4 pre valve closed
8/15/2011	9:55:10 AM	SiCl4 post valve closed
8/15/2011	9:55:10 AM	Bypass valve closed
8/15/2011	9:55:10 AM	Bubbler valve closed
8/15/2011	9:55:10 AM	Main Vac valve opened
8/15/2011	9:55:10 AM	Helium MFC set to  0.000000
8/15/2011	9:55:10 AM	H2 MFC set to  0.000000
8/15/2011	9:55:10 AM	BCl3 MFC set to  0.000000
8/15/2011	9:55:10 AM	PHl3 MFC set to  0.000000
8/15/2011	9:55:10 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:55:10 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:55:10 AM	Tube furnace set to 100
8/15/2011	9:55:40 AM	H2 valve closed
8/15/2011	9:55:40 AM	BCl3 valve closed
8/15/2011	9:55:40 AM	PH3 valve closed
8/15/2011	9:55:40 AM	SiCl4 pre valve closed
8/15/2011	9:55:40 AM	SiCl4 post valve closed
8/15/2011	9:55:40 AM	Bypass valve closed
8/15/2011	9:55:40 AM	Bubbler valve closed
8/15/2011	9:55:40 AM	Helium valve opened
8/15/2011	9:55:40 AM	Main Vac valve opened
8/15/2011	9:55:40 AM	Helium MFC set to  20.000000
8/15/2011	9:55:40 AM	H2 MFC set to  0.000000
8/15/2011	9:55:40 AM	BCl3 MFC set to  0.000000
8/15/2011	9:55:40 AM	PHl3 MFC set to  0.000000
8/15/2011	9:55:40 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:55:40 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:55:41 AM	Tube furnace set to 100
8/15/2011	9:56:11 AM	Helium valve closed
8/15/2011	9:56:11 AM	H2 valve closed
8/15/2011	9:56:11 AM	BCl3 valve closed
8/15/2011	9:56:11 AM	PH3 valve closed
8/15/2011	9:56:11 AM	SiCl4 pre valve closed
8/15/2011	9:56:11 AM	SiCl4 post valve closed
8/15/2011	9:56:11 AM	Bypass valve closed
8/15/2011	9:56:11 AM	Bubbler valve closed
8/15/2011	9:56:11 AM	Main Vac valve opened
8/15/2011	9:56:11 AM	Helium MFC set to  0.000000
8/15/2011	9:56:11 AM	H2 MFC set to  0.000000
8/15/2011	9:56:11 AM	BCl3 MFC set to  0.000000
8/15/2011	9:56:11 AM	PHl3 MFC set to  0.000000
8/15/2011	9:56:11 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:56:11 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:56:11 AM	Tube furnace set to 100
8/15/2011	9:56:12 AM	Run finished at 9:56 AM
8/15/2011	9:59:16 AM	Recipe started at 9:59 AM
8/15/2011	9:59:16 AM	Helium valve closed
8/15/2011	9:59:16 AM	H2 valve closed
8/15/2011	9:59:16 AM	BCl3 valve closed
8/15/2011	9:59:16 AM	PH3 valve closed
8/15/2011	9:59:16 AM	SiCl4 pre valve closed
8/15/2011	9:59:16 AM	SiCl4 post valve closed
8/15/2011	9:59:16 AM	Main Vac valve closed
8/15/2011	9:59:16 AM	Bypass valve closed
8/15/2011	9:59:16 AM	Bubbler valve closed
8/15/2011	9:59:16 AM	Helium MFC set to  0.000000
8/15/2011	9:59:16 AM	H2 MFC set to  0.000000
8/15/2011	9:59:16 AM	BCl3 MFC set to  0.000000
8/15/2011	9:59:16 AM	PHl3 MFC set to  0.000000
8/15/2011	9:59:16 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:59:16 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:59:16 AM	Tube furnace set to 0
8/15/2011	9:59:19 AM	Helium valve closed
8/15/2011	9:59:19 AM	BCl3 valve closed
8/15/2011	9:59:19 AM	PH3 valve closed
8/15/2011	9:59:19 AM	SiCl4 pre valve closed
8/15/2011	9:59:19 AM	SiCl4 post valve closed
8/15/2011	9:59:19 AM	Main Vac valve closed
8/15/2011	9:59:19 AM	Bypass valve closed
8/15/2011	9:59:19 AM	Bubbler valve closed
8/15/2011	9:59:19 AM	H2 valve opened
8/15/2011	9:59:19 AM	Helium MFC set to  0.000000
8/15/2011	9:59:19 AM	H2 MFC set to  500.000000
8/15/2011	9:59:19 AM	BCl3 MFC set to  0.000000
8/15/2011	9:59:19 AM	PHl3 MFC set to  0.000000
8/15/2011	9:59:19 AM	SiCl4 MFC set to  0.000000
8/15/2011	9:59:19 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	9:59:19 AM	Tube furnace set to 0
8/15/2011	10:00:23 AM	Helium valve closed
8/15/2011	10:00:23 AM	BCl3 valve closed
8/15/2011	10:00:23 AM	PH3 valve closed
8/15/2011	10:00:23 AM	SiCl4 pre valve closed
8/15/2011	10:00:23 AM	SiCl4 post valve closed
8/15/2011	10:00:23 AM	Main Vac valve closed
8/15/2011	10:00:23 AM	Bypass valve closed
8/15/2011	10:00:23 AM	H2 valve opened
8/15/2011	10:00:23 AM	Bubbler valve opened
8/15/2011	10:00:23 AM	Helium MFC set to  0.000000
8/15/2011	10:00:23 AM	H2 MFC set to  500.000000
8/15/2011	10:00:23 AM	BCl3 MFC set to  0.000000
8/15/2011	10:00:23 AM	PHl3 MFC set to  0.000000
8/15/2011	10:00:23 AM	SiCl4 MFC set to  0.000000
8/15/2011	10:00:23 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	10:00:23 AM	Tube furnace set to 0
8/15/2011	10:00:24 AM	Helium valve closed
8/15/2011	10:00:24 AM	BCl3 valve closed
8/15/2011	10:00:24 AM	PH3 valve closed
8/15/2011	10:00:24 AM	SiCl4 pre valve closed
8/15/2011	10:00:24 AM	SiCl4 post valve closed
8/15/2011	10:00:24 AM	Main Vac valve closed
8/15/2011	10:00:24 AM	Bypass valve closed
8/15/2011	10:00:24 AM	H2 valve opened
8/15/2011	10:00:24 AM	Bubbler valve opened
8/15/2011	10:00:24 AM	Helium MFC set to  0.000000
8/15/2011	10:00:24 AM	H2 MFC set to  500.000000
8/15/2011	10:00:24 AM	BCl3 MFC set to  0.000000
8/15/2011	10:00:24 AM	PHl3 MFC set to  0.000000
8/15/2011	10:00:24 AM	SiCl4 MFC set to  0.000000
8/15/2011	10:00:24 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	10:00:24 AM	Tube furnace set to 1000
8/15/2011	10:20:24 AM	Helium valve closed
8/15/2011	10:20:24 AM	PH3 valve closed
8/15/2011	10:20:24 AM	Main Vac valve closed
8/15/2011	10:20:24 AM	Bypass valve closed
8/15/2011	10:20:24 AM	H2 valve opened
8/15/2011	10:20:24 AM	BCl3 valve opened
8/15/2011	10:20:24 AM	SiCl4 pre valve opened
8/15/2011	10:20:24 AM	SiCl4 post valve opened
8/15/2011	10:20:24 AM	Bubbler valve opened
8/15/2011	10:20:24 AM	Helium MFC set to  0.000000
8/15/2011	10:20:24 AM	H2 MFC set to  500.000000
8/15/2011	10:20:24 AM	BCl3 MFC set to  2.300000
8/15/2011	10:20:24 AM	PHl3 MFC set to  0.000000
8/15/2011	10:20:24 AM	SiCl4 MFC set to  50.000000
8/15/2011	10:20:24 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	10:20:24 AM	Tube furnace set to 1000
8/15/2011	10:40:24 AM	Helium valve closed
8/15/2011	10:40:24 AM	BCl3 valve closed
8/15/2011	10:40:24 AM	PH3 valve closed
8/15/2011	10:40:24 AM	SiCl4 pre valve closed
8/15/2011	10:40:24 AM	SiCl4 post valve closed
8/15/2011	10:40:24 AM	Main Vac valve closed
8/15/2011	10:40:24 AM	Bypass valve closed
8/15/2011	10:40:24 AM	H2 valve opened
8/15/2011	10:40:24 AM	Bubbler valve opened
8/15/2011	10:40:24 AM	Helium MFC set to  0.000000
8/15/2011	10:40:24 AM	H2 MFC set to  500.000000
8/15/2011	10:40:24 AM	BCl3 MFC set to  0.000000
8/15/2011	10:40:24 AM	PHl3 MFC set to  0.000000
8/15/2011	10:40:24 AM	SiCl4 MFC set to  0.000000
8/15/2011	10:40:24 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	10:40:24 AM	Tube furnace set to 750
8/15/2011	10:45:24 AM	H2 valve closed
8/15/2011	10:45:24 AM	BCl3 valve closed
8/15/2011	10:45:24 AM	PH3 valve closed
8/15/2011	10:45:24 AM	SiCl4 pre valve closed
8/15/2011	10:45:24 AM	SiCl4 post valve closed
8/15/2011	10:45:24 AM	Main Vac valve closed
8/15/2011	10:45:24 AM	Bypass valve closed
8/15/2011	10:45:24 AM	Helium valve opened
8/15/2011	10:45:24 AM	Bubbler valve opened
8/15/2011	10:45:24 AM	Helium MFC set to  500.000000
8/15/2011	10:45:24 AM	H2 MFC set to  0.000000
8/15/2011	10:45:24 AM	BCl3 MFC set to  0.000000
8/15/2011	10:45:24 AM	PHl3 MFC set to  0.000000
8/15/2011	10:45:24 AM	SiCl4 MFC set to  0.000000
8/15/2011	10:45:24 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	10:45:24 AM	Tube furnace set to 0
8/15/2011	11:05:24 AM	Helium valve closed
8/15/2011	11:05:24 AM	H2 valve closed
8/15/2011	11:05:24 AM	BCl3 valve closed
8/15/2011	11:05:24 AM	PH3 valve closed
8/15/2011	11:05:24 AM	SiCl4 pre valve closed
8/15/2011	11:05:24 AM	SiCl4 post valve closed
8/15/2011	11:05:24 AM	Main Vac valve closed
8/15/2011	11:05:24 AM	Bypass valve closed
8/15/2011	11:05:24 AM	Bubbler valve closed
8/15/2011	11:05:24 AM	Helium MFC set to  0.000000
8/15/2011	11:05:24 AM	H2 MFC set to  0.000000
8/15/2011	11:05:24 AM	BCl3 MFC set to  0.000000
8/15/2011	11:05:24 AM	PHl3 MFC set to  0.000000
8/15/2011	11:05:24 AM	SiCl4 MFC set to  0.000000
8/15/2011	11:05:24 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:05:25 AM	Tube furnace set to 0
8/15/2011	11:05:26 AM	Run finished at 11:05 AM
8/15/2011	11:07:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/15/2011	11:07:24 AM	Recipe started at 11:07 AM
8/15/2011	11:07:24 AM	Helium valve closed
8/15/2011	11:07:24 AM	H2 valve closed
8/15/2011	11:07:24 AM	BCl3 valve closed
8/15/2011	11:07:24 AM	PH3 valve closed
8/15/2011	11:07:24 AM	SiCl4 pre valve closed
8/15/2011	11:07:24 AM	SiCl4 post valve closed
8/15/2011	11:07:24 AM	Main Vac valve closed
8/15/2011	11:07:24 AM	Bypass valve closed
8/15/2011	11:07:24 AM	Bubbler valve closed
8/15/2011	11:07:24 AM	Helium MFC set to  0.000000
8/15/2011	11:07:24 AM	H2 MFC set to  0.000000
8/15/2011	11:07:24 AM	BCl3 MFC set to  0.000000
8/15/2011	11:07:24 AM	PHl3 MFC set to  0.000000
8/15/2011	11:07:24 AM	SiCl4 MFC set to  0.000000
8/15/2011	11:07:24 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:07:24 AM	Tube furnace set to 0
8/15/2011	11:07:27 AM	H2 valve closed
8/15/2011	11:07:27 AM	BCl3 valve closed
8/15/2011	11:07:27 AM	PH3 valve closed
8/15/2011	11:07:27 AM	SiCl4 pre valve closed
8/15/2011	11:07:27 AM	SiCl4 post valve closed
8/15/2011	11:07:27 AM	Main Vac valve closed
8/15/2011	11:07:27 AM	Bypass valve closed
8/15/2011	11:07:27 AM	Bubbler valve closed
8/15/2011	11:07:27 AM	Helium valve opened
8/15/2011	11:07:27 AM	Helium MFC set to  500.000000
8/15/2011	11:07:27 AM	H2 MFC set to  0.000000
8/15/2011	11:07:27 AM	BCl3 MFC set to  0.000000
8/15/2011	11:07:27 AM	PHl3 MFC set to  0.000000
8/15/2011	11:07:27 AM	SiCl4 MFC set to  0.000000
8/15/2011	11:07:27 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:07:27 AM	Tube furnace set to 0
8/15/2011	11:07:28 AM	Helium valve closed
8/15/2011	11:07:28 AM	H2 valve closed
8/15/2011	11:07:28 AM	BCl3 valve closed
8/15/2011	11:07:28 AM	PH3 valve closed
8/15/2011	11:07:28 AM	SiCl4 pre valve closed
8/15/2011	11:07:28 AM	SiCl4 post valve closed
8/15/2011	11:07:28 AM	Main Vac valve closed
8/15/2011	11:07:28 AM	Bypass valve closed
8/15/2011	11:07:28 AM	Bubbler valve closed
8/15/2011	11:07:28 AM	Helium MFC set to  0.000000
8/15/2011	11:07:28 AM	H2 MFC set to  0.000000
8/15/2011	11:07:28 AM	BCl3 MFC set to  0.000000
8/15/2011	11:07:28 AM	PHl3 MFC set to  0.000000
8/15/2011	11:07:28 AM	SiCl4 MFC set to  0.000000
8/15/2011	11:07:28 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:07:28 AM	Tube furnace set to 0
8/15/2011	11:07:29 AM	Run finished at 11:07 AM
8/15/2011	11:07:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/15/2011	11:15:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/15/2011	11:15:57 AM	Recipe started at 11:15 AM
8/15/2011	11:15:57 AM	Helium valve closed
8/15/2011	11:15:57 AM	H2 valve closed
8/15/2011	11:15:57 AM	BCl3 valve closed
8/15/2011	11:15:57 AM	PH3 valve closed
8/15/2011	11:15:57 AM	SiCl4 pre valve closed
8/15/2011	11:15:57 AM	SiCl4 post valve closed
8/15/2011	11:15:57 AM	Main Vac valve closed
8/15/2011	11:15:57 AM	Bubbler valve closed
8/15/2011	11:15:57 AM	Bypass valve opened
8/15/2011	11:15:57 AM	Helium MFC set to  0.000000
8/15/2011	11:15:57 AM	H2 MFC set to  0.000000
8/15/2011	11:15:57 AM	BCl3 MFC set to  0.000000
8/15/2011	11:15:57 AM	PHl3 MFC set to  0.000000
8/15/2011	11:15:57 AM	SiCl4 MFC set to  0.000000
8/15/2011	11:15:57 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:15:58 AM	Tube furnace set to 0
8/15/2011	11:17:13 AM	Helium valve closed
8/15/2011	11:17:13 AM	H2 valve closed
8/15/2011	11:17:13 AM	BCl3 valve closed
8/15/2011	11:17:13 AM	PH3 valve closed
8/15/2011	11:17:13 AM	SiCl4 pre valve closed
8/15/2011	11:17:13 AM	SiCl4 post valve closed
8/15/2011	11:17:13 AM	Main Vac valve closed
8/15/2011	11:17:13 AM	Bubbler valve closed
8/15/2011	11:17:13 AM	Bypass valve opened
8/15/2011	11:17:13 AM	Helium MFC set to  0.000000
8/15/2011	11:17:13 AM	H2 MFC set to  0.000000
8/15/2011	11:17:13 AM	BCl3 MFC set to  0.000000
8/15/2011	11:17:13 AM	PHl3 MFC set to  0.000000
8/15/2011	11:17:13 AM	SiCl4 MFC set to  0.000000
8/15/2011	11:17:13 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:17:13 AM	Tube furnace set to 0
8/15/2011	11:18:13 AM	Helium valve closed
8/15/2011	11:18:13 AM	H2 valve closed
8/15/2011	11:18:13 AM	BCl3 valve closed
8/15/2011	11:18:13 AM	PH3 valve closed
8/15/2011	11:18:13 AM	SiCl4 pre valve closed
8/15/2011	11:18:13 AM	SiCl4 post valve closed
8/15/2011	11:18:13 AM	Bypass valve closed
8/15/2011	11:18:13 AM	Bubbler valve closed
8/15/2011	11:18:13 AM	Main Vac valve opened
8/15/2011	11:18:13 AM	Helium MFC set to  0.000000
8/15/2011	11:18:13 AM	H2 MFC set to  0.000000
8/15/2011	11:18:13 AM	BCl3 MFC set to  0.000000
8/15/2011	11:18:13 AM	PHl3 MFC set to  0.000000
8/15/2011	11:18:13 AM	SiCl4 MFC set to  0.000000
8/15/2011	11:18:13 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:18:13 AM	Tube furnace set to 0
8/15/2011	11:18:14 AM	Run finished at 11:18 AM
8/15/2011	11:18:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/15/2011	11:19:19 AM	Recipe started at 11:19 AM
8/15/2011	11:19:19 AM	Helium valve closed
8/15/2011	11:19:19 AM	H2 valve closed
8/15/2011	11:19:19 AM	BCl3 valve closed
8/15/2011	11:19:19 AM	PH3 valve closed
8/15/2011	11:19:19 AM	SiCl4 pre valve closed
8/15/2011	11:19:19 AM	SiCl4 post valve closed
8/15/2011	11:19:19 AM	Bypass valve closed
8/15/2011	11:19:19 AM	Bubbler valve closed
8/15/2011	11:19:19 AM	Main Vac valve opened
8/15/2011	11:19:19 AM	Helium MFC set to  0.000000
8/15/2011	11:19:19 AM	H2 MFC set to  0.000000
8/15/2011	11:19:19 AM	BCl3 MFC set to  0.000000
8/15/2011	11:19:19 AM	PHl3 MFC set to  0.000000
8/15/2011	11:19:19 AM	SiCl4 MFC set to  0.000000
8/15/2011	11:19:19 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:19:19 AM	Tube furnace set to 100
8/15/2011	11:19:49 AM	H2 valve closed
8/15/2011	11:19:49 AM	BCl3 valve closed
8/15/2011	11:19:49 AM	PH3 valve closed
8/15/2011	11:19:49 AM	SiCl4 pre valve closed
8/15/2011	11:19:49 AM	SiCl4 post valve closed
8/15/2011	11:19:49 AM	Bypass valve closed
8/15/2011	11:19:49 AM	Bubbler valve closed
8/15/2011	11:19:49 AM	Helium valve opened
8/15/2011	11:19:49 AM	Main Vac valve opened
8/15/2011	11:19:49 AM	Helium MFC set to  20.000000
8/15/2011	11:19:49 AM	H2 MFC set to  0.000000
8/15/2011	11:19:49 AM	BCl3 MFC set to  0.000000
8/15/2011	11:19:49 AM	PHl3 MFC set to  0.000000
8/15/2011	11:19:49 AM	SiCl4 MFC set to  0.000000
8/15/2011	11:19:49 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:19:49 AM	Tube furnace set to 100
8/15/2011	11:20:19 AM	Helium valve closed
8/15/2011	11:20:19 AM	H2 valve closed
8/15/2011	11:20:19 AM	BCl3 valve closed
8/15/2011	11:20:19 AM	PH3 valve closed
8/15/2011	11:20:19 AM	SiCl4 pre valve closed
8/15/2011	11:20:19 AM	SiCl4 post valve closed
8/15/2011	11:20:19 AM	Bypass valve closed
8/15/2011	11:20:19 AM	Bubbler valve closed
8/15/2011	11:20:19 AM	Main Vac valve opened
8/15/2011	11:20:19 AM	Helium MFC set to  0.000000
8/15/2011	11:20:19 AM	H2 MFC set to  0.000000
8/15/2011	11:20:19 AM	BCl3 MFC set to  0.000000
8/15/2011	11:20:19 AM	PHl3 MFC set to  0.000000
8/15/2011	11:20:19 AM	SiCl4 MFC set to  0.000000
8/15/2011	11:20:19 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:20:20 AM	Tube furnace set to 100
8/15/2011	11:20:50 AM	H2 valve closed
8/15/2011	11:20:50 AM	BCl3 valve closed
8/15/2011	11:20:50 AM	PH3 valve closed
8/15/2011	11:20:50 AM	SiCl4 pre valve closed
8/15/2011	11:20:50 AM	SiCl4 post valve closed
8/15/2011	11:20:50 AM	Bypass valve closed
8/15/2011	11:20:50 AM	Bubbler valve closed
8/15/2011	11:20:50 AM	Helium valve opened
8/15/2011	11:20:50 AM	Main Vac valve opened
8/15/2011	11:20:50 AM	Helium MFC set to  20.000000
8/15/2011	11:20:50 AM	H2 MFC set to  0.000000
8/15/2011	11:20:50 AM	BCl3 MFC set to  0.000000
8/15/2011	11:20:50 AM	PHl3 MFC set to  0.000000
8/15/2011	11:20:50 AM	SiCl4 MFC set to  0.000000
8/15/2011	11:20:50 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:20:50 AM	Tube furnace set to 100
8/15/2011	11:21:20 AM	Helium valve closed
8/15/2011	11:21:20 AM	H2 valve closed
8/15/2011	11:21:20 AM	BCl3 valve closed
8/15/2011	11:21:20 AM	PH3 valve closed
8/15/2011	11:21:20 AM	SiCl4 pre valve closed
8/15/2011	11:21:20 AM	SiCl4 post valve closed
8/15/2011	11:21:20 AM	Bypass valve closed
8/15/2011	11:21:20 AM	Bubbler valve closed
8/15/2011	11:21:20 AM	Main Vac valve opened
8/15/2011	11:21:20 AM	Helium MFC set to  0.000000
8/15/2011	11:21:20 AM	H2 MFC set to  0.000000
8/15/2011	11:21:20 AM	BCl3 MFC set to  0.000000
8/15/2011	11:21:20 AM	PHl3 MFC set to  0.000000
8/15/2011	11:21:20 AM	SiCl4 MFC set to  0.000000
8/15/2011	11:21:20 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:21:20 AM	Tube furnace set to 100
8/15/2011	11:21:50 AM	H2 valve closed
8/15/2011	11:21:50 AM	BCl3 valve closed
8/15/2011	11:21:50 AM	PH3 valve closed
8/15/2011	11:21:50 AM	SiCl4 pre valve closed
8/15/2011	11:21:50 AM	SiCl4 post valve closed
8/15/2011	11:21:50 AM	Bypass valve closed
8/15/2011	11:21:50 AM	Bubbler valve closed
8/15/2011	11:21:50 AM	Helium valve opened
8/15/2011	11:21:50 AM	Main Vac valve opened
8/15/2011	11:21:50 AM	Helium MFC set to  20.000000
8/15/2011	11:21:50 AM	H2 MFC set to  0.000000
8/15/2011	11:21:50 AM	BCl3 MFC set to  0.000000
8/15/2011	11:21:50 AM	PHl3 MFC set to  0.000000
8/15/2011	11:21:50 AM	SiCl4 MFC set to  0.000000
8/15/2011	11:21:50 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:21:50 AM	Tube furnace set to 100
8/15/2011	11:22:20 AM	Helium valve closed
8/15/2011	11:22:20 AM	H2 valve closed
8/15/2011	11:22:20 AM	BCl3 valve closed
8/15/2011	11:22:20 AM	PH3 valve closed
8/15/2011	11:22:20 AM	SiCl4 pre valve closed
8/15/2011	11:22:20 AM	SiCl4 post valve closed
8/15/2011	11:22:20 AM	Bypass valve closed
8/15/2011	11:22:20 AM	Bubbler valve closed
8/15/2011	11:22:20 AM	Main Vac valve opened
8/15/2011	11:22:20 AM	Helium MFC set to  0.000000
8/15/2011	11:22:20 AM	H2 MFC set to  0.000000
8/15/2011	11:22:20 AM	BCl3 MFC set to  0.000000
8/15/2011	11:22:20 AM	PHl3 MFC set to  0.000000
8/15/2011	11:22:20 AM	SiCl4 MFC set to  0.000000
8/15/2011	11:22:20 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:22:20 AM	Tube furnace set to 100
8/15/2011	11:22:50 AM	H2 valve closed
8/15/2011	11:22:50 AM	BCl3 valve closed
8/15/2011	11:22:50 AM	PH3 valve closed
8/15/2011	11:22:50 AM	SiCl4 pre valve closed
8/15/2011	11:22:50 AM	SiCl4 post valve closed
8/15/2011	11:22:50 AM	Bypass valve closed
8/15/2011	11:22:50 AM	Bubbler valve closed
8/15/2011	11:22:50 AM	Helium valve opened
8/15/2011	11:22:50 AM	Main Vac valve opened
8/15/2011	11:22:50 AM	Helium MFC set to  20.000000
8/15/2011	11:22:50 AM	H2 MFC set to  0.000000
8/15/2011	11:22:50 AM	BCl3 MFC set to  0.000000
8/15/2011	11:22:50 AM	PHl3 MFC set to  0.000000
8/15/2011	11:22:50 AM	SiCl4 MFC set to  0.000000
8/15/2011	11:22:50 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:22:51 AM	Tube furnace set to 100
8/15/2011	11:23:21 AM	Helium valve closed
8/15/2011	11:23:21 AM	H2 valve closed
8/15/2011	11:23:21 AM	BCl3 valve closed
8/15/2011	11:23:21 AM	PH3 valve closed
8/15/2011	11:23:21 AM	SiCl4 pre valve closed
8/15/2011	11:23:21 AM	SiCl4 post valve closed
8/15/2011	11:23:21 AM	Bypass valve closed
8/15/2011	11:23:21 AM	Bubbler valve closed
8/15/2011	11:23:21 AM	Main Vac valve opened
8/15/2011	11:23:21 AM	Helium MFC set to  0.000000
8/15/2011	11:23:21 AM	H2 MFC set to  0.000000
8/15/2011	11:23:21 AM	BCl3 MFC set to  0.000000
8/15/2011	11:23:21 AM	PHl3 MFC set to  0.000000
8/15/2011	11:23:21 AM	SiCl4 MFC set to  0.000000
8/15/2011	11:23:21 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:23:21 AM	Tube furnace set to 100
8/15/2011	11:23:51 AM	H2 valve closed
8/15/2011	11:23:51 AM	BCl3 valve closed
8/15/2011	11:23:51 AM	PH3 valve closed
8/15/2011	11:23:51 AM	SiCl4 pre valve closed
8/15/2011	11:23:51 AM	SiCl4 post valve closed
8/15/2011	11:23:51 AM	Bypass valve closed
8/15/2011	11:23:51 AM	Bubbler valve closed
8/15/2011	11:23:51 AM	Helium valve opened
8/15/2011	11:23:51 AM	Main Vac valve opened
8/15/2011	11:23:51 AM	Helium MFC set to  20.000000
8/15/2011	11:23:51 AM	H2 MFC set to  0.000000
8/15/2011	11:23:51 AM	BCl3 MFC set to  0.000000
8/15/2011	11:23:51 AM	PHl3 MFC set to  0.000000
8/15/2011	11:23:51 AM	SiCl4 MFC set to  0.000000
8/15/2011	11:23:51 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:23:51 AM	Tube furnace set to 100
8/15/2011	11:24:21 AM	Helium valve closed
8/15/2011	11:24:21 AM	H2 valve closed
8/15/2011	11:24:21 AM	BCl3 valve closed
8/15/2011	11:24:21 AM	PH3 valve closed
8/15/2011	11:24:21 AM	SiCl4 pre valve closed
8/15/2011	11:24:21 AM	SiCl4 post valve closed
8/15/2011	11:24:21 AM	Bypass valve closed
8/15/2011	11:24:21 AM	Bubbler valve closed
8/15/2011	11:24:21 AM	Main Vac valve opened
8/15/2011	11:24:21 AM	Helium MFC set to  0.000000
8/15/2011	11:24:21 AM	H2 MFC set to  0.000000
8/15/2011	11:24:21 AM	BCl3 MFC set to  0.000000
8/15/2011	11:24:21 AM	PHl3 MFC set to  0.000000
8/15/2011	11:24:21 AM	SiCl4 MFC set to  0.000000
8/15/2011	11:24:21 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:24:21 AM	Tube furnace set to 100
8/15/2011	11:24:51 AM	H2 valve closed
8/15/2011	11:24:51 AM	BCl3 valve closed
8/15/2011	11:24:51 AM	PH3 valve closed
8/15/2011	11:24:51 AM	SiCl4 pre valve closed
8/15/2011	11:24:51 AM	SiCl4 post valve closed
8/15/2011	11:24:51 AM	Bypass valve closed
8/15/2011	11:24:51 AM	Bubbler valve closed
8/15/2011	11:24:51 AM	Helium valve opened
8/15/2011	11:24:51 AM	Main Vac valve opened
8/15/2011	11:24:51 AM	Helium MFC set to  20.000000
8/15/2011	11:24:51 AM	H2 MFC set to  0.000000
8/15/2011	11:24:51 AM	BCl3 MFC set to  0.000000
8/15/2011	11:24:51 AM	PHl3 MFC set to  0.000000
8/15/2011	11:24:51 AM	SiCl4 MFC set to  0.000000
8/15/2011	11:24:51 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:24:51 AM	Tube furnace set to 100
8/15/2011	11:25:21 AM	Helium valve closed
8/15/2011	11:25:21 AM	H2 valve closed
8/15/2011	11:25:21 AM	BCl3 valve closed
8/15/2011	11:25:21 AM	PH3 valve closed
8/15/2011	11:25:21 AM	SiCl4 pre valve closed
8/15/2011	11:25:21 AM	SiCl4 post valve closed
8/15/2011	11:25:21 AM	Bypass valve closed
8/15/2011	11:25:21 AM	Bubbler valve closed
8/15/2011	11:25:21 AM	Main Vac valve opened
8/15/2011	11:25:21 AM	Helium MFC set to  0.000000
8/15/2011	11:25:21 AM	H2 MFC set to  0.000000
8/15/2011	11:25:21 AM	BCl3 MFC set to  0.000000
8/15/2011	11:25:21 AM	PHl3 MFC set to  0.000000
8/15/2011	11:25:21 AM	SiCl4 MFC set to  0.000000
8/15/2011	11:25:21 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:25:22 AM	Tube furnace set to 100
8/15/2011	11:25:52 AM	H2 valve closed
8/15/2011	11:25:52 AM	BCl3 valve closed
8/15/2011	11:25:52 AM	PH3 valve closed
8/15/2011	11:25:52 AM	SiCl4 pre valve closed
8/15/2011	11:25:52 AM	SiCl4 post valve closed
8/15/2011	11:25:52 AM	Bypass valve closed
8/15/2011	11:25:52 AM	Bubbler valve closed
8/15/2011	11:25:52 AM	Helium valve opened
8/15/2011	11:25:52 AM	Main Vac valve opened
8/15/2011	11:25:52 AM	Helium MFC set to  20.000000
8/15/2011	11:25:52 AM	H2 MFC set to  0.000000
8/15/2011	11:25:52 AM	BCl3 MFC set to  0.000000
8/15/2011	11:25:52 AM	PHl3 MFC set to  0.000000
8/15/2011	11:25:52 AM	SiCl4 MFC set to  0.000000
8/15/2011	11:25:52 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:25:52 AM	Tube furnace set to 100
8/15/2011	11:26:22 AM	Helium valve closed
8/15/2011	11:26:22 AM	H2 valve closed
8/15/2011	11:26:22 AM	BCl3 valve closed
8/15/2011	11:26:22 AM	PH3 valve closed
8/15/2011	11:26:22 AM	SiCl4 pre valve closed
8/15/2011	11:26:22 AM	SiCl4 post valve closed
8/15/2011	11:26:22 AM	Bypass valve closed
8/15/2011	11:26:22 AM	Bubbler valve closed
8/15/2011	11:26:22 AM	Main Vac valve opened
8/15/2011	11:26:22 AM	Helium MFC set to  0.000000
8/15/2011	11:26:22 AM	H2 MFC set to  0.000000
8/15/2011	11:26:22 AM	BCl3 MFC set to  0.000000
8/15/2011	11:26:22 AM	PHl3 MFC set to  0.000000
8/15/2011	11:26:22 AM	SiCl4 MFC set to  0.000000
8/15/2011	11:26:22 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:26:22 AM	Tube furnace set to 100
8/15/2011	11:26:52 AM	H2 valve closed
8/15/2011	11:26:52 AM	BCl3 valve closed
8/15/2011	11:26:52 AM	PH3 valve closed
8/15/2011	11:26:52 AM	SiCl4 pre valve closed
8/15/2011	11:26:52 AM	SiCl4 post valve closed
8/15/2011	11:26:52 AM	Bypass valve closed
8/15/2011	11:26:52 AM	Bubbler valve closed
8/15/2011	11:26:52 AM	Helium valve opened
8/15/2011	11:26:52 AM	Main Vac valve opened
8/15/2011	11:26:52 AM	Helium MFC set to  20.000000
8/15/2011	11:26:52 AM	H2 MFC set to  0.000000
8/15/2011	11:26:52 AM	BCl3 MFC set to  0.000000
8/15/2011	11:26:52 AM	PHl3 MFC set to  0.000000
8/15/2011	11:26:52 AM	SiCl4 MFC set to  0.000000
8/15/2011	11:26:52 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:26:52 AM	Tube furnace set to 100
8/15/2011	11:27:22 AM	Helium valve closed
8/15/2011	11:27:22 AM	H2 valve closed
8/15/2011	11:27:22 AM	BCl3 valve closed
8/15/2011	11:27:22 AM	PH3 valve closed
8/15/2011	11:27:22 AM	SiCl4 pre valve closed
8/15/2011	11:27:22 AM	SiCl4 post valve closed
8/15/2011	11:27:22 AM	Bypass valve closed
8/15/2011	11:27:22 AM	Bubbler valve closed
8/15/2011	11:27:22 AM	Main Vac valve opened
8/15/2011	11:27:22 AM	Helium MFC set to  0.000000
8/15/2011	11:27:22 AM	H2 MFC set to  0.000000
8/15/2011	11:27:22 AM	BCl3 MFC set to  0.000000
8/15/2011	11:27:22 AM	PHl3 MFC set to  0.000000
8/15/2011	11:27:22 AM	SiCl4 MFC set to  0.000000
8/15/2011	11:27:22 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:27:23 AM	Tube furnace set to 100
8/15/2011	11:27:53 AM	H2 valve closed
8/15/2011	11:27:53 AM	BCl3 valve closed
8/15/2011	11:27:53 AM	PH3 valve closed
8/15/2011	11:27:53 AM	SiCl4 pre valve closed
8/15/2011	11:27:53 AM	SiCl4 post valve closed
8/15/2011	11:27:53 AM	Bypass valve closed
8/15/2011	11:27:53 AM	Bubbler valve closed
8/15/2011	11:27:53 AM	Helium valve opened
8/15/2011	11:27:53 AM	Main Vac valve opened
8/15/2011	11:27:53 AM	Helium MFC set to  20.000000
8/15/2011	11:27:53 AM	H2 MFC set to  0.000000
8/15/2011	11:27:53 AM	BCl3 MFC set to  0.000000
8/15/2011	11:27:53 AM	PHl3 MFC set to  0.000000
8/15/2011	11:27:53 AM	SiCl4 MFC set to  0.000000
8/15/2011	11:27:53 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:27:53 AM	Tube furnace set to 100
8/15/2011	11:28:23 AM	Helium valve closed
8/15/2011	11:28:23 AM	H2 valve closed
8/15/2011	11:28:23 AM	BCl3 valve closed
8/15/2011	11:28:23 AM	PH3 valve closed
8/15/2011	11:28:23 AM	SiCl4 pre valve closed
8/15/2011	11:28:23 AM	SiCl4 post valve closed
8/15/2011	11:28:23 AM	Bypass valve closed
8/15/2011	11:28:23 AM	Bubbler valve closed
8/15/2011	11:28:23 AM	Main Vac valve opened
8/15/2011	11:28:23 AM	Helium MFC set to  0.000000
8/15/2011	11:28:23 AM	H2 MFC set to  0.000000
8/15/2011	11:28:23 AM	BCl3 MFC set to  0.000000
8/15/2011	11:28:23 AM	PHl3 MFC set to  0.000000
8/15/2011	11:28:23 AM	SiCl4 MFC set to  0.000000
8/15/2011	11:28:23 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:28:23 AM	Tube furnace set to 100
8/15/2011	11:28:53 AM	H2 valve closed
8/15/2011	11:28:53 AM	BCl3 valve closed
8/15/2011	11:28:53 AM	PH3 valve closed
8/15/2011	11:28:53 AM	SiCl4 pre valve closed
8/15/2011	11:28:53 AM	SiCl4 post valve closed
8/15/2011	11:28:53 AM	Bypass valve closed
8/15/2011	11:28:53 AM	Bubbler valve closed
8/15/2011	11:28:53 AM	Helium valve opened
8/15/2011	11:28:53 AM	Main Vac valve opened
8/15/2011	11:28:53 AM	Helium MFC set to  20.000000
8/15/2011	11:28:53 AM	H2 MFC set to  0.000000
8/15/2011	11:28:53 AM	BCl3 MFC set to  0.000000
8/15/2011	11:28:53 AM	PHl3 MFC set to  0.000000
8/15/2011	11:28:53 AM	SiCl4 MFC set to  0.000000
8/15/2011	11:28:53 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:28:53 AM	Tube furnace set to 100
8/15/2011	11:29:23 AM	Helium valve closed
8/15/2011	11:29:23 AM	H2 valve closed
8/15/2011	11:29:23 AM	BCl3 valve closed
8/15/2011	11:29:23 AM	PH3 valve closed
8/15/2011	11:29:23 AM	SiCl4 pre valve closed
8/15/2011	11:29:23 AM	SiCl4 post valve closed
8/15/2011	11:29:23 AM	Bypass valve closed
8/15/2011	11:29:23 AM	Bubbler valve closed
8/15/2011	11:29:23 AM	Main Vac valve opened
8/15/2011	11:29:23 AM	Helium MFC set to  0.000000
8/15/2011	11:29:23 AM	H2 MFC set to  0.000000
8/15/2011	11:29:23 AM	BCl3 MFC set to  0.000000
8/15/2011	11:29:23 AM	PHl3 MFC set to  0.000000
8/15/2011	11:29:23 AM	SiCl4 MFC set to  0.000000
8/15/2011	11:29:23 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:29:23 AM	Tube furnace set to 100
8/15/2011	11:29:24 AM	Run finished at 11:29 AM
8/15/2011	11:31:43 AM	Main Vac valve closed
8/15/2011	11:31:54 AM	Main Vac valve opened
8/15/2011	11:33:28 AM	Recipe started at 11:33 AM
8/15/2011	11:33:28 AM	Helium valve closed
8/15/2011	11:33:28 AM	H2 valve closed
8/15/2011	11:33:28 AM	BCl3 valve closed
8/15/2011	11:33:28 AM	PH3 valve closed
8/15/2011	11:33:28 AM	SiCl4 pre valve closed
8/15/2011	11:33:28 AM	SiCl4 post valve closed
8/15/2011	11:33:28 AM	Main Vac valve closed
8/15/2011	11:33:28 AM	Bypass valve closed
8/15/2011	11:33:28 AM	Bubbler valve closed
8/15/2011	11:33:28 AM	Helium MFC set to  0.000000
8/15/2011	11:33:28 AM	H2 MFC set to  0.000000
8/15/2011	11:33:28 AM	BCl3 MFC set to  0.000000
8/15/2011	11:33:28 AM	PHl3 MFC set to  0.000000
8/15/2011	11:33:28 AM	SiCl4 MFC set to  0.000000
8/15/2011	11:33:28 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:33:28 AM	Tube furnace set to 0
8/15/2011	11:33:31 AM	Helium valve closed
8/15/2011	11:33:31 AM	BCl3 valve closed
8/15/2011	11:33:31 AM	PH3 valve closed
8/15/2011	11:33:31 AM	SiCl4 pre valve closed
8/15/2011	11:33:31 AM	SiCl4 post valve closed
8/15/2011	11:33:31 AM	Main Vac valve closed
8/15/2011	11:33:31 AM	Bypass valve closed
8/15/2011	11:33:31 AM	Bubbler valve closed
8/15/2011	11:33:31 AM	H2 valve opened
8/15/2011	11:33:31 AM	Helium MFC set to  0.000000
8/15/2011	11:33:31 AM	H2 MFC set to  500.000000
8/15/2011	11:33:31 AM	BCl3 MFC set to  0.000000
8/15/2011	11:33:31 AM	PHl3 MFC set to  0.000000
8/15/2011	11:33:31 AM	SiCl4 MFC set to  0.000000
8/15/2011	11:33:31 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:33:31 AM	Tube furnace set to 0
8/15/2011	11:34:34 AM	Helium valve closed
8/15/2011	11:34:34 AM	BCl3 valve closed
8/15/2011	11:34:34 AM	PH3 valve closed
8/15/2011	11:34:34 AM	SiCl4 pre valve closed
8/15/2011	11:34:34 AM	SiCl4 post valve closed
8/15/2011	11:34:34 AM	Main Vac valve closed
8/15/2011	11:34:34 AM	Bypass valve closed
8/15/2011	11:34:34 AM	H2 valve opened
8/15/2011	11:34:34 AM	Bubbler valve opened
8/15/2011	11:34:34 AM	Helium MFC set to  0.000000
8/15/2011	11:34:34 AM	H2 MFC set to  500.000000
8/15/2011	11:34:34 AM	BCl3 MFC set to  0.000000
8/15/2011	11:34:34 AM	PHl3 MFC set to  0.000000
8/15/2011	11:34:34 AM	SiCl4 MFC set to  0.000000
8/15/2011	11:34:34 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:34:35 AM	Tube furnace set to 0
8/15/2011	11:34:36 AM	Helium valve closed
8/15/2011	11:34:36 AM	BCl3 valve closed
8/15/2011	11:34:36 AM	PH3 valve closed
8/15/2011	11:34:36 AM	SiCl4 pre valve closed
8/15/2011	11:34:36 AM	SiCl4 post valve closed
8/15/2011	11:34:36 AM	Main Vac valve closed
8/15/2011	11:34:36 AM	Bypass valve closed
8/15/2011	11:34:36 AM	H2 valve opened
8/15/2011	11:34:36 AM	Bubbler valve opened
8/15/2011	11:34:36 AM	Helium MFC set to  0.000000
8/15/2011	11:34:36 AM	H2 MFC set to  500.000000
8/15/2011	11:34:36 AM	BCl3 MFC set to  0.000000
8/15/2011	11:34:36 AM	PHl3 MFC set to  0.000000
8/15/2011	11:34:36 AM	SiCl4 MFC set to  0.000000
8/15/2011	11:34:36 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:34:36 AM	Tube furnace set to 1000
8/15/2011	11:54:36 AM	Helium valve closed
8/15/2011	11:54:36 AM	PH3 valve closed
8/15/2011	11:54:36 AM	Main Vac valve closed
8/15/2011	11:54:36 AM	Bypass valve closed
8/15/2011	11:54:36 AM	H2 valve opened
8/15/2011	11:54:36 AM	BCl3 valve opened
8/15/2011	11:54:36 AM	SiCl4 pre valve opened
8/15/2011	11:54:36 AM	SiCl4 post valve opened
8/15/2011	11:54:36 AM	Bubbler valve opened
8/15/2011	11:54:36 AM	Helium MFC set to  0.000000
8/15/2011	11:54:36 AM	H2 MFC set to  500.000000
8/15/2011	11:54:36 AM	BCl3 MFC set to  2.300000
8/15/2011	11:54:36 AM	PHl3 MFC set to  0.000000
8/15/2011	11:54:36 AM	SiCl4 MFC set to  50.000000
8/15/2011	11:54:36 AM	Bypass solenoid MFC set to  0.000000
8/15/2011	11:54:36 AM	Tube furnace set to 1000
8/15/2011	12:14:36 PM	Helium valve closed
8/15/2011	12:14:36 PM	BCl3 valve closed
8/15/2011	12:14:36 PM	PH3 valve closed
8/15/2011	12:14:36 PM	SiCl4 pre valve closed
8/15/2011	12:14:36 PM	SiCl4 post valve closed
8/15/2011	12:14:36 PM	Main Vac valve closed
8/15/2011	12:14:36 PM	Bypass valve closed
8/15/2011	12:14:36 PM	H2 valve opened
8/15/2011	12:14:36 PM	Bubbler valve opened
8/15/2011	12:14:36 PM	Helium MFC set to  0.000000
8/15/2011	12:14:36 PM	H2 MFC set to  500.000000
8/15/2011	12:14:36 PM	BCl3 MFC set to  0.000000
8/15/2011	12:14:36 PM	PHl3 MFC set to  0.000000
8/15/2011	12:14:36 PM	SiCl4 MFC set to  0.000000
8/15/2011	12:14:36 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	12:14:36 PM	Tube furnace set to 750
8/15/2011	12:19:36 PM	H2 valve closed
8/15/2011	12:19:36 PM	BCl3 valve closed
8/15/2011	12:19:36 PM	PH3 valve closed
8/15/2011	12:19:36 PM	SiCl4 pre valve closed
8/15/2011	12:19:36 PM	SiCl4 post valve closed
8/15/2011	12:19:36 PM	Main Vac valve closed
8/15/2011	12:19:36 PM	Bypass valve closed
8/15/2011	12:19:36 PM	Helium valve opened
8/15/2011	12:19:36 PM	Bubbler valve opened
8/15/2011	12:19:36 PM	Helium MFC set to  500.000000
8/15/2011	12:19:36 PM	H2 MFC set to  0.000000
8/15/2011	12:19:36 PM	BCl3 MFC set to  0.000000
8/15/2011	12:19:36 PM	PHl3 MFC set to  0.000000
8/15/2011	12:19:36 PM	SiCl4 MFC set to  0.000000
8/15/2011	12:19:36 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	12:19:36 PM	Tube furnace set to 0
8/15/2011	12:39:36 PM	Helium valve closed
8/15/2011	12:39:36 PM	H2 valve closed
8/15/2011	12:39:36 PM	BCl3 valve closed
8/15/2011	12:39:36 PM	PH3 valve closed
8/15/2011	12:39:36 PM	SiCl4 pre valve closed
8/15/2011	12:39:36 PM	SiCl4 post valve closed
8/15/2011	12:39:36 PM	Main Vac valve closed
8/15/2011	12:39:36 PM	Bypass valve closed
8/15/2011	12:39:36 PM	Bubbler valve closed
8/15/2011	12:39:36 PM	Helium MFC set to  0.000000
8/15/2011	12:39:36 PM	H2 MFC set to  0.000000
8/15/2011	12:39:36 PM	BCl3 MFC set to  0.000000
8/15/2011	12:39:36 PM	PHl3 MFC set to  0.000000
8/15/2011	12:39:36 PM	SiCl4 MFC set to  0.000000
8/15/2011	12:39:36 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	12:39:36 PM	Tube furnace set to 0
8/15/2011	12:39:37 PM	Run finished at 12:39 PM
8/15/2011	12:39:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/15/2011	12:39:45 PM	Recipe started at 12:39 PM
8/15/2011	12:39:45 PM	Helium valve closed
8/15/2011	12:39:45 PM	H2 valve closed
8/15/2011	12:39:45 PM	BCl3 valve closed
8/15/2011	12:39:45 PM	PH3 valve closed
8/15/2011	12:39:45 PM	SiCl4 pre valve closed
8/15/2011	12:39:45 PM	SiCl4 post valve closed
8/15/2011	12:39:45 PM	Main Vac valve closed
8/15/2011	12:39:45 PM	Bypass valve closed
8/15/2011	12:39:45 PM	Bubbler valve closed
8/15/2011	12:39:45 PM	Helium MFC set to  0.000000
8/15/2011	12:39:45 PM	H2 MFC set to  0.000000
8/15/2011	12:39:45 PM	BCl3 MFC set to  0.000000
8/15/2011	12:39:45 PM	PHl3 MFC set to  0.000000
8/15/2011	12:39:45 PM	SiCl4 MFC set to  0.000000
8/15/2011	12:39:45 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	12:39:45 PM	Tube furnace set to 0
8/15/2011	12:39:48 PM	H2 valve closed
8/15/2011	12:39:48 PM	BCl3 valve closed
8/15/2011	12:39:48 PM	PH3 valve closed
8/15/2011	12:39:48 PM	SiCl4 pre valve closed
8/15/2011	12:39:48 PM	SiCl4 post valve closed
8/15/2011	12:39:48 PM	Main Vac valve closed
8/15/2011	12:39:48 PM	Bypass valve closed
8/15/2011	12:39:48 PM	Bubbler valve closed
8/15/2011	12:39:48 PM	Helium valve opened
8/15/2011	12:39:48 PM	Helium MFC set to  500.000000
8/15/2011	12:39:48 PM	H2 MFC set to  0.000000
8/15/2011	12:39:48 PM	BCl3 MFC set to  0.000000
8/15/2011	12:39:48 PM	PHl3 MFC set to  0.000000
8/15/2011	12:39:48 PM	SiCl4 MFC set to  0.000000
8/15/2011	12:39:48 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	12:39:48 PM	Tube furnace set to 0
8/15/2011	12:39:48 PM	Helium valve closed
8/15/2011	12:39:48 PM	H2 valve closed
8/15/2011	12:39:48 PM	BCl3 valve closed
8/15/2011	12:39:48 PM	PH3 valve closed
8/15/2011	12:39:48 PM	SiCl4 pre valve closed
8/15/2011	12:39:48 PM	SiCl4 post valve closed
8/15/2011	12:39:48 PM	Main Vac valve closed
8/15/2011	12:39:48 PM	Bypass valve closed
8/15/2011	12:39:48 PM	Bubbler valve closed
8/15/2011	12:39:48 PM	Helium MFC set to  0.000000
8/15/2011	12:39:48 PM	H2 MFC set to  0.000000
8/15/2011	12:39:48 PM	BCl3 MFC set to  0.000000
8/15/2011	12:39:48 PM	PHl3 MFC set to  0.000000
8/15/2011	12:39:48 PM	SiCl4 MFC set to  0.000000
8/15/2011	12:39:48 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	12:39:48 PM	Tube furnace set to 0
8/15/2011	12:39:49 PM	Run finished at 12:39 PM
8/15/2011	12:39:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/15/2011	12:49:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/15/2011	12:49:52 PM	Recipe started at 12:49 PM
8/15/2011	12:49:52 PM	Helium valve closed
8/15/2011	12:49:52 PM	H2 valve closed
8/15/2011	12:49:52 PM	BCl3 valve closed
8/15/2011	12:49:52 PM	PH3 valve closed
8/15/2011	12:49:52 PM	SiCl4 pre valve closed
8/15/2011	12:49:52 PM	SiCl4 post valve closed
8/15/2011	12:49:52 PM	Main Vac valve closed
8/15/2011	12:49:52 PM	Bubbler valve closed
8/15/2011	12:49:52 PM	Bypass valve opened
8/15/2011	12:49:52 PM	Helium MFC set to  0.000000
8/15/2011	12:49:52 PM	H2 MFC set to  0.000000
8/15/2011	12:49:52 PM	BCl3 MFC set to  0.000000
8/15/2011	12:49:52 PM	PHl3 MFC set to  0.000000
8/15/2011	12:49:52 PM	SiCl4 MFC set to  0.000000
8/15/2011	12:49:52 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	12:49:52 PM	Tube furnace set to 0
8/15/2011	12:51:12 PM	Helium valve closed
8/15/2011	12:51:12 PM	H2 valve closed
8/15/2011	12:51:12 PM	BCl3 valve closed
8/15/2011	12:51:12 PM	PH3 valve closed
8/15/2011	12:51:12 PM	SiCl4 pre valve closed
8/15/2011	12:51:12 PM	SiCl4 post valve closed
8/15/2011	12:51:12 PM	Main Vac valve closed
8/15/2011	12:51:12 PM	Bubbler valve closed
8/15/2011	12:51:12 PM	Bypass valve opened
8/15/2011	12:51:12 PM	Helium MFC set to  0.000000
8/15/2011	12:51:12 PM	H2 MFC set to  0.000000
8/15/2011	12:51:12 PM	BCl3 MFC set to  0.000000
8/15/2011	12:51:12 PM	PHl3 MFC set to  0.000000
8/15/2011	12:51:12 PM	SiCl4 MFC set to  0.000000
8/15/2011	12:51:12 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	12:51:12 PM	Tube furnace set to 0
8/15/2011	12:52:12 PM	Helium valve closed
8/15/2011	12:52:12 PM	H2 valve closed
8/15/2011	12:52:12 PM	BCl3 valve closed
8/15/2011	12:52:12 PM	PH3 valve closed
8/15/2011	12:52:12 PM	SiCl4 pre valve closed
8/15/2011	12:52:12 PM	SiCl4 post valve closed
8/15/2011	12:52:12 PM	Bypass valve closed
8/15/2011	12:52:12 PM	Bubbler valve closed
8/15/2011	12:52:12 PM	Main Vac valve opened
8/15/2011	12:52:12 PM	Helium MFC set to  0.000000
8/15/2011	12:52:12 PM	H2 MFC set to  0.000000
8/15/2011	12:52:12 PM	BCl3 MFC set to  0.000000
8/15/2011	12:52:12 PM	PHl3 MFC set to  0.000000
8/15/2011	12:52:12 PM	SiCl4 MFC set to  0.000000
8/15/2011	12:52:12 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	12:52:12 PM	Tube furnace set to 0
8/15/2011	12:52:13 PM	Run finished at 12:52 PM
8/15/2011	12:52:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/15/2011	12:52:56 PM	Recipe started at 12:52 PM
8/15/2011	12:52:56 PM	Helium valve closed
8/15/2011	12:52:56 PM	H2 valve closed
8/15/2011	12:52:56 PM	BCl3 valve closed
8/15/2011	12:52:56 PM	PH3 valve closed
8/15/2011	12:52:56 PM	SiCl4 pre valve closed
8/15/2011	12:52:56 PM	SiCl4 post valve closed
8/15/2011	12:52:56 PM	Bypass valve closed
8/15/2011	12:52:56 PM	Bubbler valve closed
8/15/2011	12:52:56 PM	Main Vac valve opened
8/15/2011	12:52:56 PM	Helium MFC set to  0.000000
8/15/2011	12:52:56 PM	H2 MFC set to  0.000000
8/15/2011	12:52:56 PM	BCl3 MFC set to  0.000000
8/15/2011	12:52:56 PM	PHl3 MFC set to  0.000000
8/15/2011	12:52:56 PM	SiCl4 MFC set to  0.000000
8/15/2011	12:52:56 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	12:52:56 PM	Tube furnace set to 100
8/15/2011	12:53:26 PM	H2 valve closed
8/15/2011	12:53:26 PM	BCl3 valve closed
8/15/2011	12:53:26 PM	PH3 valve closed
8/15/2011	12:53:26 PM	SiCl4 pre valve closed
8/15/2011	12:53:26 PM	SiCl4 post valve closed
8/15/2011	12:53:26 PM	Bypass valve closed
8/15/2011	12:53:26 PM	Bubbler valve closed
8/15/2011	12:53:26 PM	Helium valve opened
8/15/2011	12:53:26 PM	Main Vac valve opened
8/15/2011	12:53:26 PM	Helium MFC set to  20.000000
8/15/2011	12:53:26 PM	H2 MFC set to  0.000000
8/15/2011	12:53:26 PM	BCl3 MFC set to  0.000000
8/15/2011	12:53:26 PM	PHl3 MFC set to  0.000000
8/15/2011	12:53:26 PM	SiCl4 MFC set to  0.000000
8/15/2011	12:53:26 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	12:53:26 PM	Tube furnace set to 100
8/15/2011	12:53:56 PM	Helium valve closed
8/15/2011	12:53:56 PM	H2 valve closed
8/15/2011	12:53:56 PM	BCl3 valve closed
8/15/2011	12:53:56 PM	PH3 valve closed
8/15/2011	12:53:56 PM	SiCl4 pre valve closed
8/15/2011	12:53:56 PM	SiCl4 post valve closed
8/15/2011	12:53:56 PM	Bypass valve closed
8/15/2011	12:53:56 PM	Bubbler valve closed
8/15/2011	12:53:56 PM	Main Vac valve opened
8/15/2011	12:53:56 PM	Helium MFC set to  0.000000
8/15/2011	12:53:56 PM	H2 MFC set to  0.000000
8/15/2011	12:53:56 PM	BCl3 MFC set to  0.000000
8/15/2011	12:53:56 PM	PHl3 MFC set to  0.000000
8/15/2011	12:53:56 PM	SiCl4 MFC set to  0.000000
8/15/2011	12:53:56 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	12:53:57 PM	Tube furnace set to 100
8/15/2011	12:54:27 PM	H2 valve closed
8/15/2011	12:54:27 PM	BCl3 valve closed
8/15/2011	12:54:27 PM	PH3 valve closed
8/15/2011	12:54:27 PM	SiCl4 pre valve closed
8/15/2011	12:54:27 PM	SiCl4 post valve closed
8/15/2011	12:54:27 PM	Bypass valve closed
8/15/2011	12:54:27 PM	Bubbler valve closed
8/15/2011	12:54:27 PM	Helium valve opened
8/15/2011	12:54:27 PM	Main Vac valve opened
8/15/2011	12:54:27 PM	Helium MFC set to  20.000000
8/15/2011	12:54:27 PM	H2 MFC set to  0.000000
8/15/2011	12:54:27 PM	BCl3 MFC set to  0.000000
8/15/2011	12:54:27 PM	PHl3 MFC set to  0.000000
8/15/2011	12:54:27 PM	SiCl4 MFC set to  0.000000
8/15/2011	12:54:27 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	12:54:27 PM	Tube furnace set to 100
8/15/2011	12:54:57 PM	Helium valve closed
8/15/2011	12:54:57 PM	H2 valve closed
8/15/2011	12:54:57 PM	BCl3 valve closed
8/15/2011	12:54:57 PM	PH3 valve closed
8/15/2011	12:54:57 PM	SiCl4 pre valve closed
8/15/2011	12:54:57 PM	SiCl4 post valve closed
8/15/2011	12:54:57 PM	Bypass valve closed
8/15/2011	12:54:57 PM	Bubbler valve closed
8/15/2011	12:54:57 PM	Main Vac valve opened
8/15/2011	12:54:57 PM	Helium MFC set to  0.000000
8/15/2011	12:54:57 PM	H2 MFC set to  0.000000
8/15/2011	12:54:57 PM	BCl3 MFC set to  0.000000
8/15/2011	12:54:57 PM	PHl3 MFC set to  0.000000
8/15/2011	12:54:57 PM	SiCl4 MFC set to  0.000000
8/15/2011	12:54:57 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	12:54:57 PM	Tube furnace set to 100
8/15/2011	12:55:27 PM	H2 valve closed
8/15/2011	12:55:27 PM	BCl3 valve closed
8/15/2011	12:55:27 PM	PH3 valve closed
8/15/2011	12:55:27 PM	SiCl4 pre valve closed
8/15/2011	12:55:27 PM	SiCl4 post valve closed
8/15/2011	12:55:27 PM	Bypass valve closed
8/15/2011	12:55:27 PM	Bubbler valve closed
8/15/2011	12:55:27 PM	Helium valve opened
8/15/2011	12:55:27 PM	Main Vac valve opened
8/15/2011	12:55:27 PM	Helium MFC set to  20.000000
8/15/2011	12:55:27 PM	H2 MFC set to  0.000000
8/15/2011	12:55:27 PM	BCl3 MFC set to  0.000000
8/15/2011	12:55:27 PM	PHl3 MFC set to  0.000000
8/15/2011	12:55:27 PM	SiCl4 MFC set to  0.000000
8/15/2011	12:55:27 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	12:55:27 PM	Tube furnace set to 100
8/15/2011	12:55:57 PM	Helium valve closed
8/15/2011	12:55:57 PM	H2 valve closed
8/15/2011	12:55:57 PM	BCl3 valve closed
8/15/2011	12:55:57 PM	PH3 valve closed
8/15/2011	12:55:57 PM	SiCl4 pre valve closed
8/15/2011	12:55:57 PM	SiCl4 post valve closed
8/15/2011	12:55:57 PM	Bypass valve closed
8/15/2011	12:55:57 PM	Bubbler valve closed
8/15/2011	12:55:57 PM	Main Vac valve opened
8/15/2011	12:55:57 PM	Helium MFC set to  0.000000
8/15/2011	12:55:57 PM	H2 MFC set to  0.000000
8/15/2011	12:55:57 PM	BCl3 MFC set to  0.000000
8/15/2011	12:55:57 PM	PHl3 MFC set to  0.000000
8/15/2011	12:55:57 PM	SiCl4 MFC set to  0.000000
8/15/2011	12:55:57 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	12:55:57 PM	Tube furnace set to 100
8/15/2011	12:56:27 PM	H2 valve closed
8/15/2011	12:56:27 PM	BCl3 valve closed
8/15/2011	12:56:27 PM	PH3 valve closed
8/15/2011	12:56:27 PM	SiCl4 pre valve closed
8/15/2011	12:56:27 PM	SiCl4 post valve closed
8/15/2011	12:56:27 PM	Bypass valve closed
8/15/2011	12:56:27 PM	Bubbler valve closed
8/15/2011	12:56:27 PM	Helium valve opened
8/15/2011	12:56:27 PM	Main Vac valve opened
8/15/2011	12:56:27 PM	Helium MFC set to  20.000000
8/15/2011	12:56:27 PM	H2 MFC set to  0.000000
8/15/2011	12:56:27 PM	BCl3 MFC set to  0.000000
8/15/2011	12:56:27 PM	PHl3 MFC set to  0.000000
8/15/2011	12:56:27 PM	SiCl4 MFC set to  0.000000
8/15/2011	12:56:27 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	12:56:28 PM	Tube furnace set to 100
8/15/2011	12:56:58 PM	Helium valve closed
8/15/2011	12:56:58 PM	H2 valve closed
8/15/2011	12:56:58 PM	BCl3 valve closed
8/15/2011	12:56:58 PM	PH3 valve closed
8/15/2011	12:56:58 PM	SiCl4 pre valve closed
8/15/2011	12:56:58 PM	SiCl4 post valve closed
8/15/2011	12:56:58 PM	Bypass valve closed
8/15/2011	12:56:58 PM	Bubbler valve closed
8/15/2011	12:56:58 PM	Main Vac valve opened
8/15/2011	12:56:58 PM	Helium MFC set to  0.000000
8/15/2011	12:56:58 PM	H2 MFC set to  0.000000
8/15/2011	12:56:58 PM	BCl3 MFC set to  0.000000
8/15/2011	12:56:58 PM	PHl3 MFC set to  0.000000
8/15/2011	12:56:58 PM	SiCl4 MFC set to  0.000000
8/15/2011	12:56:58 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	12:56:58 PM	Tube furnace set to 100
8/15/2011	12:57:28 PM	H2 valve closed
8/15/2011	12:57:28 PM	BCl3 valve closed
8/15/2011	12:57:28 PM	PH3 valve closed
8/15/2011	12:57:28 PM	SiCl4 pre valve closed
8/15/2011	12:57:28 PM	SiCl4 post valve closed
8/15/2011	12:57:28 PM	Bypass valve closed
8/15/2011	12:57:28 PM	Bubbler valve closed
8/15/2011	12:57:28 PM	Helium valve opened
8/15/2011	12:57:28 PM	Main Vac valve opened
8/15/2011	12:57:28 PM	Helium MFC set to  20.000000
8/15/2011	12:57:28 PM	H2 MFC set to  0.000000
8/15/2011	12:57:28 PM	BCl3 MFC set to  0.000000
8/15/2011	12:57:28 PM	PHl3 MFC set to  0.000000
8/15/2011	12:57:28 PM	SiCl4 MFC set to  0.000000
8/15/2011	12:57:28 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	12:57:28 PM	Tube furnace set to 100
8/15/2011	12:57:58 PM	Helium valve closed
8/15/2011	12:57:58 PM	H2 valve closed
8/15/2011	12:57:58 PM	BCl3 valve closed
8/15/2011	12:57:58 PM	PH3 valve closed
8/15/2011	12:57:58 PM	SiCl4 pre valve closed
8/15/2011	12:57:58 PM	SiCl4 post valve closed
8/15/2011	12:57:58 PM	Bypass valve closed
8/15/2011	12:57:58 PM	Bubbler valve closed
8/15/2011	12:57:58 PM	Main Vac valve opened
8/15/2011	12:57:58 PM	Helium MFC set to  0.000000
8/15/2011	12:57:58 PM	H2 MFC set to  0.000000
8/15/2011	12:57:58 PM	BCl3 MFC set to  0.000000
8/15/2011	12:57:58 PM	PHl3 MFC set to  0.000000
8/15/2011	12:57:58 PM	SiCl4 MFC set to  0.000000
8/15/2011	12:57:58 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	12:57:58 PM	Tube furnace set to 100
8/15/2011	12:58:28 PM	H2 valve closed
8/15/2011	12:58:28 PM	BCl3 valve closed
8/15/2011	12:58:28 PM	PH3 valve closed
8/15/2011	12:58:28 PM	SiCl4 pre valve closed
8/15/2011	12:58:28 PM	SiCl4 post valve closed
8/15/2011	12:58:28 PM	Bypass valve closed
8/15/2011	12:58:28 PM	Bubbler valve closed
8/15/2011	12:58:28 PM	Helium valve opened
8/15/2011	12:58:28 PM	Main Vac valve opened
8/15/2011	12:58:28 PM	Helium MFC set to  20.000000
8/15/2011	12:58:28 PM	H2 MFC set to  0.000000
8/15/2011	12:58:28 PM	BCl3 MFC set to  0.000000
8/15/2011	12:58:28 PM	PHl3 MFC set to  0.000000
8/15/2011	12:58:28 PM	SiCl4 MFC set to  0.000000
8/15/2011	12:58:28 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	12:58:28 PM	Tube furnace set to 100
8/15/2011	12:58:58 PM	Helium valve closed
8/15/2011	12:58:58 PM	H2 valve closed
8/15/2011	12:58:58 PM	BCl3 valve closed
8/15/2011	12:58:58 PM	PH3 valve closed
8/15/2011	12:58:58 PM	SiCl4 pre valve closed
8/15/2011	12:58:58 PM	SiCl4 post valve closed
8/15/2011	12:58:58 PM	Bypass valve closed
8/15/2011	12:58:58 PM	Bubbler valve closed
8/15/2011	12:58:58 PM	Main Vac valve opened
8/15/2011	12:58:58 PM	Helium MFC set to  0.000000
8/15/2011	12:58:58 PM	H2 MFC set to  0.000000
8/15/2011	12:58:58 PM	BCl3 MFC set to  0.000000
8/15/2011	12:58:58 PM	PHl3 MFC set to  0.000000
8/15/2011	12:58:58 PM	SiCl4 MFC set to  0.000000
8/15/2011	12:58:58 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	12:58:59 PM	Tube furnace set to 100
8/15/2011	12:59:29 PM	H2 valve closed
8/15/2011	12:59:29 PM	BCl3 valve closed
8/15/2011	12:59:29 PM	PH3 valve closed
8/15/2011	12:59:29 PM	SiCl4 pre valve closed
8/15/2011	12:59:29 PM	SiCl4 post valve closed
8/15/2011	12:59:29 PM	Bypass valve closed
8/15/2011	12:59:29 PM	Bubbler valve closed
8/15/2011	12:59:29 PM	Helium valve opened
8/15/2011	12:59:29 PM	Main Vac valve opened
8/15/2011	12:59:29 PM	Helium MFC set to  20.000000
8/15/2011	12:59:29 PM	H2 MFC set to  0.000000
8/15/2011	12:59:29 PM	BCl3 MFC set to  0.000000
8/15/2011	12:59:29 PM	PHl3 MFC set to  0.000000
8/15/2011	12:59:29 PM	SiCl4 MFC set to  0.000000
8/15/2011	12:59:29 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	12:59:29 PM	Tube furnace set to 100
8/15/2011	12:59:59 PM	Helium valve closed
8/15/2011	12:59:59 PM	H2 valve closed
8/15/2011	12:59:59 PM	BCl3 valve closed
8/15/2011	12:59:59 PM	PH3 valve closed
8/15/2011	12:59:59 PM	SiCl4 pre valve closed
8/15/2011	12:59:59 PM	SiCl4 post valve closed
8/15/2011	12:59:59 PM	Bypass valve closed
8/15/2011	12:59:59 PM	Bubbler valve closed
8/15/2011	12:59:59 PM	Main Vac valve opened
8/15/2011	12:59:59 PM	Helium MFC set to  0.000000
8/15/2011	12:59:59 PM	H2 MFC set to  0.000000
8/15/2011	12:59:59 PM	BCl3 MFC set to  0.000000
8/15/2011	12:59:59 PM	PHl3 MFC set to  0.000000
8/15/2011	12:59:59 PM	SiCl4 MFC set to  0.000000
8/15/2011	12:59:59 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	12:59:59 PM	Tube furnace set to 100
8/15/2011	1:00:29 PM	H2 valve closed
8/15/2011	1:00:29 PM	BCl3 valve closed
8/15/2011	1:00:29 PM	PH3 valve closed
8/15/2011	1:00:29 PM	SiCl4 pre valve closed
8/15/2011	1:00:29 PM	SiCl4 post valve closed
8/15/2011	1:00:29 PM	Bypass valve closed
8/15/2011	1:00:29 PM	Bubbler valve closed
8/15/2011	1:00:29 PM	Helium valve opened
8/15/2011	1:00:29 PM	Main Vac valve opened
8/15/2011	1:00:29 PM	Helium MFC set to  20.000000
8/15/2011	1:00:29 PM	H2 MFC set to  0.000000
8/15/2011	1:00:29 PM	BCl3 MFC set to  0.000000
8/15/2011	1:00:29 PM	PHl3 MFC set to  0.000000
8/15/2011	1:00:29 PM	SiCl4 MFC set to  0.000000
8/15/2011	1:00:29 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	1:00:29 PM	Tube furnace set to 100
8/15/2011	1:00:59 PM	Helium valve closed
8/15/2011	1:00:59 PM	H2 valve closed
8/15/2011	1:00:59 PM	BCl3 valve closed
8/15/2011	1:00:59 PM	PH3 valve closed
8/15/2011	1:00:59 PM	SiCl4 pre valve closed
8/15/2011	1:00:59 PM	SiCl4 post valve closed
8/15/2011	1:00:59 PM	Bypass valve closed
8/15/2011	1:00:59 PM	Bubbler valve closed
8/15/2011	1:00:59 PM	Main Vac valve opened
8/15/2011	1:00:59 PM	Helium MFC set to  0.000000
8/15/2011	1:00:59 PM	H2 MFC set to  0.000000
8/15/2011	1:00:59 PM	BCl3 MFC set to  0.000000
8/15/2011	1:00:59 PM	PHl3 MFC set to  0.000000
8/15/2011	1:00:59 PM	SiCl4 MFC set to  0.000000
8/15/2011	1:00:59 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	1:00:59 PM	Tube furnace set to 100
8/15/2011	1:01:29 PM	H2 valve closed
8/15/2011	1:01:29 PM	BCl3 valve closed
8/15/2011	1:01:29 PM	PH3 valve closed
8/15/2011	1:01:29 PM	SiCl4 pre valve closed
8/15/2011	1:01:29 PM	SiCl4 post valve closed
8/15/2011	1:01:29 PM	Bypass valve closed
8/15/2011	1:01:29 PM	Bubbler valve closed
8/15/2011	1:01:29 PM	Helium valve opened
8/15/2011	1:01:29 PM	Main Vac valve opened
8/15/2011	1:01:29 PM	Helium MFC set to  20.000000
8/15/2011	1:01:29 PM	H2 MFC set to  0.000000
8/15/2011	1:01:29 PM	BCl3 MFC set to  0.000000
8/15/2011	1:01:29 PM	PHl3 MFC set to  0.000000
8/15/2011	1:01:29 PM	SiCl4 MFC set to  0.000000
8/15/2011	1:01:29 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	1:01:30 PM	Tube furnace set to 100
8/15/2011	1:02:00 PM	Helium valve closed
8/15/2011	1:02:00 PM	H2 valve closed
8/15/2011	1:02:00 PM	BCl3 valve closed
8/15/2011	1:02:00 PM	PH3 valve closed
8/15/2011	1:02:00 PM	SiCl4 pre valve closed
8/15/2011	1:02:00 PM	SiCl4 post valve closed
8/15/2011	1:02:00 PM	Bypass valve closed
8/15/2011	1:02:00 PM	Bubbler valve closed
8/15/2011	1:02:00 PM	Main Vac valve opened
8/15/2011	1:02:00 PM	Helium MFC set to  0.000000
8/15/2011	1:02:00 PM	H2 MFC set to  0.000000
8/15/2011	1:02:00 PM	BCl3 MFC set to  0.000000
8/15/2011	1:02:00 PM	PHl3 MFC set to  0.000000
8/15/2011	1:02:00 PM	SiCl4 MFC set to  0.000000
8/15/2011	1:02:00 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	1:02:00 PM	Tube furnace set to 100
8/15/2011	1:02:30 PM	H2 valve closed
8/15/2011	1:02:30 PM	BCl3 valve closed
8/15/2011	1:02:30 PM	PH3 valve closed
8/15/2011	1:02:30 PM	SiCl4 pre valve closed
8/15/2011	1:02:30 PM	SiCl4 post valve closed
8/15/2011	1:02:30 PM	Bypass valve closed
8/15/2011	1:02:30 PM	Bubbler valve closed
8/15/2011	1:02:30 PM	Helium valve opened
8/15/2011	1:02:30 PM	Main Vac valve opened
8/15/2011	1:02:30 PM	Helium MFC set to  20.000000
8/15/2011	1:02:30 PM	H2 MFC set to  0.000000
8/15/2011	1:02:30 PM	BCl3 MFC set to  0.000000
8/15/2011	1:02:30 PM	PHl3 MFC set to  0.000000
8/15/2011	1:02:30 PM	SiCl4 MFC set to  0.000000
8/15/2011	1:02:30 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	1:02:30 PM	Tube furnace set to 100
8/15/2011	1:03:00 PM	Helium valve closed
8/15/2011	1:03:00 PM	H2 valve closed
8/15/2011	1:03:00 PM	BCl3 valve closed
8/15/2011	1:03:00 PM	PH3 valve closed
8/15/2011	1:03:00 PM	SiCl4 pre valve closed
8/15/2011	1:03:00 PM	SiCl4 post valve closed
8/15/2011	1:03:00 PM	Bypass valve closed
8/15/2011	1:03:00 PM	Bubbler valve closed
8/15/2011	1:03:00 PM	Main Vac valve opened
8/15/2011	1:03:00 PM	Helium MFC set to  0.000000
8/15/2011	1:03:00 PM	H2 MFC set to  0.000000
8/15/2011	1:03:00 PM	BCl3 MFC set to  0.000000
8/15/2011	1:03:00 PM	PHl3 MFC set to  0.000000
8/15/2011	1:03:00 PM	SiCl4 MFC set to  0.000000
8/15/2011	1:03:00 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	1:03:00 PM	Tube furnace set to 100
8/15/2011	1:03:01 PM	Run finished at 1:03 PM
8/15/2011	1:04:52 PM	Main Vac valve closed
8/15/2011	1:05:04 PM	Main Vac valve opened
8/15/2011	1:06:03 PM	Recipe started at 1:06 PM
8/15/2011	1:06:03 PM	Helium valve closed
8/15/2011	1:06:03 PM	H2 valve closed
8/15/2011	1:06:03 PM	BCl3 valve closed
8/15/2011	1:06:03 PM	PH3 valve closed
8/15/2011	1:06:03 PM	SiCl4 pre valve closed
8/15/2011	1:06:03 PM	SiCl4 post valve closed
8/15/2011	1:06:03 PM	Main Vac valve closed
8/15/2011	1:06:03 PM	Bypass valve closed
8/15/2011	1:06:03 PM	Bubbler valve closed
8/15/2011	1:06:03 PM	Helium MFC set to  0.000000
8/15/2011	1:06:03 PM	H2 MFC set to  0.000000
8/15/2011	1:06:03 PM	BCl3 MFC set to  0.000000
8/15/2011	1:06:03 PM	PHl3 MFC set to  0.000000
8/15/2011	1:06:03 PM	SiCl4 MFC set to  0.000000
8/15/2011	1:06:03 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	1:06:03 PM	Tube furnace set to 0
8/15/2011	1:06:06 PM	Helium valve closed
8/15/2011	1:06:06 PM	BCl3 valve closed
8/15/2011	1:06:06 PM	PH3 valve closed
8/15/2011	1:06:06 PM	SiCl4 pre valve closed
8/15/2011	1:06:06 PM	SiCl4 post valve closed
8/15/2011	1:06:06 PM	Main Vac valve closed
8/15/2011	1:06:06 PM	Bypass valve closed
8/15/2011	1:06:06 PM	Bubbler valve closed
8/15/2011	1:06:06 PM	H2 valve opened
8/15/2011	1:06:06 PM	Helium MFC set to  0.000000
8/15/2011	1:06:06 PM	H2 MFC set to  500.000000
8/15/2011	1:06:06 PM	BCl3 MFC set to  0.000000
8/15/2011	1:06:06 PM	PHl3 MFC set to  0.000000
8/15/2011	1:06:06 PM	SiCl4 MFC set to  0.000000
8/15/2011	1:06:06 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	1:06:07 PM	Tube furnace set to 0
8/15/2011	1:07:10 PM	Helium valve closed
8/15/2011	1:07:10 PM	BCl3 valve closed
8/15/2011	1:07:10 PM	PH3 valve closed
8/15/2011	1:07:10 PM	SiCl4 pre valve closed
8/15/2011	1:07:10 PM	SiCl4 post valve closed
8/15/2011	1:07:10 PM	Main Vac valve closed
8/15/2011	1:07:10 PM	Bypass valve closed
8/15/2011	1:07:10 PM	H2 valve opened
8/15/2011	1:07:10 PM	Bubbler valve opened
8/15/2011	1:07:10 PM	Helium MFC set to  0.000000
8/15/2011	1:07:10 PM	H2 MFC set to  500.000000
8/15/2011	1:07:10 PM	BCl3 MFC set to  0.000000
8/15/2011	1:07:10 PM	PHl3 MFC set to  0.000000
8/15/2011	1:07:10 PM	SiCl4 MFC set to  0.000000
8/15/2011	1:07:10 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	1:07:10 PM	Tube furnace set to 0
8/15/2011	1:07:11 PM	Helium valve closed
8/15/2011	1:07:11 PM	BCl3 valve closed
8/15/2011	1:07:11 PM	PH3 valve closed
8/15/2011	1:07:11 PM	SiCl4 pre valve closed
8/15/2011	1:07:11 PM	SiCl4 post valve closed
8/15/2011	1:07:11 PM	Main Vac valve closed
8/15/2011	1:07:11 PM	Bypass valve closed
8/15/2011	1:07:11 PM	H2 valve opened
8/15/2011	1:07:11 PM	Bubbler valve opened
8/15/2011	1:07:11 PM	Helium MFC set to  0.000000
8/15/2011	1:07:11 PM	H2 MFC set to  500.000000
8/15/2011	1:07:11 PM	BCl3 MFC set to  0.000000
8/15/2011	1:07:11 PM	PHl3 MFC set to  0.000000
8/15/2011	1:07:11 PM	SiCl4 MFC set to  0.000000
8/15/2011	1:07:11 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	1:07:11 PM	Tube furnace set to 1000
8/15/2011	1:27:11 PM	Helium valve closed
8/15/2011	1:27:11 PM	PH3 valve closed
8/15/2011	1:27:11 PM	Main Vac valve closed
8/15/2011	1:27:11 PM	Bypass valve closed
8/15/2011	1:27:11 PM	H2 valve opened
8/15/2011	1:27:11 PM	BCl3 valve opened
8/15/2011	1:27:11 PM	SiCl4 pre valve opened
8/15/2011	1:27:11 PM	SiCl4 post valve opened
8/15/2011	1:27:11 PM	Bubbler valve opened
8/15/2011	1:27:11 PM	Helium MFC set to  0.000000
8/15/2011	1:27:11 PM	H2 MFC set to  500.000000
8/15/2011	1:27:11 PM	BCl3 MFC set to  2.300000
8/15/2011	1:27:11 PM	PHl3 MFC set to  0.000000
8/15/2011	1:27:11 PM	SiCl4 MFC set to  50.000000
8/15/2011	1:27:11 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	1:27:11 PM	Tube furnace set to 1000
8/15/2011	1:47:11 PM	Helium valve closed
8/15/2011	1:47:11 PM	BCl3 valve closed
8/15/2011	1:47:11 PM	PH3 valve closed
8/15/2011	1:47:11 PM	SiCl4 pre valve closed
8/15/2011	1:47:11 PM	SiCl4 post valve closed
8/15/2011	1:47:11 PM	Main Vac valve closed
8/15/2011	1:47:11 PM	Bypass valve closed
8/15/2011	1:47:11 PM	H2 valve opened
8/15/2011	1:47:11 PM	Bubbler valve opened
8/15/2011	1:47:11 PM	Helium MFC set to  0.000000
8/15/2011	1:47:11 PM	H2 MFC set to  500.000000
8/15/2011	1:47:11 PM	BCl3 MFC set to  0.000000
8/15/2011	1:47:11 PM	PHl3 MFC set to  0.000000
8/15/2011	1:47:11 PM	SiCl4 MFC set to  0.000000
8/15/2011	1:47:11 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	1:47:11 PM	Tube furnace set to 750
8/15/2011	1:52:11 PM	H2 valve closed
8/15/2011	1:52:11 PM	BCl3 valve closed
8/15/2011	1:52:11 PM	PH3 valve closed
8/15/2011	1:52:11 PM	SiCl4 pre valve closed
8/15/2011	1:52:11 PM	SiCl4 post valve closed
8/15/2011	1:52:11 PM	Main Vac valve closed
8/15/2011	1:52:11 PM	Bypass valve closed
8/15/2011	1:52:11 PM	Helium valve opened
8/15/2011	1:52:11 PM	Bubbler valve opened
8/15/2011	1:52:11 PM	Helium MFC set to  500.000000
8/15/2011	1:52:11 PM	H2 MFC set to  0.000000
8/15/2011	1:52:11 PM	BCl3 MFC set to  0.000000
8/15/2011	1:52:11 PM	PHl3 MFC set to  0.000000
8/15/2011	1:52:11 PM	SiCl4 MFC set to  0.000000
8/15/2011	1:52:11 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	1:52:11 PM	Tube furnace set to 0
8/15/2011	2:12:11 PM	Helium valve closed
8/15/2011	2:12:11 PM	H2 valve closed
8/15/2011	2:12:11 PM	BCl3 valve closed
8/15/2011	2:12:11 PM	PH3 valve closed
8/15/2011	2:12:11 PM	SiCl4 pre valve closed
8/15/2011	2:12:11 PM	SiCl4 post valve closed
8/15/2011	2:12:11 PM	Main Vac valve closed
8/15/2011	2:12:11 PM	Bypass valve closed
8/15/2011	2:12:11 PM	Bubbler valve closed
8/15/2011	2:12:11 PM	Helium MFC set to  0.000000
8/15/2011	2:12:11 PM	H2 MFC set to  0.000000
8/15/2011	2:12:11 PM	BCl3 MFC set to  0.000000
8/15/2011	2:12:11 PM	PHl3 MFC set to  0.000000
8/15/2011	2:12:11 PM	SiCl4 MFC set to  0.000000
8/15/2011	2:12:11 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	2:12:12 PM	Tube furnace set to 0
8/15/2011	2:12:13 PM	Run finished at 2:12 PM
8/15/2011	2:12:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/15/2011	2:12:40 PM	Recipe started at 2:12 PM
8/15/2011	2:12:40 PM	Helium valve closed
8/15/2011	2:12:40 PM	H2 valve closed
8/15/2011	2:12:40 PM	BCl3 valve closed
8/15/2011	2:12:40 PM	PH3 valve closed
8/15/2011	2:12:40 PM	SiCl4 pre valve closed
8/15/2011	2:12:40 PM	SiCl4 post valve closed
8/15/2011	2:12:40 PM	Main Vac valve closed
8/15/2011	2:12:40 PM	Bypass valve closed
8/15/2011	2:12:40 PM	Bubbler valve closed
8/15/2011	2:12:40 PM	Helium MFC set to  0.000000
8/15/2011	2:12:40 PM	H2 MFC set to  0.000000
8/15/2011	2:12:40 PM	BCl3 MFC set to  0.000000
8/15/2011	2:12:40 PM	PHl3 MFC set to  0.000000
8/15/2011	2:12:40 PM	SiCl4 MFC set to  0.000000
8/15/2011	2:12:40 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	2:12:41 PM	Tube furnace set to 0
8/15/2011	2:12:44 PM	H2 valve closed
8/15/2011	2:12:44 PM	BCl3 valve closed
8/15/2011	2:12:44 PM	PH3 valve closed
8/15/2011	2:12:44 PM	SiCl4 pre valve closed
8/15/2011	2:12:44 PM	SiCl4 post valve closed
8/15/2011	2:12:44 PM	Main Vac valve closed
8/15/2011	2:12:44 PM	Bypass valve closed
8/15/2011	2:12:44 PM	Bubbler valve closed
8/15/2011	2:12:44 PM	Helium valve opened
8/15/2011	2:12:44 PM	Helium MFC set to  500.000000
8/15/2011	2:12:44 PM	H2 MFC set to  0.000000
8/15/2011	2:12:44 PM	BCl3 MFC set to  0.000000
8/15/2011	2:12:44 PM	PHl3 MFC set to  0.000000
8/15/2011	2:12:44 PM	SiCl4 MFC set to  0.000000
8/15/2011	2:12:44 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	2:12:44 PM	Tube furnace set to 0
8/15/2011	2:12:44 PM	Helium valve closed
8/15/2011	2:12:44 PM	H2 valve closed
8/15/2011	2:12:44 PM	BCl3 valve closed
8/15/2011	2:12:44 PM	PH3 valve closed
8/15/2011	2:12:44 PM	SiCl4 pre valve closed
8/15/2011	2:12:44 PM	SiCl4 post valve closed
8/15/2011	2:12:44 PM	Main Vac valve closed
8/15/2011	2:12:44 PM	Bypass valve closed
8/15/2011	2:12:44 PM	Bubbler valve closed
8/15/2011	2:12:44 PM	Helium MFC set to  0.000000
8/15/2011	2:12:44 PM	H2 MFC set to  0.000000
8/15/2011	2:12:44 PM	BCl3 MFC set to  0.000000
8/15/2011	2:12:44 PM	PHl3 MFC set to  0.000000
8/15/2011	2:12:44 PM	SiCl4 MFC set to  0.000000
8/15/2011	2:12:44 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	2:12:44 PM	Tube furnace set to 0
8/15/2011	2:12:45 PM	Run finished at 2:12 PM
8/15/2011	2:12:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/15/2011	2:24:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/15/2011	2:24:12 PM	Recipe started at 2:24 PM
8/15/2011	2:24:12 PM	Helium valve closed
8/15/2011	2:24:12 PM	H2 valve closed
8/15/2011	2:24:12 PM	BCl3 valve closed
8/15/2011	2:24:12 PM	PH3 valve closed
8/15/2011	2:24:12 PM	SiCl4 pre valve closed
8/15/2011	2:24:12 PM	SiCl4 post valve closed
8/15/2011	2:24:12 PM	Main Vac valve closed
8/15/2011	2:24:12 PM	Bubbler valve closed
8/15/2011	2:24:12 PM	Bypass valve opened
8/15/2011	2:24:12 PM	Helium MFC set to  0.000000
8/15/2011	2:24:12 PM	H2 MFC set to  0.000000
8/15/2011	2:24:12 PM	BCl3 MFC set to  0.000000
8/15/2011	2:24:12 PM	PHl3 MFC set to  0.000000
8/15/2011	2:24:12 PM	SiCl4 MFC set to  0.000000
8/15/2011	2:24:12 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	2:24:12 PM	Tube furnace set to 0
8/15/2011	2:25:34 PM	Helium valve closed
8/15/2011	2:25:34 PM	H2 valve closed
8/15/2011	2:25:34 PM	BCl3 valve closed
8/15/2011	2:25:34 PM	PH3 valve closed
8/15/2011	2:25:34 PM	SiCl4 pre valve closed
8/15/2011	2:25:34 PM	SiCl4 post valve closed
8/15/2011	2:25:34 PM	Main Vac valve closed
8/15/2011	2:25:34 PM	Bubbler valve closed
8/15/2011	2:25:34 PM	Bypass valve opened
8/15/2011	2:25:34 PM	Helium MFC set to  0.000000
8/15/2011	2:25:34 PM	H2 MFC set to  0.000000
8/15/2011	2:25:34 PM	BCl3 MFC set to  0.000000
8/15/2011	2:25:34 PM	PHl3 MFC set to  0.000000
8/15/2011	2:25:34 PM	SiCl4 MFC set to  0.000000
8/15/2011	2:25:34 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	2:25:34 PM	Tube furnace set to 0
8/15/2011	2:26:34 PM	Helium valve closed
8/15/2011	2:26:34 PM	H2 valve closed
8/15/2011	2:26:34 PM	BCl3 valve closed
8/15/2011	2:26:34 PM	PH3 valve closed
8/15/2011	2:26:34 PM	SiCl4 pre valve closed
8/15/2011	2:26:34 PM	SiCl4 post valve closed
8/15/2011	2:26:34 PM	Bypass valve closed
8/15/2011	2:26:34 PM	Bubbler valve closed
8/15/2011	2:26:34 PM	Main Vac valve opened
8/15/2011	2:26:34 PM	Helium MFC set to  0.000000
8/15/2011	2:26:34 PM	H2 MFC set to  0.000000
8/15/2011	2:26:34 PM	BCl3 MFC set to  0.000000
8/15/2011	2:26:34 PM	PHl3 MFC set to  0.000000
8/15/2011	2:26:34 PM	SiCl4 MFC set to  0.000000
8/15/2011	2:26:34 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	2:26:34 PM	Tube furnace set to 0
8/15/2011	2:26:35 PM	Run finished at 2:26 PM
8/15/2011	2:26:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/15/2011	2:27:45 PM	Recipe started at 2:27 PM
8/15/2011	2:27:45 PM	Helium valve closed
8/15/2011	2:27:45 PM	H2 valve closed
8/15/2011	2:27:45 PM	BCl3 valve closed
8/15/2011	2:27:45 PM	PH3 valve closed
8/15/2011	2:27:45 PM	SiCl4 pre valve closed
8/15/2011	2:27:45 PM	SiCl4 post valve closed
8/15/2011	2:27:45 PM	Bypass valve closed
8/15/2011	2:27:45 PM	Bubbler valve closed
8/15/2011	2:27:45 PM	Main Vac valve opened
8/15/2011	2:27:45 PM	Helium MFC set to  0.000000
8/15/2011	2:27:45 PM	H2 MFC set to  0.000000
8/15/2011	2:27:45 PM	BCl3 MFC set to  0.000000
8/15/2011	2:27:45 PM	PHl3 MFC set to  0.000000
8/15/2011	2:27:45 PM	SiCl4 MFC set to  0.000000
8/15/2011	2:27:45 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	2:27:45 PM	Tube furnace set to 100
8/15/2011	2:28:15 PM	H2 valve closed
8/15/2011	2:28:15 PM	BCl3 valve closed
8/15/2011	2:28:15 PM	PH3 valve closed
8/15/2011	2:28:15 PM	SiCl4 pre valve closed
8/15/2011	2:28:15 PM	SiCl4 post valve closed
8/15/2011	2:28:15 PM	Bypass valve closed
8/15/2011	2:28:15 PM	Bubbler valve closed
8/15/2011	2:28:15 PM	Helium valve opened
8/15/2011	2:28:15 PM	Main Vac valve opened
8/15/2011	2:28:15 PM	Helium MFC set to  20.000000
8/15/2011	2:28:15 PM	H2 MFC set to  0.000000
8/15/2011	2:28:15 PM	BCl3 MFC set to  0.000000
8/15/2011	2:28:15 PM	PHl3 MFC set to  0.000000
8/15/2011	2:28:15 PM	SiCl4 MFC set to  0.000000
8/15/2011	2:28:15 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	2:28:15 PM	Tube furnace set to 100
8/15/2011	2:28:45 PM	Helium valve closed
8/15/2011	2:28:45 PM	H2 valve closed
8/15/2011	2:28:45 PM	BCl3 valve closed
8/15/2011	2:28:45 PM	PH3 valve closed
8/15/2011	2:28:45 PM	SiCl4 pre valve closed
8/15/2011	2:28:45 PM	SiCl4 post valve closed
8/15/2011	2:28:45 PM	Bypass valve closed
8/15/2011	2:28:45 PM	Bubbler valve closed
8/15/2011	2:28:45 PM	Main Vac valve opened
8/15/2011	2:28:45 PM	Helium MFC set to  0.000000
8/15/2011	2:28:45 PM	H2 MFC set to  0.000000
8/15/2011	2:28:45 PM	BCl3 MFC set to  0.000000
8/15/2011	2:28:45 PM	PHl3 MFC set to  0.000000
8/15/2011	2:28:45 PM	SiCl4 MFC set to  0.000000
8/15/2011	2:28:45 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	2:28:46 PM	Tube furnace set to 100
8/15/2011	2:29:16 PM	H2 valve closed
8/15/2011	2:29:16 PM	BCl3 valve closed
8/15/2011	2:29:16 PM	PH3 valve closed
8/15/2011	2:29:16 PM	SiCl4 pre valve closed
8/15/2011	2:29:16 PM	SiCl4 post valve closed
8/15/2011	2:29:16 PM	Bypass valve closed
8/15/2011	2:29:16 PM	Bubbler valve closed
8/15/2011	2:29:16 PM	Helium valve opened
8/15/2011	2:29:16 PM	Main Vac valve opened
8/15/2011	2:29:16 PM	Helium MFC set to  20.000000
8/15/2011	2:29:16 PM	H2 MFC set to  0.000000
8/15/2011	2:29:16 PM	BCl3 MFC set to  0.000000
8/15/2011	2:29:16 PM	PHl3 MFC set to  0.000000
8/15/2011	2:29:16 PM	SiCl4 MFC set to  0.000000
8/15/2011	2:29:16 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	2:29:16 PM	Tube furnace set to 100
8/15/2011	2:29:46 PM	Helium valve closed
8/15/2011	2:29:46 PM	H2 valve closed
8/15/2011	2:29:46 PM	BCl3 valve closed
8/15/2011	2:29:46 PM	PH3 valve closed
8/15/2011	2:29:46 PM	SiCl4 pre valve closed
8/15/2011	2:29:46 PM	SiCl4 post valve closed
8/15/2011	2:29:46 PM	Bypass valve closed
8/15/2011	2:29:46 PM	Bubbler valve closed
8/15/2011	2:29:46 PM	Main Vac valve opened
8/15/2011	2:29:46 PM	Helium MFC set to  0.000000
8/15/2011	2:29:46 PM	H2 MFC set to  0.000000
8/15/2011	2:29:46 PM	BCl3 MFC set to  0.000000
8/15/2011	2:29:46 PM	PHl3 MFC set to  0.000000
8/15/2011	2:29:46 PM	SiCl4 MFC set to  0.000000
8/15/2011	2:29:46 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	2:29:46 PM	Tube furnace set to 100
8/15/2011	2:30:16 PM	H2 valve closed
8/15/2011	2:30:16 PM	BCl3 valve closed
8/15/2011	2:30:16 PM	PH3 valve closed
8/15/2011	2:30:16 PM	SiCl4 pre valve closed
8/15/2011	2:30:16 PM	SiCl4 post valve closed
8/15/2011	2:30:16 PM	Bypass valve closed
8/15/2011	2:30:16 PM	Bubbler valve closed
8/15/2011	2:30:16 PM	Helium valve opened
8/15/2011	2:30:16 PM	Main Vac valve opened
8/15/2011	2:30:16 PM	Helium MFC set to  20.000000
8/15/2011	2:30:16 PM	H2 MFC set to  0.000000
8/15/2011	2:30:16 PM	BCl3 MFC set to  0.000000
8/15/2011	2:30:16 PM	PHl3 MFC set to  0.000000
8/15/2011	2:30:16 PM	SiCl4 MFC set to  0.000000
8/15/2011	2:30:16 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	2:30:16 PM	Tube furnace set to 100
8/15/2011	2:30:46 PM	Helium valve closed
8/15/2011	2:30:46 PM	H2 valve closed
8/15/2011	2:30:46 PM	BCl3 valve closed
8/15/2011	2:30:46 PM	PH3 valve closed
8/15/2011	2:30:46 PM	SiCl4 pre valve closed
8/15/2011	2:30:46 PM	SiCl4 post valve closed
8/15/2011	2:30:46 PM	Bypass valve closed
8/15/2011	2:30:46 PM	Bubbler valve closed
8/15/2011	2:30:46 PM	Main Vac valve opened
8/15/2011	2:30:46 PM	Helium MFC set to  0.000000
8/15/2011	2:30:46 PM	H2 MFC set to  0.000000
8/15/2011	2:30:46 PM	BCl3 MFC set to  0.000000
8/15/2011	2:30:46 PM	PHl3 MFC set to  0.000000
8/15/2011	2:30:46 PM	SiCl4 MFC set to  0.000000
8/15/2011	2:30:46 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	2:30:46 PM	Tube furnace set to 100
8/15/2011	2:31:16 PM	H2 valve closed
8/15/2011	2:31:16 PM	BCl3 valve closed
8/15/2011	2:31:16 PM	PH3 valve closed
8/15/2011	2:31:16 PM	SiCl4 pre valve closed
8/15/2011	2:31:16 PM	SiCl4 post valve closed
8/15/2011	2:31:16 PM	Bypass valve closed
8/15/2011	2:31:16 PM	Bubbler valve closed
8/15/2011	2:31:16 PM	Helium valve opened
8/15/2011	2:31:16 PM	Main Vac valve opened
8/15/2011	2:31:16 PM	Helium MFC set to  20.000000
8/15/2011	2:31:16 PM	H2 MFC set to  0.000000
8/15/2011	2:31:16 PM	BCl3 MFC set to  0.000000
8/15/2011	2:31:16 PM	PHl3 MFC set to  0.000000
8/15/2011	2:31:16 PM	SiCl4 MFC set to  0.000000
8/15/2011	2:31:16 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	2:31:17 PM	Tube furnace set to 100
8/15/2011	2:31:47 PM	Helium valve closed
8/15/2011	2:31:47 PM	H2 valve closed
8/15/2011	2:31:47 PM	BCl3 valve closed
8/15/2011	2:31:47 PM	PH3 valve closed
8/15/2011	2:31:47 PM	SiCl4 pre valve closed
8/15/2011	2:31:47 PM	SiCl4 post valve closed
8/15/2011	2:31:47 PM	Bypass valve closed
8/15/2011	2:31:47 PM	Bubbler valve closed
8/15/2011	2:31:47 PM	Main Vac valve opened
8/15/2011	2:31:47 PM	Helium MFC set to  0.000000
8/15/2011	2:31:47 PM	H2 MFC set to  0.000000
8/15/2011	2:31:47 PM	BCl3 MFC set to  0.000000
8/15/2011	2:31:47 PM	PHl3 MFC set to  0.000000
8/15/2011	2:31:47 PM	SiCl4 MFC set to  0.000000
8/15/2011	2:31:47 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	2:31:47 PM	Tube furnace set to 100
8/15/2011	2:32:17 PM	H2 valve closed
8/15/2011	2:32:17 PM	BCl3 valve closed
8/15/2011	2:32:17 PM	PH3 valve closed
8/15/2011	2:32:17 PM	SiCl4 pre valve closed
8/15/2011	2:32:17 PM	SiCl4 post valve closed
8/15/2011	2:32:17 PM	Bypass valve closed
8/15/2011	2:32:17 PM	Bubbler valve closed
8/15/2011	2:32:17 PM	Helium valve opened
8/15/2011	2:32:17 PM	Main Vac valve opened
8/15/2011	2:32:17 PM	Helium MFC set to  20.000000
8/15/2011	2:32:17 PM	H2 MFC set to  0.000000
8/15/2011	2:32:17 PM	BCl3 MFC set to  0.000000
8/15/2011	2:32:17 PM	PHl3 MFC set to  0.000000
8/15/2011	2:32:17 PM	SiCl4 MFC set to  0.000000
8/15/2011	2:32:17 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	2:32:17 PM	Tube furnace set to 100
8/15/2011	2:32:47 PM	Helium valve closed
8/15/2011	2:32:47 PM	H2 valve closed
8/15/2011	2:32:47 PM	BCl3 valve closed
8/15/2011	2:32:47 PM	PH3 valve closed
8/15/2011	2:32:47 PM	SiCl4 pre valve closed
8/15/2011	2:32:47 PM	SiCl4 post valve closed
8/15/2011	2:32:47 PM	Bypass valve closed
8/15/2011	2:32:47 PM	Bubbler valve closed
8/15/2011	2:32:47 PM	Main Vac valve opened
8/15/2011	2:32:47 PM	Helium MFC set to  0.000000
8/15/2011	2:32:47 PM	H2 MFC set to  0.000000
8/15/2011	2:32:47 PM	BCl3 MFC set to  0.000000
8/15/2011	2:32:47 PM	PHl3 MFC set to  0.000000
8/15/2011	2:32:47 PM	SiCl4 MFC set to  0.000000
8/15/2011	2:32:47 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	2:32:47 PM	Tube furnace set to 100
8/15/2011	2:33:17 PM	H2 valve closed
8/15/2011	2:33:17 PM	BCl3 valve closed
8/15/2011	2:33:17 PM	PH3 valve closed
8/15/2011	2:33:17 PM	SiCl4 pre valve closed
8/15/2011	2:33:17 PM	SiCl4 post valve closed
8/15/2011	2:33:17 PM	Bypass valve closed
8/15/2011	2:33:17 PM	Bubbler valve closed
8/15/2011	2:33:17 PM	Helium valve opened
8/15/2011	2:33:17 PM	Main Vac valve opened
8/15/2011	2:33:17 PM	Helium MFC set to  20.000000
8/15/2011	2:33:17 PM	H2 MFC set to  0.000000
8/15/2011	2:33:17 PM	BCl3 MFC set to  0.000000
8/15/2011	2:33:17 PM	PHl3 MFC set to  0.000000
8/15/2011	2:33:17 PM	SiCl4 MFC set to  0.000000
8/15/2011	2:33:17 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	2:33:17 PM	Tube furnace set to 100
8/15/2011	2:33:47 PM	Helium valve closed
8/15/2011	2:33:47 PM	H2 valve closed
8/15/2011	2:33:47 PM	BCl3 valve closed
8/15/2011	2:33:47 PM	PH3 valve closed
8/15/2011	2:33:47 PM	SiCl4 pre valve closed
8/15/2011	2:33:47 PM	SiCl4 post valve closed
8/15/2011	2:33:47 PM	Bypass valve closed
8/15/2011	2:33:47 PM	Bubbler valve closed
8/15/2011	2:33:47 PM	Main Vac valve opened
8/15/2011	2:33:47 PM	Helium MFC set to  0.000000
8/15/2011	2:33:47 PM	H2 MFC set to  0.000000
8/15/2011	2:33:47 PM	BCl3 MFC set to  0.000000
8/15/2011	2:33:47 PM	PHl3 MFC set to  0.000000
8/15/2011	2:33:47 PM	SiCl4 MFC set to  0.000000
8/15/2011	2:33:47 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	2:33:48 PM	Tube furnace set to 100
8/15/2011	2:34:18 PM	H2 valve closed
8/15/2011	2:34:18 PM	BCl3 valve closed
8/15/2011	2:34:18 PM	PH3 valve closed
8/15/2011	2:34:18 PM	SiCl4 pre valve closed
8/15/2011	2:34:18 PM	SiCl4 post valve closed
8/15/2011	2:34:18 PM	Bypass valve closed
8/15/2011	2:34:18 PM	Bubbler valve closed
8/15/2011	2:34:18 PM	Helium valve opened
8/15/2011	2:34:18 PM	Main Vac valve opened
8/15/2011	2:34:18 PM	Helium MFC set to  20.000000
8/15/2011	2:34:18 PM	H2 MFC set to  0.000000
8/15/2011	2:34:18 PM	BCl3 MFC set to  0.000000
8/15/2011	2:34:18 PM	PHl3 MFC set to  0.000000
8/15/2011	2:34:18 PM	SiCl4 MFC set to  0.000000
8/15/2011	2:34:18 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	2:34:18 PM	Tube furnace set to 100
8/15/2011	2:34:48 PM	Helium valve closed
8/15/2011	2:34:48 PM	H2 valve closed
8/15/2011	2:34:48 PM	BCl3 valve closed
8/15/2011	2:34:48 PM	PH3 valve closed
8/15/2011	2:34:48 PM	SiCl4 pre valve closed
8/15/2011	2:34:48 PM	SiCl4 post valve closed
8/15/2011	2:34:48 PM	Bypass valve closed
8/15/2011	2:34:48 PM	Bubbler valve closed
8/15/2011	2:34:48 PM	Main Vac valve opened
8/15/2011	2:34:48 PM	Helium MFC set to  0.000000
8/15/2011	2:34:48 PM	H2 MFC set to  0.000000
8/15/2011	2:34:48 PM	BCl3 MFC set to  0.000000
8/15/2011	2:34:48 PM	PHl3 MFC set to  0.000000
8/15/2011	2:34:48 PM	SiCl4 MFC set to  0.000000
8/15/2011	2:34:48 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	2:34:48 PM	Tube furnace set to 100
8/15/2011	2:35:18 PM	H2 valve closed
8/15/2011	2:35:18 PM	BCl3 valve closed
8/15/2011	2:35:18 PM	PH3 valve closed
8/15/2011	2:35:18 PM	SiCl4 pre valve closed
8/15/2011	2:35:18 PM	SiCl4 post valve closed
8/15/2011	2:35:18 PM	Bypass valve closed
8/15/2011	2:35:18 PM	Bubbler valve closed
8/15/2011	2:35:18 PM	Helium valve opened
8/15/2011	2:35:18 PM	Main Vac valve opened
8/15/2011	2:35:18 PM	Helium MFC set to  20.000000
8/15/2011	2:35:18 PM	H2 MFC set to  0.000000
8/15/2011	2:35:18 PM	BCl3 MFC set to  0.000000
8/15/2011	2:35:18 PM	PHl3 MFC set to  0.000000
8/15/2011	2:35:18 PM	SiCl4 MFC set to  0.000000
8/15/2011	2:35:18 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	2:35:18 PM	Tube furnace set to 100
8/15/2011	2:35:48 PM	Helium valve closed
8/15/2011	2:35:48 PM	H2 valve closed
8/15/2011	2:35:48 PM	BCl3 valve closed
8/15/2011	2:35:48 PM	PH3 valve closed
8/15/2011	2:35:48 PM	SiCl4 pre valve closed
8/15/2011	2:35:48 PM	SiCl4 post valve closed
8/15/2011	2:35:48 PM	Bypass valve closed
8/15/2011	2:35:48 PM	Bubbler valve closed
8/15/2011	2:35:48 PM	Main Vac valve opened
8/15/2011	2:35:48 PM	Helium MFC set to  0.000000
8/15/2011	2:35:48 PM	H2 MFC set to  0.000000
8/15/2011	2:35:48 PM	BCl3 MFC set to  0.000000
8/15/2011	2:35:48 PM	PHl3 MFC set to  0.000000
8/15/2011	2:35:48 PM	SiCl4 MFC set to  0.000000
8/15/2011	2:35:48 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	2:35:48 PM	Tube furnace set to 100
8/15/2011	2:36:18 PM	H2 valve closed
8/15/2011	2:36:18 PM	BCl3 valve closed
8/15/2011	2:36:18 PM	PH3 valve closed
8/15/2011	2:36:18 PM	SiCl4 pre valve closed
8/15/2011	2:36:18 PM	SiCl4 post valve closed
8/15/2011	2:36:18 PM	Bypass valve closed
8/15/2011	2:36:18 PM	Bubbler valve closed
8/15/2011	2:36:18 PM	Helium valve opened
8/15/2011	2:36:18 PM	Main Vac valve opened
8/15/2011	2:36:18 PM	Helium MFC set to  20.000000
8/15/2011	2:36:18 PM	H2 MFC set to  0.000000
8/15/2011	2:36:18 PM	BCl3 MFC set to  0.000000
8/15/2011	2:36:18 PM	PHl3 MFC set to  0.000000
8/15/2011	2:36:18 PM	SiCl4 MFC set to  0.000000
8/15/2011	2:36:18 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	2:36:19 PM	Tube furnace set to 100
8/15/2011	2:36:49 PM	Helium valve closed
8/15/2011	2:36:49 PM	H2 valve closed
8/15/2011	2:36:49 PM	BCl3 valve closed
8/15/2011	2:36:49 PM	PH3 valve closed
8/15/2011	2:36:49 PM	SiCl4 pre valve closed
8/15/2011	2:36:49 PM	SiCl4 post valve closed
8/15/2011	2:36:49 PM	Bypass valve closed
8/15/2011	2:36:49 PM	Bubbler valve closed
8/15/2011	2:36:49 PM	Main Vac valve opened
8/15/2011	2:36:49 PM	Helium MFC set to  0.000000
8/15/2011	2:36:49 PM	H2 MFC set to  0.000000
8/15/2011	2:36:49 PM	BCl3 MFC set to  0.000000
8/15/2011	2:36:49 PM	PHl3 MFC set to  0.000000
8/15/2011	2:36:49 PM	SiCl4 MFC set to  0.000000
8/15/2011	2:36:49 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	2:36:49 PM	Tube furnace set to 100
8/15/2011	2:37:19 PM	H2 valve closed
8/15/2011	2:37:19 PM	BCl3 valve closed
8/15/2011	2:37:19 PM	PH3 valve closed
8/15/2011	2:37:19 PM	SiCl4 pre valve closed
8/15/2011	2:37:19 PM	SiCl4 post valve closed
8/15/2011	2:37:19 PM	Bypass valve closed
8/15/2011	2:37:19 PM	Bubbler valve closed
8/15/2011	2:37:19 PM	Helium valve opened
8/15/2011	2:37:19 PM	Main Vac valve opened
8/15/2011	2:37:19 PM	Helium MFC set to  20.000000
8/15/2011	2:37:19 PM	H2 MFC set to  0.000000
8/15/2011	2:37:19 PM	BCl3 MFC set to  0.000000
8/15/2011	2:37:19 PM	PHl3 MFC set to  0.000000
8/15/2011	2:37:19 PM	SiCl4 MFC set to  0.000000
8/15/2011	2:37:19 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	2:37:19 PM	Tube furnace set to 100
8/15/2011	2:37:49 PM	Helium valve closed
8/15/2011	2:37:49 PM	H2 valve closed
8/15/2011	2:37:49 PM	BCl3 valve closed
8/15/2011	2:37:49 PM	PH3 valve closed
8/15/2011	2:37:49 PM	SiCl4 pre valve closed
8/15/2011	2:37:49 PM	SiCl4 post valve closed
8/15/2011	2:37:49 PM	Bypass valve closed
8/15/2011	2:37:49 PM	Bubbler valve closed
8/15/2011	2:37:49 PM	Main Vac valve opened
8/15/2011	2:37:49 PM	Helium MFC set to  0.000000
8/15/2011	2:37:49 PM	H2 MFC set to  0.000000
8/15/2011	2:37:49 PM	BCl3 MFC set to  0.000000
8/15/2011	2:37:49 PM	PHl3 MFC set to  0.000000
8/15/2011	2:37:49 PM	SiCl4 MFC set to  0.000000
8/15/2011	2:37:49 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	2:37:49 PM	Tube furnace set to 100
8/15/2011	2:37:50 PM	Run finished at 2:37 PM
8/15/2011	2:40:17 PM	Tube furnace set to 250
8/15/2011	2:41:46 PM	Recipe started at 2:41 PM
8/15/2011	2:41:46 PM	Helium valve closed
8/15/2011	2:41:46 PM	H2 valve closed
8/15/2011	2:41:46 PM	BCl3 valve closed
8/15/2011	2:41:46 PM	PH3 valve closed
8/15/2011	2:41:46 PM	SiCl4 pre valve closed
8/15/2011	2:41:46 PM	SiCl4 post valve closed
8/15/2011	2:41:46 PM	Main Vac valve closed
8/15/2011	2:41:46 PM	Bypass valve closed
8/15/2011	2:41:46 PM	Bubbler valve closed
8/15/2011	2:41:46 PM	Helium MFC set to  0.000000
8/15/2011	2:41:46 PM	H2 MFC set to  0.000000
8/15/2011	2:41:46 PM	BCl3 MFC set to  0.000000
8/15/2011	2:41:46 PM	PHl3 MFC set to  0.000000
8/15/2011	2:41:46 PM	SiCl4 MFC set to  0.000000
8/15/2011	2:41:46 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	2:41:46 PM	Tube furnace set to 0
8/15/2011	2:41:49 PM	Helium valve closed
8/15/2011	2:41:49 PM	BCl3 valve closed
8/15/2011	2:41:49 PM	PH3 valve closed
8/15/2011	2:41:49 PM	SiCl4 pre valve closed
8/15/2011	2:41:49 PM	SiCl4 post valve closed
8/15/2011	2:41:49 PM	Main Vac valve closed
8/15/2011	2:41:49 PM	Bypass valve closed
8/15/2011	2:41:49 PM	Bubbler valve closed
8/15/2011	2:41:49 PM	H2 valve opened
8/15/2011	2:41:49 PM	Helium MFC set to  0.000000
8/15/2011	2:41:49 PM	H2 MFC set to  500.000000
8/15/2011	2:41:49 PM	BCl3 MFC set to  0.000000
8/15/2011	2:41:49 PM	PHl3 MFC set to  0.000000
8/15/2011	2:41:49 PM	SiCl4 MFC set to  0.000000
8/15/2011	2:41:49 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	2:41:49 PM	Tube furnace set to 0
8/15/2011	2:42:51 PM	Helium valve closed
8/15/2011	2:42:51 PM	BCl3 valve closed
8/15/2011	2:42:51 PM	PH3 valve closed
8/15/2011	2:42:51 PM	SiCl4 pre valve closed
8/15/2011	2:42:51 PM	SiCl4 post valve closed
8/15/2011	2:42:51 PM	Main Vac valve closed
8/15/2011	2:42:51 PM	Bypass valve closed
8/15/2011	2:42:51 PM	H2 valve opened
8/15/2011	2:42:51 PM	Bubbler valve opened
8/15/2011	2:42:51 PM	Helium MFC set to  0.000000
8/15/2011	2:42:51 PM	H2 MFC set to  500.000000
8/15/2011	2:42:51 PM	BCl3 MFC set to  0.000000
8/15/2011	2:42:51 PM	PHl3 MFC set to  0.000000
8/15/2011	2:42:51 PM	SiCl4 MFC set to  0.000000
8/15/2011	2:42:51 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	2:42:51 PM	Tube furnace set to 0
8/15/2011	2:42:52 PM	Helium valve closed
8/15/2011	2:42:52 PM	BCl3 valve closed
8/15/2011	2:42:52 PM	PH3 valve closed
8/15/2011	2:42:52 PM	SiCl4 pre valve closed
8/15/2011	2:42:52 PM	SiCl4 post valve closed
8/15/2011	2:42:52 PM	Main Vac valve closed
8/15/2011	2:42:52 PM	Bypass valve closed
8/15/2011	2:42:52 PM	H2 valve opened
8/15/2011	2:42:52 PM	Bubbler valve opened
8/15/2011	2:42:52 PM	Helium MFC set to  0.000000
8/15/2011	2:42:52 PM	H2 MFC set to  500.000000
8/15/2011	2:42:52 PM	BCl3 MFC set to  0.000000
8/15/2011	2:42:52 PM	PHl3 MFC set to  0.000000
8/15/2011	2:42:52 PM	SiCl4 MFC set to  0.000000
8/15/2011	2:42:52 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	2:42:53 PM	Tube furnace set to 1000
8/15/2011	3:02:53 PM	Helium valve closed
8/15/2011	3:02:53 PM	PH3 valve closed
8/15/2011	3:02:53 PM	Main Vac valve closed
8/15/2011	3:02:53 PM	Bypass valve closed
8/15/2011	3:02:53 PM	H2 valve opened
8/15/2011	3:02:53 PM	BCl3 valve opened
8/15/2011	3:02:53 PM	SiCl4 pre valve opened
8/15/2011	3:02:53 PM	SiCl4 post valve opened
8/15/2011	3:02:53 PM	Bubbler valve opened
8/15/2011	3:02:53 PM	Helium MFC set to  0.000000
8/15/2011	3:02:53 PM	H2 MFC set to  500.000000
8/15/2011	3:02:53 PM	BCl3 MFC set to  2.300000
8/15/2011	3:02:53 PM	PHl3 MFC set to  0.000000
8/15/2011	3:02:53 PM	SiCl4 MFC set to  50.000000
8/15/2011	3:02:53 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	3:02:53 PM	Tube furnace set to 1000
8/15/2011	3:18:53 PM	Helium valve closed
8/15/2011	3:18:53 PM	BCl3 valve closed
8/15/2011	3:18:53 PM	PH3 valve closed
8/15/2011	3:18:53 PM	SiCl4 pre valve closed
8/15/2011	3:18:53 PM	SiCl4 post valve closed
8/15/2011	3:18:53 PM	Main Vac valve closed
8/15/2011	3:18:53 PM	Bypass valve closed
8/15/2011	3:18:53 PM	H2 valve opened
8/15/2011	3:18:53 PM	Bubbler valve opened
8/15/2011	3:18:53 PM	Helium MFC set to  0.000000
8/15/2011	3:18:53 PM	H2 MFC set to  500.000000
8/15/2011	3:18:53 PM	BCl3 MFC set to  0.000000
8/15/2011	3:18:53 PM	PHl3 MFC set to  0.000000
8/15/2011	3:18:53 PM	SiCl4 MFC set to  0.000000
8/15/2011	3:18:53 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	3:18:53 PM	Tube furnace set to 750
8/15/2011	3:23:53 PM	H2 valve closed
8/15/2011	3:23:53 PM	BCl3 valve closed
8/15/2011	3:23:53 PM	PH3 valve closed
8/15/2011	3:23:53 PM	SiCl4 pre valve closed
8/15/2011	3:23:53 PM	SiCl4 post valve closed
8/15/2011	3:23:53 PM	Main Vac valve closed
8/15/2011	3:23:53 PM	Bypass valve closed
8/15/2011	3:23:53 PM	Helium valve opened
8/15/2011	3:23:53 PM	Bubbler valve opened
8/15/2011	3:23:53 PM	Helium MFC set to  500.000000
8/15/2011	3:23:53 PM	H2 MFC set to  0.000000
8/15/2011	3:23:53 PM	BCl3 MFC set to  0.000000
8/15/2011	3:23:53 PM	PHl3 MFC set to  0.000000
8/15/2011	3:23:53 PM	SiCl4 MFC set to  0.000000
8/15/2011	3:23:53 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	3:23:53 PM	Tube furnace set to 0
8/15/2011	3:43:53 PM	Helium valve closed
8/15/2011	3:43:53 PM	H2 valve closed
8/15/2011	3:43:53 PM	BCl3 valve closed
8/15/2011	3:43:53 PM	PH3 valve closed
8/15/2011	3:43:53 PM	SiCl4 pre valve closed
8/15/2011	3:43:53 PM	SiCl4 post valve closed
8/15/2011	3:43:53 PM	Main Vac valve closed
8/15/2011	3:43:53 PM	Bypass valve closed
8/15/2011	3:43:53 PM	Bubbler valve closed
8/15/2011	3:43:53 PM	Helium MFC set to  0.000000
8/15/2011	3:43:53 PM	H2 MFC set to  0.000000
8/15/2011	3:43:53 PM	BCl3 MFC set to  0.000000
8/15/2011	3:43:53 PM	PHl3 MFC set to  0.000000
8/15/2011	3:43:53 PM	SiCl4 MFC set to  0.000000
8/15/2011	3:43:53 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	3:43:53 PM	Tube furnace set to 0
8/15/2011	3:43:54 PM	Run finished at 3:43 PM
8/15/2011	3:51:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/15/2011	3:51:17 PM	Recipe started at 3:51 PM
8/15/2011	3:51:17 PM	Helium valve closed
8/15/2011	3:51:17 PM	H2 valve closed
8/15/2011	3:51:17 PM	BCl3 valve closed
8/15/2011	3:51:17 PM	PH3 valve closed
8/15/2011	3:51:17 PM	SiCl4 pre valve closed
8/15/2011	3:51:17 PM	SiCl4 post valve closed
8/15/2011	3:51:17 PM	Main Vac valve closed
8/15/2011	3:51:17 PM	Bypass valve closed
8/15/2011	3:51:17 PM	Bubbler valve closed
8/15/2011	3:51:17 PM	Helium MFC set to  0.000000
8/15/2011	3:51:17 PM	H2 MFC set to  0.000000
8/15/2011	3:51:17 PM	BCl3 MFC set to  0.000000
8/15/2011	3:51:17 PM	PHl3 MFC set to  0.000000
8/15/2011	3:51:17 PM	SiCl4 MFC set to  0.000000
8/15/2011	3:51:17 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	3:51:18 PM	Tube furnace set to 0
8/15/2011	3:51:21 PM	H2 valve closed
8/15/2011	3:51:21 PM	BCl3 valve closed
8/15/2011	3:51:21 PM	PH3 valve closed
8/15/2011	3:51:21 PM	SiCl4 pre valve closed
8/15/2011	3:51:21 PM	SiCl4 post valve closed
8/15/2011	3:51:21 PM	Main Vac valve closed
8/15/2011	3:51:21 PM	Bypass valve closed
8/15/2011	3:51:21 PM	Bubbler valve closed
8/15/2011	3:51:21 PM	Helium valve opened
8/15/2011	3:51:21 PM	Helium MFC set to  500.000000
8/15/2011	3:51:21 PM	H2 MFC set to  0.000000
8/15/2011	3:51:21 PM	BCl3 MFC set to  0.000000
8/15/2011	3:51:21 PM	PHl3 MFC set to  0.000000
8/15/2011	3:51:21 PM	SiCl4 MFC set to  0.000000
8/15/2011	3:51:21 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	3:51:21 PM	Tube furnace set to 0
8/15/2011	3:51:21 PM	Helium valve closed
8/15/2011	3:51:21 PM	H2 valve closed
8/15/2011	3:51:21 PM	BCl3 valve closed
8/15/2011	3:51:21 PM	PH3 valve closed
8/15/2011	3:51:21 PM	SiCl4 pre valve closed
8/15/2011	3:51:21 PM	SiCl4 post valve closed
8/15/2011	3:51:21 PM	Main Vac valve closed
8/15/2011	3:51:21 PM	Bypass valve closed
8/15/2011	3:51:21 PM	Bubbler valve closed
8/15/2011	3:51:21 PM	Helium MFC set to  0.000000
8/15/2011	3:51:21 PM	H2 MFC set to  0.000000
8/15/2011	3:51:21 PM	BCl3 MFC set to  0.000000
8/15/2011	3:51:21 PM	PHl3 MFC set to  0.000000
8/15/2011	3:51:21 PM	SiCl4 MFC set to  0.000000
8/15/2011	3:51:21 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	3:51:21 PM	Tube furnace set to 0
8/15/2011	3:51:22 PM	Run finished at 3:51 PM
8/15/2011	3:51:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/15/2011	3:59:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/15/2011	3:59:44 PM	Recipe started at 3:59 PM
8/15/2011	3:59:44 PM	Helium valve closed
8/15/2011	3:59:44 PM	H2 valve closed
8/15/2011	3:59:44 PM	BCl3 valve closed
8/15/2011	3:59:44 PM	PH3 valve closed
8/15/2011	3:59:44 PM	SiCl4 pre valve closed
8/15/2011	3:59:44 PM	SiCl4 post valve closed
8/15/2011	3:59:44 PM	Main Vac valve closed
8/15/2011	3:59:44 PM	Bubbler valve closed
8/15/2011	3:59:44 PM	Bypass valve opened
8/15/2011	3:59:44 PM	Helium MFC set to  0.000000
8/15/2011	3:59:44 PM	H2 MFC set to  0.000000
8/15/2011	3:59:44 PM	BCl3 MFC set to  0.000000
8/15/2011	3:59:44 PM	PHl3 MFC set to  0.000000
8/15/2011	3:59:44 PM	SiCl4 MFC set to  0.000000
8/15/2011	3:59:44 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	3:59:45 PM	Tube furnace set to 0
8/15/2011	4:01:04 PM	Helium valve closed
8/15/2011	4:01:04 PM	H2 valve closed
8/15/2011	4:01:04 PM	BCl3 valve closed
8/15/2011	4:01:04 PM	PH3 valve closed
8/15/2011	4:01:04 PM	SiCl4 pre valve closed
8/15/2011	4:01:04 PM	SiCl4 post valve closed
8/15/2011	4:01:04 PM	Main Vac valve closed
8/15/2011	4:01:04 PM	Bubbler valve closed
8/15/2011	4:01:04 PM	Bypass valve opened
8/15/2011	4:01:04 PM	Helium MFC set to  0.000000
8/15/2011	4:01:04 PM	H2 MFC set to  0.000000
8/15/2011	4:01:04 PM	BCl3 MFC set to  0.000000
8/15/2011	4:01:04 PM	PHl3 MFC set to  0.000000
8/15/2011	4:01:04 PM	SiCl4 MFC set to  0.000000
8/15/2011	4:01:04 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	4:01:04 PM	Tube furnace set to 0
8/15/2011	4:02:04 PM	Helium valve closed
8/15/2011	4:02:04 PM	H2 valve closed
8/15/2011	4:02:04 PM	BCl3 valve closed
8/15/2011	4:02:04 PM	PH3 valve closed
8/15/2011	4:02:04 PM	SiCl4 pre valve closed
8/15/2011	4:02:04 PM	SiCl4 post valve closed
8/15/2011	4:02:04 PM	Bypass valve closed
8/15/2011	4:02:04 PM	Bubbler valve closed
8/15/2011	4:02:04 PM	Main Vac valve opened
8/15/2011	4:02:04 PM	Helium MFC set to  0.000000
8/15/2011	4:02:04 PM	H2 MFC set to  0.000000
8/15/2011	4:02:04 PM	BCl3 MFC set to  0.000000
8/15/2011	4:02:04 PM	PHl3 MFC set to  0.000000
8/15/2011	4:02:04 PM	SiCl4 MFC set to  0.000000
8/15/2011	4:02:04 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	4:02:04 PM	Tube furnace set to 0
8/15/2011	4:02:05 PM	Run finished at 4:02 PM
8/15/2011	4:02:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/15/2011	4:03:55 PM	Recipe started at 4:03 PM
8/15/2011	4:03:55 PM	Helium valve closed
8/15/2011	4:03:55 PM	H2 valve closed
8/15/2011	4:03:55 PM	BCl3 valve closed
8/15/2011	4:03:55 PM	PH3 valve closed
8/15/2011	4:03:55 PM	SiCl4 pre valve closed
8/15/2011	4:03:55 PM	SiCl4 post valve closed
8/15/2011	4:03:55 PM	Bypass valve closed
8/15/2011	4:03:55 PM	Bubbler valve closed
8/15/2011	4:03:55 PM	Main Vac valve opened
8/15/2011	4:03:55 PM	Helium MFC set to  0.000000
8/15/2011	4:03:55 PM	H2 MFC set to  0.000000
8/15/2011	4:03:55 PM	BCl3 MFC set to  0.000000
8/15/2011	4:03:55 PM	PHl3 MFC set to  0.000000
8/15/2011	4:03:55 PM	SiCl4 MFC set to  0.000000
8/15/2011	4:03:55 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	4:03:56 PM	Tube furnace set to 100
8/15/2011	4:04:26 PM	H2 valve closed
8/15/2011	4:04:26 PM	BCl3 valve closed
8/15/2011	4:04:26 PM	PH3 valve closed
8/15/2011	4:04:26 PM	SiCl4 pre valve closed
8/15/2011	4:04:26 PM	SiCl4 post valve closed
8/15/2011	4:04:26 PM	Bypass valve closed
8/15/2011	4:04:26 PM	Bubbler valve closed
8/15/2011	4:04:26 PM	Helium valve opened
8/15/2011	4:04:26 PM	Main Vac valve opened
8/15/2011	4:04:26 PM	Helium MFC set to  20.000000
8/15/2011	4:04:26 PM	H2 MFC set to  0.000000
8/15/2011	4:04:26 PM	BCl3 MFC set to  0.000000
8/15/2011	4:04:26 PM	PHl3 MFC set to  0.000000
8/15/2011	4:04:26 PM	SiCl4 MFC set to  0.000000
8/15/2011	4:04:26 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	4:04:26 PM	Tube furnace set to 100
8/15/2011	4:04:56 PM	Helium valve closed
8/15/2011	4:04:56 PM	H2 valve closed
8/15/2011	4:04:56 PM	BCl3 valve closed
8/15/2011	4:04:56 PM	PH3 valve closed
8/15/2011	4:04:56 PM	SiCl4 pre valve closed
8/15/2011	4:04:56 PM	SiCl4 post valve closed
8/15/2011	4:04:56 PM	Bypass valve closed
8/15/2011	4:04:56 PM	Bubbler valve closed
8/15/2011	4:04:56 PM	Main Vac valve opened
8/15/2011	4:04:56 PM	Helium MFC set to  0.000000
8/15/2011	4:04:56 PM	H2 MFC set to  0.000000
8/15/2011	4:04:56 PM	BCl3 MFC set to  0.000000
8/15/2011	4:04:56 PM	PHl3 MFC set to  0.000000
8/15/2011	4:04:56 PM	SiCl4 MFC set to  0.000000
8/15/2011	4:04:56 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	4:04:56 PM	Tube furnace set to 100
8/15/2011	4:05:26 PM	H2 valve closed
8/15/2011	4:05:26 PM	BCl3 valve closed
8/15/2011	4:05:26 PM	PH3 valve closed
8/15/2011	4:05:26 PM	SiCl4 pre valve closed
8/15/2011	4:05:26 PM	SiCl4 post valve closed
8/15/2011	4:05:26 PM	Bypass valve closed
8/15/2011	4:05:26 PM	Bubbler valve closed
8/15/2011	4:05:26 PM	Helium valve opened
8/15/2011	4:05:26 PM	Main Vac valve opened
8/15/2011	4:05:26 PM	Helium MFC set to  20.000000
8/15/2011	4:05:26 PM	H2 MFC set to  0.000000
8/15/2011	4:05:26 PM	BCl3 MFC set to  0.000000
8/15/2011	4:05:26 PM	PHl3 MFC set to  0.000000
8/15/2011	4:05:26 PM	SiCl4 MFC set to  0.000000
8/15/2011	4:05:26 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	4:05:26 PM	Tube furnace set to 100
8/15/2011	4:05:56 PM	Helium valve closed
8/15/2011	4:05:56 PM	H2 valve closed
8/15/2011	4:05:56 PM	BCl3 valve closed
8/15/2011	4:05:56 PM	PH3 valve closed
8/15/2011	4:05:56 PM	SiCl4 pre valve closed
8/15/2011	4:05:56 PM	SiCl4 post valve closed
8/15/2011	4:05:56 PM	Bypass valve closed
8/15/2011	4:05:56 PM	Bubbler valve closed
8/15/2011	4:05:56 PM	Main Vac valve opened
8/15/2011	4:05:56 PM	Helium MFC set to  0.000000
8/15/2011	4:05:56 PM	H2 MFC set to  0.000000
8/15/2011	4:05:56 PM	BCl3 MFC set to  0.000000
8/15/2011	4:05:56 PM	PHl3 MFC set to  0.000000
8/15/2011	4:05:56 PM	SiCl4 MFC set to  0.000000
8/15/2011	4:05:56 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	4:05:56 PM	Tube furnace set to 100
8/15/2011	4:06:26 PM	H2 valve closed
8/15/2011	4:06:26 PM	BCl3 valve closed
8/15/2011	4:06:26 PM	PH3 valve closed
8/15/2011	4:06:26 PM	SiCl4 pre valve closed
8/15/2011	4:06:26 PM	SiCl4 post valve closed
8/15/2011	4:06:26 PM	Bypass valve closed
8/15/2011	4:06:26 PM	Bubbler valve closed
8/15/2011	4:06:26 PM	Helium valve opened
8/15/2011	4:06:26 PM	Main Vac valve opened
8/15/2011	4:06:26 PM	Helium MFC set to  20.000000
8/15/2011	4:06:26 PM	H2 MFC set to  0.000000
8/15/2011	4:06:26 PM	BCl3 MFC set to  0.000000
8/15/2011	4:06:26 PM	PHl3 MFC set to  0.000000
8/15/2011	4:06:26 PM	SiCl4 MFC set to  0.000000
8/15/2011	4:06:26 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	4:06:26 PM	Tube furnace set to 100
8/15/2011	4:06:57 PM	Helium valve closed
8/15/2011	4:06:57 PM	H2 valve closed
8/15/2011	4:06:57 PM	BCl3 valve closed
8/15/2011	4:06:57 PM	PH3 valve closed
8/15/2011	4:06:57 PM	SiCl4 pre valve closed
8/15/2011	4:06:57 PM	SiCl4 post valve closed
8/15/2011	4:06:57 PM	Bypass valve closed
8/15/2011	4:06:57 PM	Bubbler valve closed
8/15/2011	4:06:57 PM	Main Vac valve opened
8/15/2011	4:06:57 PM	Helium MFC set to  0.000000
8/15/2011	4:06:57 PM	H2 MFC set to  0.000000
8/15/2011	4:06:57 PM	BCl3 MFC set to  0.000000
8/15/2011	4:06:57 PM	PHl3 MFC set to  0.000000
8/15/2011	4:06:57 PM	SiCl4 MFC set to  0.000000
8/15/2011	4:06:57 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	4:06:57 PM	Tube furnace set to 100
8/15/2011	4:07:27 PM	H2 valve closed
8/15/2011	4:07:27 PM	BCl3 valve closed
8/15/2011	4:07:27 PM	PH3 valve closed
8/15/2011	4:07:27 PM	SiCl4 pre valve closed
8/15/2011	4:07:27 PM	SiCl4 post valve closed
8/15/2011	4:07:27 PM	Bypass valve closed
8/15/2011	4:07:27 PM	Bubbler valve closed
8/15/2011	4:07:27 PM	Helium valve opened
8/15/2011	4:07:27 PM	Main Vac valve opened
8/15/2011	4:07:27 PM	Helium MFC set to  20.000000
8/15/2011	4:07:27 PM	H2 MFC set to  0.000000
8/15/2011	4:07:27 PM	BCl3 MFC set to  0.000000
8/15/2011	4:07:27 PM	PHl3 MFC set to  0.000000
8/15/2011	4:07:27 PM	SiCl4 MFC set to  0.000000
8/15/2011	4:07:27 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	4:07:27 PM	Tube furnace set to 100
8/15/2011	4:07:57 PM	Helium valve closed
8/15/2011	4:07:57 PM	H2 valve closed
8/15/2011	4:07:57 PM	BCl3 valve closed
8/15/2011	4:07:57 PM	PH3 valve closed
8/15/2011	4:07:57 PM	SiCl4 pre valve closed
8/15/2011	4:07:57 PM	SiCl4 post valve closed
8/15/2011	4:07:57 PM	Bypass valve closed
8/15/2011	4:07:57 PM	Bubbler valve closed
8/15/2011	4:07:57 PM	Main Vac valve opened
8/15/2011	4:07:57 PM	Helium MFC set to  0.000000
8/15/2011	4:07:57 PM	H2 MFC set to  0.000000
8/15/2011	4:07:57 PM	BCl3 MFC set to  0.000000
8/15/2011	4:07:57 PM	PHl3 MFC set to  0.000000
8/15/2011	4:07:57 PM	SiCl4 MFC set to  0.000000
8/15/2011	4:07:57 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	4:07:57 PM	Tube furnace set to 100
8/15/2011	4:08:27 PM	H2 valve closed
8/15/2011	4:08:27 PM	BCl3 valve closed
8/15/2011	4:08:27 PM	PH3 valve closed
8/15/2011	4:08:27 PM	SiCl4 pre valve closed
8/15/2011	4:08:27 PM	SiCl4 post valve closed
8/15/2011	4:08:27 PM	Bypass valve closed
8/15/2011	4:08:27 PM	Bubbler valve closed
8/15/2011	4:08:27 PM	Helium valve opened
8/15/2011	4:08:27 PM	Main Vac valve opened
8/15/2011	4:08:27 PM	Helium MFC set to  20.000000
8/15/2011	4:08:27 PM	H2 MFC set to  0.000000
8/15/2011	4:08:27 PM	BCl3 MFC set to  0.000000
8/15/2011	4:08:27 PM	PHl3 MFC set to  0.000000
8/15/2011	4:08:27 PM	SiCl4 MFC set to  0.000000
8/15/2011	4:08:27 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	4:08:27 PM	Tube furnace set to 100
8/15/2011	4:08:57 PM	Helium valve closed
8/15/2011	4:08:57 PM	H2 valve closed
8/15/2011	4:08:57 PM	BCl3 valve closed
8/15/2011	4:08:57 PM	PH3 valve closed
8/15/2011	4:08:57 PM	SiCl4 pre valve closed
8/15/2011	4:08:57 PM	SiCl4 post valve closed
8/15/2011	4:08:57 PM	Bypass valve closed
8/15/2011	4:08:57 PM	Bubbler valve closed
8/15/2011	4:08:57 PM	Main Vac valve opened
8/15/2011	4:08:57 PM	Helium MFC set to  0.000000
8/15/2011	4:08:57 PM	H2 MFC set to  0.000000
8/15/2011	4:08:57 PM	BCl3 MFC set to  0.000000
8/15/2011	4:08:57 PM	PHl3 MFC set to  0.000000
8/15/2011	4:08:57 PM	SiCl4 MFC set to  0.000000
8/15/2011	4:08:57 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	4:08:57 PM	Tube furnace set to 100
8/15/2011	4:09:28 PM	H2 valve closed
8/15/2011	4:09:28 PM	BCl3 valve closed
8/15/2011	4:09:28 PM	PH3 valve closed
8/15/2011	4:09:28 PM	SiCl4 pre valve closed
8/15/2011	4:09:28 PM	SiCl4 post valve closed
8/15/2011	4:09:28 PM	Bypass valve closed
8/15/2011	4:09:28 PM	Bubbler valve closed
8/15/2011	4:09:28 PM	Helium valve opened
8/15/2011	4:09:28 PM	Main Vac valve opened
8/15/2011	4:09:28 PM	Helium MFC set to  20.000000
8/15/2011	4:09:28 PM	H2 MFC set to  0.000000
8/15/2011	4:09:28 PM	BCl3 MFC set to  0.000000
8/15/2011	4:09:28 PM	PHl3 MFC set to  0.000000
8/15/2011	4:09:28 PM	SiCl4 MFC set to  0.000000
8/15/2011	4:09:28 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	4:09:28 PM	Tube furnace set to 100
8/15/2011	4:09:58 PM	Helium valve closed
8/15/2011	4:09:58 PM	H2 valve closed
8/15/2011	4:09:58 PM	BCl3 valve closed
8/15/2011	4:09:58 PM	PH3 valve closed
8/15/2011	4:09:58 PM	SiCl4 pre valve closed
8/15/2011	4:09:58 PM	SiCl4 post valve closed
8/15/2011	4:09:58 PM	Bypass valve closed
8/15/2011	4:09:58 PM	Bubbler valve closed
8/15/2011	4:09:58 PM	Main Vac valve opened
8/15/2011	4:09:58 PM	Helium MFC set to  0.000000
8/15/2011	4:09:58 PM	H2 MFC set to  0.000000
8/15/2011	4:09:58 PM	BCl3 MFC set to  0.000000
8/15/2011	4:09:58 PM	PHl3 MFC set to  0.000000
8/15/2011	4:09:58 PM	SiCl4 MFC set to  0.000000
8/15/2011	4:09:58 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	4:09:58 PM	Tube furnace set to 100
8/15/2011	4:10:28 PM	H2 valve closed
8/15/2011	4:10:28 PM	BCl3 valve closed
8/15/2011	4:10:28 PM	PH3 valve closed
8/15/2011	4:10:28 PM	SiCl4 pre valve closed
8/15/2011	4:10:28 PM	SiCl4 post valve closed
8/15/2011	4:10:28 PM	Bypass valve closed
8/15/2011	4:10:28 PM	Bubbler valve closed
8/15/2011	4:10:28 PM	Helium valve opened
8/15/2011	4:10:28 PM	Main Vac valve opened
8/15/2011	4:10:28 PM	Helium MFC set to  20.000000
8/15/2011	4:10:28 PM	H2 MFC set to  0.000000
8/15/2011	4:10:28 PM	BCl3 MFC set to  0.000000
8/15/2011	4:10:28 PM	PHl3 MFC set to  0.000000
8/15/2011	4:10:28 PM	SiCl4 MFC set to  0.000000
8/15/2011	4:10:28 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	4:10:28 PM	Tube furnace set to 100
8/15/2011	4:10:58 PM	Helium valve closed
8/15/2011	4:10:58 PM	H2 valve closed
8/15/2011	4:10:58 PM	BCl3 valve closed
8/15/2011	4:10:58 PM	PH3 valve closed
8/15/2011	4:10:58 PM	SiCl4 pre valve closed
8/15/2011	4:10:58 PM	SiCl4 post valve closed
8/15/2011	4:10:58 PM	Bypass valve closed
8/15/2011	4:10:58 PM	Bubbler valve closed
8/15/2011	4:10:58 PM	Main Vac valve opened
8/15/2011	4:10:58 PM	Helium MFC set to  0.000000
8/15/2011	4:10:58 PM	H2 MFC set to  0.000000
8/15/2011	4:10:58 PM	BCl3 MFC set to  0.000000
8/15/2011	4:10:58 PM	PHl3 MFC set to  0.000000
8/15/2011	4:10:58 PM	SiCl4 MFC set to  0.000000
8/15/2011	4:10:58 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	4:10:58 PM	Tube furnace set to 100
8/15/2011	4:11:28 PM	H2 valve closed
8/15/2011	4:11:28 PM	BCl3 valve closed
8/15/2011	4:11:28 PM	PH3 valve closed
8/15/2011	4:11:28 PM	SiCl4 pre valve closed
8/15/2011	4:11:28 PM	SiCl4 post valve closed
8/15/2011	4:11:28 PM	Bypass valve closed
8/15/2011	4:11:28 PM	Bubbler valve closed
8/15/2011	4:11:28 PM	Helium valve opened
8/15/2011	4:11:28 PM	Main Vac valve opened
8/15/2011	4:11:28 PM	Helium MFC set to  20.000000
8/15/2011	4:11:28 PM	H2 MFC set to  0.000000
8/15/2011	4:11:28 PM	BCl3 MFC set to  0.000000
8/15/2011	4:11:28 PM	PHl3 MFC set to  0.000000
8/15/2011	4:11:28 PM	SiCl4 MFC set to  0.000000
8/15/2011	4:11:28 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	4:11:29 PM	Tube furnace set to 100
8/15/2011	4:11:59 PM	Helium valve closed
8/15/2011	4:11:59 PM	H2 valve closed
8/15/2011	4:11:59 PM	BCl3 valve closed
8/15/2011	4:11:59 PM	PH3 valve closed
8/15/2011	4:11:59 PM	SiCl4 pre valve closed
8/15/2011	4:11:59 PM	SiCl4 post valve closed
8/15/2011	4:11:59 PM	Bypass valve closed
8/15/2011	4:11:59 PM	Bubbler valve closed
8/15/2011	4:11:59 PM	Main Vac valve opened
8/15/2011	4:11:59 PM	Helium MFC set to  0.000000
8/15/2011	4:11:59 PM	H2 MFC set to  0.000000
8/15/2011	4:11:59 PM	BCl3 MFC set to  0.000000
8/15/2011	4:11:59 PM	PHl3 MFC set to  0.000000
8/15/2011	4:11:59 PM	SiCl4 MFC set to  0.000000
8/15/2011	4:11:59 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	4:11:59 PM	Tube furnace set to 100
8/15/2011	4:12:29 PM	H2 valve closed
8/15/2011	4:12:29 PM	BCl3 valve closed
8/15/2011	4:12:29 PM	PH3 valve closed
8/15/2011	4:12:29 PM	SiCl4 pre valve closed
8/15/2011	4:12:29 PM	SiCl4 post valve closed
8/15/2011	4:12:29 PM	Bypass valve closed
8/15/2011	4:12:29 PM	Bubbler valve closed
8/15/2011	4:12:29 PM	Helium valve opened
8/15/2011	4:12:29 PM	Main Vac valve opened
8/15/2011	4:12:29 PM	Helium MFC set to  20.000000
8/15/2011	4:12:29 PM	H2 MFC set to  0.000000
8/15/2011	4:12:29 PM	BCl3 MFC set to  0.000000
8/15/2011	4:12:29 PM	PHl3 MFC set to  0.000000
8/15/2011	4:12:29 PM	SiCl4 MFC set to  0.000000
8/15/2011	4:12:29 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	4:12:29 PM	Tube furnace set to 100
8/15/2011	4:12:59 PM	Helium valve closed
8/15/2011	4:12:59 PM	H2 valve closed
8/15/2011	4:12:59 PM	BCl3 valve closed
8/15/2011	4:12:59 PM	PH3 valve closed
8/15/2011	4:12:59 PM	SiCl4 pre valve closed
8/15/2011	4:12:59 PM	SiCl4 post valve closed
8/15/2011	4:12:59 PM	Bypass valve closed
8/15/2011	4:12:59 PM	Bubbler valve closed
8/15/2011	4:12:59 PM	Main Vac valve opened
8/15/2011	4:12:59 PM	Helium MFC set to  0.000000
8/15/2011	4:12:59 PM	H2 MFC set to  0.000000
8/15/2011	4:12:59 PM	BCl3 MFC set to  0.000000
8/15/2011	4:12:59 PM	PHl3 MFC set to  0.000000
8/15/2011	4:12:59 PM	SiCl4 MFC set to  0.000000
8/15/2011	4:12:59 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	4:12:59 PM	Tube furnace set to 100
8/15/2011	4:13:29 PM	H2 valve closed
8/15/2011	4:13:29 PM	BCl3 valve closed
8/15/2011	4:13:29 PM	PH3 valve closed
8/15/2011	4:13:29 PM	SiCl4 pre valve closed
8/15/2011	4:13:29 PM	SiCl4 post valve closed
8/15/2011	4:13:29 PM	Bypass valve closed
8/15/2011	4:13:29 PM	Bubbler valve closed
8/15/2011	4:13:29 PM	Helium valve opened
8/15/2011	4:13:29 PM	Main Vac valve opened
8/15/2011	4:13:29 PM	Helium MFC set to  20.000000
8/15/2011	4:13:29 PM	H2 MFC set to  0.000000
8/15/2011	4:13:29 PM	BCl3 MFC set to  0.000000
8/15/2011	4:13:29 PM	PHl3 MFC set to  0.000000
8/15/2011	4:13:29 PM	SiCl4 MFC set to  0.000000
8/15/2011	4:13:29 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	4:13:29 PM	Tube furnace set to 100
8/15/2011	4:13:59 PM	Helium valve closed
8/15/2011	4:13:59 PM	H2 valve closed
8/15/2011	4:13:59 PM	BCl3 valve closed
8/15/2011	4:13:59 PM	PH3 valve closed
8/15/2011	4:13:59 PM	SiCl4 pre valve closed
8/15/2011	4:13:59 PM	SiCl4 post valve closed
8/15/2011	4:13:59 PM	Bypass valve closed
8/15/2011	4:13:59 PM	Bubbler valve closed
8/15/2011	4:13:59 PM	Main Vac valve opened
8/15/2011	4:13:59 PM	Helium MFC set to  0.000000
8/15/2011	4:13:59 PM	H2 MFC set to  0.000000
8/15/2011	4:13:59 PM	BCl3 MFC set to  0.000000
8/15/2011	4:13:59 PM	PHl3 MFC set to  0.000000
8/15/2011	4:13:59 PM	SiCl4 MFC set to  0.000000
8/15/2011	4:13:59 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	4:14:00 PM	Tube furnace set to 100
8/15/2011	4:14:01 PM	Run finished at 4:14 PM
8/15/2011	4:14:28 PM	Tube furnace set to 250
8/15/2011	4:15:13 PM	Recipe started at 4:15 PM
8/15/2011	4:15:13 PM	Helium valve closed
8/15/2011	4:15:13 PM	H2 valve closed
8/15/2011	4:15:13 PM	BCl3 valve closed
8/15/2011	4:15:13 PM	PH3 valve closed
8/15/2011	4:15:13 PM	SiCl4 pre valve closed
8/15/2011	4:15:13 PM	SiCl4 post valve closed
8/15/2011	4:15:13 PM	Main Vac valve closed
8/15/2011	4:15:13 PM	Bypass valve closed
8/15/2011	4:15:13 PM	Bubbler valve closed
8/15/2011	4:15:13 PM	Helium MFC set to  0.000000
8/15/2011	4:15:13 PM	H2 MFC set to  0.000000
8/15/2011	4:15:13 PM	BCl3 MFC set to  0.000000
8/15/2011	4:15:13 PM	PHl3 MFC set to  0.000000
8/15/2011	4:15:13 PM	SiCl4 MFC set to  0.000000
8/15/2011	4:15:13 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	4:15:13 PM	Tube furnace set to 0
8/15/2011	4:15:16 PM	Helium valve closed
8/15/2011	4:15:16 PM	BCl3 valve closed
8/15/2011	4:15:16 PM	PH3 valve closed
8/15/2011	4:15:16 PM	SiCl4 pre valve closed
8/15/2011	4:15:16 PM	SiCl4 post valve closed
8/15/2011	4:15:16 PM	Main Vac valve closed
8/15/2011	4:15:16 PM	Bypass valve closed
8/15/2011	4:15:16 PM	Bubbler valve closed
8/15/2011	4:15:16 PM	H2 valve opened
8/15/2011	4:15:16 PM	Helium MFC set to  0.000000
8/15/2011	4:15:16 PM	H2 MFC set to  500.000000
8/15/2011	4:15:16 PM	BCl3 MFC set to  0.000000
8/15/2011	4:15:16 PM	PHl3 MFC set to  0.000000
8/15/2011	4:15:16 PM	SiCl4 MFC set to  0.000000
8/15/2011	4:15:16 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	4:15:16 PM	Tube furnace set to 0
8/15/2011	4:16:19 PM	Helium valve closed
8/15/2011	4:16:19 PM	BCl3 valve closed
8/15/2011	4:16:19 PM	PH3 valve closed
8/15/2011	4:16:19 PM	SiCl4 pre valve closed
8/15/2011	4:16:19 PM	SiCl4 post valve closed
8/15/2011	4:16:19 PM	Main Vac valve closed
8/15/2011	4:16:19 PM	Bypass valve closed
8/15/2011	4:16:19 PM	H2 valve opened
8/15/2011	4:16:19 PM	Bubbler valve opened
8/15/2011	4:16:19 PM	Helium MFC set to  0.000000
8/15/2011	4:16:19 PM	H2 MFC set to  500.000000
8/15/2011	4:16:19 PM	BCl3 MFC set to  0.000000
8/15/2011	4:16:19 PM	PHl3 MFC set to  0.000000
8/15/2011	4:16:19 PM	SiCl4 MFC set to  0.000000
8/15/2011	4:16:19 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	4:16:19 PM	Tube furnace set to 0
8/15/2011	4:16:20 PM	Helium valve closed
8/15/2011	4:16:20 PM	BCl3 valve closed
8/15/2011	4:16:20 PM	PH3 valve closed
8/15/2011	4:16:20 PM	SiCl4 pre valve closed
8/15/2011	4:16:20 PM	SiCl4 post valve closed
8/15/2011	4:16:20 PM	Main Vac valve closed
8/15/2011	4:16:20 PM	Bypass valve closed
8/15/2011	4:16:20 PM	H2 valve opened
8/15/2011	4:16:20 PM	Bubbler valve opened
8/15/2011	4:16:20 PM	Helium MFC set to  0.000000
8/15/2011	4:16:20 PM	H2 MFC set to  500.000000
8/15/2011	4:16:20 PM	BCl3 MFC set to  0.000000
8/15/2011	4:16:20 PM	PHl3 MFC set to  0.000000
8/15/2011	4:16:20 PM	SiCl4 MFC set to  0.000000
8/15/2011	4:16:20 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	4:16:20 PM	Tube furnace set to 1000
8/15/2011	4:36:20 PM	Helium valve closed
8/15/2011	4:36:20 PM	PH3 valve closed
8/15/2011	4:36:20 PM	Main Vac valve closed
8/15/2011	4:36:20 PM	Bypass valve closed
8/15/2011	4:36:20 PM	H2 valve opened
8/15/2011	4:36:20 PM	BCl3 valve opened
8/15/2011	4:36:20 PM	SiCl4 pre valve opened
8/15/2011	4:36:20 PM	SiCl4 post valve opened
8/15/2011	4:36:20 PM	Bubbler valve opened
8/15/2011	4:36:20 PM	Helium MFC set to  0.000000
8/15/2011	4:36:20 PM	H2 MFC set to  500.000000
8/15/2011	4:36:20 PM	BCl3 MFC set to  2.300000
8/15/2011	4:36:20 PM	PHl3 MFC set to  0.000000
8/15/2011	4:36:20 PM	SiCl4 MFC set to  50.000000
8/15/2011	4:36:20 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	4:36:20 PM	Tube furnace set to 1000
8/15/2011	4:52:20 PM	Helium valve closed
8/15/2011	4:52:20 PM	BCl3 valve closed
8/15/2011	4:52:20 PM	PH3 valve closed
8/15/2011	4:52:20 PM	SiCl4 pre valve closed
8/15/2011	4:52:20 PM	SiCl4 post valve closed
8/15/2011	4:52:20 PM	Main Vac valve closed
8/15/2011	4:52:20 PM	Bypass valve closed
8/15/2011	4:52:20 PM	H2 valve opened
8/15/2011	4:52:20 PM	Bubbler valve opened
8/15/2011	4:52:20 PM	Helium MFC set to  0.000000
8/15/2011	4:52:20 PM	H2 MFC set to  500.000000
8/15/2011	4:52:20 PM	BCl3 MFC set to  0.000000
8/15/2011	4:52:20 PM	PHl3 MFC set to  0.000000
8/15/2011	4:52:20 PM	SiCl4 MFC set to  0.000000
8/15/2011	4:52:20 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	4:52:21 PM	Tube furnace set to 750
8/15/2011	4:57:21 PM	H2 valve closed
8/15/2011	4:57:21 PM	BCl3 valve closed
8/15/2011	4:57:21 PM	PH3 valve closed
8/15/2011	4:57:21 PM	SiCl4 pre valve closed
8/15/2011	4:57:21 PM	SiCl4 post valve closed
8/15/2011	4:57:21 PM	Main Vac valve closed
8/15/2011	4:57:21 PM	Bypass valve closed
8/15/2011	4:57:21 PM	Helium valve opened
8/15/2011	4:57:21 PM	Bubbler valve opened
8/15/2011	4:57:21 PM	Helium MFC set to  500.000000
8/15/2011	4:57:21 PM	H2 MFC set to  0.000000
8/15/2011	4:57:21 PM	BCl3 MFC set to  0.000000
8/15/2011	4:57:21 PM	PHl3 MFC set to  0.000000
8/15/2011	4:57:21 PM	SiCl4 MFC set to  0.000000
8/15/2011	4:57:21 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	4:57:21 PM	Tube furnace set to 0
8/15/2011	5:17:21 PM	Helium valve closed
8/15/2011	5:17:21 PM	H2 valve closed
8/15/2011	5:17:21 PM	BCl3 valve closed
8/15/2011	5:17:21 PM	PH3 valve closed
8/15/2011	5:17:21 PM	SiCl4 pre valve closed
8/15/2011	5:17:21 PM	SiCl4 post valve closed
8/15/2011	5:17:21 PM	Main Vac valve closed
8/15/2011	5:17:21 PM	Bypass valve closed
8/15/2011	5:17:21 PM	Bubbler valve closed
8/15/2011	5:17:21 PM	Helium MFC set to  0.000000
8/15/2011	5:17:21 PM	H2 MFC set to  0.000000
8/15/2011	5:17:21 PM	BCl3 MFC set to  0.000000
8/15/2011	5:17:21 PM	PHl3 MFC set to  0.000000
8/15/2011	5:17:21 PM	SiCl4 MFC set to  0.000000
8/15/2011	5:17:21 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	5:17:21 PM	Tube furnace set to 0
8/15/2011	5:17:22 PM	Run finished at 5:17 PM
8/15/2011	5:17:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/15/2011	5:17:46 PM	Recipe started at 5:17 PM
8/15/2011	5:17:46 PM	Helium valve closed
8/15/2011	5:17:46 PM	H2 valve closed
8/15/2011	5:17:46 PM	BCl3 valve closed
8/15/2011	5:17:46 PM	PH3 valve closed
8/15/2011	5:17:46 PM	SiCl4 pre valve closed
8/15/2011	5:17:46 PM	SiCl4 post valve closed
8/15/2011	5:17:46 PM	Main Vac valve closed
8/15/2011	5:17:46 PM	Bypass valve closed
8/15/2011	5:17:46 PM	Bubbler valve closed
8/15/2011	5:17:46 PM	Helium MFC set to  0.000000
8/15/2011	5:17:46 PM	H2 MFC set to  0.000000
8/15/2011	5:17:46 PM	BCl3 MFC set to  0.000000
8/15/2011	5:17:46 PM	PHl3 MFC set to  0.000000
8/15/2011	5:17:46 PM	SiCl4 MFC set to  0.000000
8/15/2011	5:17:46 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	5:17:46 PM	Tube furnace set to 0
8/15/2011	5:17:49 PM	H2 valve closed
8/15/2011	5:17:49 PM	BCl3 valve closed
8/15/2011	5:17:49 PM	PH3 valve closed
8/15/2011	5:17:49 PM	SiCl4 pre valve closed
8/15/2011	5:17:49 PM	SiCl4 post valve closed
8/15/2011	5:17:49 PM	Main Vac valve closed
8/15/2011	5:17:49 PM	Bypass valve closed
8/15/2011	5:17:49 PM	Bubbler valve closed
8/15/2011	5:17:49 PM	Helium valve opened
8/15/2011	5:17:49 PM	Helium MFC set to  500.000000
8/15/2011	5:17:49 PM	H2 MFC set to  0.000000
8/15/2011	5:17:49 PM	BCl3 MFC set to  0.000000
8/15/2011	5:17:49 PM	PHl3 MFC set to  0.000000
8/15/2011	5:17:49 PM	SiCl4 MFC set to  0.000000
8/15/2011	5:17:49 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	5:17:50 PM	Tube furnace set to 0
8/15/2011	5:17:50 PM	Helium valve closed
8/15/2011	5:17:50 PM	H2 valve closed
8/15/2011	5:17:50 PM	BCl3 valve closed
8/15/2011	5:17:50 PM	PH3 valve closed
8/15/2011	5:17:50 PM	SiCl4 pre valve closed
8/15/2011	5:17:50 PM	SiCl4 post valve closed
8/15/2011	5:17:50 PM	Main Vac valve closed
8/15/2011	5:17:50 PM	Bypass valve closed
8/15/2011	5:17:50 PM	Bubbler valve closed
8/15/2011	5:17:50 PM	Helium MFC set to  0.000000
8/15/2011	5:17:50 PM	H2 MFC set to  0.000000
8/15/2011	5:17:50 PM	BCl3 MFC set to  0.000000
8/15/2011	5:17:50 PM	PHl3 MFC set to  0.000000
8/15/2011	5:17:50 PM	SiCl4 MFC set to  0.000000
8/15/2011	5:17:50 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	5:17:50 PM	Tube furnace set to 0
8/15/2011	5:17:51 PM	Run finished at 5:17 PM
8/15/2011	5:17:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/15/2011	5:28:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/15/2011	5:28:38 PM	Recipe started at 5:28 PM
8/15/2011	5:28:38 PM	Helium valve closed
8/15/2011	5:28:38 PM	H2 valve closed
8/15/2011	5:28:38 PM	BCl3 valve closed
8/15/2011	5:28:38 PM	PH3 valve closed
8/15/2011	5:28:38 PM	SiCl4 pre valve closed
8/15/2011	5:28:38 PM	SiCl4 post valve closed
8/15/2011	5:28:38 PM	Main Vac valve closed
8/15/2011	5:28:38 PM	Bubbler valve closed
8/15/2011	5:28:38 PM	Bypass valve opened
8/15/2011	5:28:38 PM	Helium MFC set to  0.000000
8/15/2011	5:28:38 PM	H2 MFC set to  0.000000
8/15/2011	5:28:38 PM	BCl3 MFC set to  0.000000
8/15/2011	5:28:38 PM	PHl3 MFC set to  0.000000
8/15/2011	5:28:38 PM	SiCl4 MFC set to  0.000000
8/15/2011	5:28:38 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	5:28:38 PM	Tube furnace set to 0
8/15/2011	5:29:56 PM	Helium valve closed
8/15/2011	5:29:56 PM	H2 valve closed
8/15/2011	5:29:56 PM	BCl3 valve closed
8/15/2011	5:29:56 PM	PH3 valve closed
8/15/2011	5:29:56 PM	SiCl4 pre valve closed
8/15/2011	5:29:56 PM	SiCl4 post valve closed
8/15/2011	5:29:56 PM	Main Vac valve closed
8/15/2011	5:29:56 PM	Bubbler valve closed
8/15/2011	5:29:56 PM	Bypass valve opened
8/15/2011	5:29:56 PM	Helium MFC set to  0.000000
8/15/2011	5:29:56 PM	H2 MFC set to  0.000000
8/15/2011	5:29:56 PM	BCl3 MFC set to  0.000000
8/15/2011	5:29:56 PM	PHl3 MFC set to  0.000000
8/15/2011	5:29:56 PM	SiCl4 MFC set to  0.000000
8/15/2011	5:29:56 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	5:29:56 PM	Tube furnace set to 0
8/15/2011	5:30:56 PM	Helium valve closed
8/15/2011	5:30:56 PM	H2 valve closed
8/15/2011	5:30:56 PM	BCl3 valve closed
8/15/2011	5:30:56 PM	PH3 valve closed
8/15/2011	5:30:56 PM	SiCl4 pre valve closed
8/15/2011	5:30:56 PM	SiCl4 post valve closed
8/15/2011	5:30:56 PM	Bypass valve closed
8/15/2011	5:30:56 PM	Bubbler valve closed
8/15/2011	5:30:56 PM	Main Vac valve opened
8/15/2011	5:30:56 PM	Helium MFC set to  0.000000
8/15/2011	5:30:56 PM	H2 MFC set to  0.000000
8/15/2011	5:30:56 PM	BCl3 MFC set to  0.000000
8/15/2011	5:30:56 PM	PHl3 MFC set to  0.000000
8/15/2011	5:30:56 PM	SiCl4 MFC set to  0.000000
8/15/2011	5:30:56 PM	Bypass solenoid MFC set to  0.000000
8/15/2011	5:30:56 PM	Tube furnace set to 0
8/15/2011	5:30:57 PM	Run finished at 5:30 PM
8/15/2011	5:30:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
